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    • 58. 发明公开
    • 글래스 기판 증착장치 및 이를 이용하는 글래스 기판 증착방법
    • 化学气相沉积装置及其使用方法
    • KR1020130140497A
    • 2013-12-24
    • KR1020120063947
    • 2012-06-14
    • 에스엔유 프리시젼 주식회사
    • 김현우여다영박상현유상우김도곤한찬희
    • H01L31/18H01L31/042
    • H01L31/18C03C17/22C03C2217/288C03C2218/11C23C18/1204C23C18/1245C23C18/1283C23C18/1287
    • The present invention relates to a glass substrate deposition apparatus, a glass substrate deposition apparatus of the present invention in an apparatus for depositing a glass substrate includes: a reaction bath for accommodating a mixed solution which an indium chloride (InCl3) solution and a processing solution are mixed to make the glass substrate contained; a stirring member for stirring the mixed solution in the reaction bath; a temperature measurement member for measuring the temperature of the mixed solution; a double boiling bath for accommodating a double boil solution to contain the reaction bath; a heating unit for heating the double boiling bath to make indium chloride be deposited on the glass substrate by increasing the temperature of the mixed solution in the reaction bath. Therefore, according to the present invention, a glass substrate deposition apparatus capable of easily depositing indium chloride on a substrate using a double boiling technique and a glass substrate deposition method using the same are provided. [Reference numerals] (130) Temperature measurement member;(160) Control unit
    • 本发明涉及一种玻璃基板沉积装置,本发明的玻璃基板沉积装置,用于沉积玻璃基板的装置包括:用于容纳氯化铟(InCl 3)溶液和处理溶液的混合溶液的反应槽 混合以使玻璃基板包含; 用于搅拌反应槽中的混合溶液的搅拌构件; 用于测量混合溶液的温度的温度测量构件; 用于容纳双沸腾溶液以容纳反应浴的双沸浴; 用于加热双沸浴以通过增加反应浴中的混合溶液的温度使氯化铟沉积在玻璃基板上的加热单元。 因此,根据本发明,提供一种能够使用双沸腾技术容易地在基板上沉积氯化铟的玻璃基板沉积设备和使用其的玻璃基板沉积方法。 (附图标记)(130)温度测量部件;(160)控制单元