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    • 33. 发明授权
    • 반도체웨이퍼의수납용기,수납구조및수납.인출방법
    • 반도체웨이퍼의수납용기,수납구조및수납。인출방법
    • KR100446842B1
    • 2004-12-04
    • KR1019970702784
    • 1996-08-30
    • 아키레스 가부시키가이샤
    • 나카무라아키라후유무로마사히코
    • H01L21/68B65D85/38
    • H01L21/67369H01L21/67396
    • There is provided an automatically controllable or a robot-oriented container exclusively used for containing wafers. There is also provided a wafer containing structure to prevent damage or breakage of semiconductor wafer due to impact and to prevent static electricity generated thereon due to friction. The present semiconductor wafer container comprises a container main body provided with a cylindrical portion in which a plurality of semiconductor wafers and spacer sheets are stacked and contained, and a lid body to be put on the container main body. In the present semiconductor structure of semiconductor wafers in which a plurality of semiconductor wafers are contained in a container main body through spacer sheets.
    • 提供专用于容纳晶片的自动控制或机器人导向的容器。 还提供了一种晶片容纳结构,以防止由于冲击造成的半导体晶片的损坏或破裂并且防止由于摩擦而在其上产生的静电。 本发明的半导体晶片容器包括:容器主体,该容器主体设置有多个半导体晶片和间隔片层叠并容纳在其中的圆柱形部分;以及盖体,用于放置在容器主体上。 在本发明的半导体晶片的半导体结构中,多个半导体晶片通过间隔片被容纳在容器主体中。 <图像>