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    • 60. 发明公开
    • 박막트랜지스터, 및 박막트랜지스터를 가지는 표시장치, 및그들의 제조방법
    • 薄膜晶体管,具有薄膜晶体管的显示装置及其制造方法
    • KR1020090035431A
    • 2009-04-09
    • KR1020080096096
    • 2008-09-30
    • 가부시키가이샤 한도오따이 에네루기 켄큐쇼
    • 야마자키순페이쿠로카와요시유키진보야스히로고바야시사토시카와에다이스케
    • G02F1/136H01L29/786
    • H01L29/66765H01L28/40H01L29/04H01L29/41733H01L29/4908H01L29/78696H01L29/458
    • A thin film transistor, a display device having the same, and a method for manufacturing the same are provided to form a microcrystal semiconductor film having high crystalline from an interface with an insulating layer and use the microcrystal semiconductor film as a channel forming area, thereby having improved electric properties. A gate insulating layer(52a,52b) is formed on a gate electrode(51). The first microcrystal semiconductor film(61) comprises impurity elements as donor. The first microcrystal semiconductor film is formed on a gate insulating layer. The second microcrystal semiconductor film is formed on the first microcrystal semiconductor film. A pair of buffer layers(73) are formed on the second microcrystal semiconductor film. A pair of semiconductor films(58) are formed on a pair of buffer layers. The semiconductor film comprises impurity elements giving conductivity. Wirings(71a~71c) are formed on the pair of semiconductor films. The second microcrystal semiconductor film comprises the impurity elements as a donor. The donor is included with the concentration which is more than a detection limit of SIMS(Secondary Ion Mass Spectrometry).
    • 提供薄膜晶体管,具有该薄膜晶体管的显示装置及其制造方法,以形成具有与绝缘层的界面具有高结晶性的微晶半导体膜,并使用微晶半导体膜作为沟道形成区域,由此 具有改善的电性能。 在栅电极(51)上形成栅极绝缘层(52a,52b)。 第一微晶半导体膜(61)包括作为供体的杂质元素。 第一微晶半导体膜形成在栅绝缘层上。 第二微晶半导体膜形成在第一微晶半导体膜上。 在第二微晶半导体膜上形成一对缓冲层(73)。 一对半导体膜(58)形成在一对缓冲层上。 半导体膜包括导电性的杂质元素。 在一对半导体膜上形成布线(71a〜71c)。 第二微晶半导体膜包括作为供体的杂质元素。 供体的浓度超过SIMS(二次离子质谱)检测限。