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    • 21. 发明公开
    • 포토레지스트 현상액 조성물
    • 光电开发商组合
    • KR1020040043620A
    • 2004-05-24
    • KR1020020071987
    • 2002-11-19
    • 주식회사 동진쎄미켐
    • 박찬석김길래박춘호김경아
    • G03F7/32
    • PURPOSE: A photoresist developer composition is provided, to improve miscibility and to suppress or minimize the generation of residue after development, thereby enhancing the precision of photoresist pattern. CONSTITUTION: The photoresist developer composition comprises 1-10 wt% of an inorganic alkali; 0.1-3.0 wt% of an organic solvent; 1.0-20.0 wt% of a surfactant; and 67-97.9 wt% of water. Preferably the inorganic alkali is selected from the group consisting of KOH, NaOH, sodium phosphate, sodium silicate, sodium carbonate, sodium bicarbonate and their mixtures; the organic solvent is selected from the group consisting of methanol, ethanol, 1-propanol, 2-propanol, butanol, diacetone alcohol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, dipropyl glycol monomethyl ether, dipropyl glycol monoethyl ether and their mixtures; and the surfactant is a mixture of a nonionic surfactant and an anionic surfactant.
    • 目的:提供光致抗蚀剂显影剂组合物,以改善混溶性并抑制或最小化显影后残留物的产生,从而提高光致抗蚀剂图案的精度。 构成:光致抗蚀剂显影剂组合物包含1-10重量%的无机碱; 0.1-3.0重量%的有机溶剂; 1.0-20.0重量%的表面活性剂; 和67-97.9重量%的水。 优选地,无机碱选自KOH,NaOH,磷酸钠,硅酸钠,碳酸钠,碳酸氢钠及其混合物; 有机溶剂选自甲醇,乙醇,1-丙醇,2-丙醇,丁醇,双丙酮醇,乙二醇单甲醚,乙二醇单乙醚,乙二醇单丁醚,二甘醇单甲醚,二甘醇单甲醚 醚,二丙二醇单甲醚,二丙二醇单乙醚及其混合物; 并且表面活性剂是非离子表面活性剂和阴离子表面活性剂的混合物。
    • 24. 发明公开
    • 현상 마진 및 기판과의 접착성이 우수한 감광성 수지 조성물
    • 具有改进发展性和粘合特性的感光树脂
    • KR1020040031228A
    • 2004-04-13
    • KR1020020060605
    • 2002-10-04
    • 주식회사 동진쎄미켐
    • 박찬석김길래김승근
    • G02B5/20
    • PURPOSE: A photosensitive resin having a prominent development margin and adhesive characteristic is provided to improve the development margin and the adhesive characteristic by using a crosslinked bond between a monomer having active hydrogen and a silane coupling agent within a binder. CONSTITUTION: A photosensitive resin having a prominent development margin and adhesive characteristic includes a binder of 5 to 30 weight percent, a crosslinkable monomer of 5 to 30 weight percent, paints of 10 to 60 weight percent, a photopolymerization initiator of 0.5 to 5 weight percent, a solvent of 20 to 80 weight percent, and a silane coupling agent of 0.1 to 2 weight percent. The binder melts in alkali aqueous solution. The crosslinkable monomer is formed with two or more ethylene-based double bond. The silane coupling agent has one or more isocyanate base.
    • 目的:提供具有突出的显影边缘和粘合特性的感光性树脂,以通过在粘合剂内使用具有活性氢的单体和硅烷偶联剂之间的交联键来改善显影余量和粘合特性。 构成:具有突出的显影边缘和粘合特性的感光性树脂包括5至30重量%的粘合剂,5至30重量%的可交联单体,10至60重量%的涂料,0.5至5重量%的光聚合引发剂 ,20〜80重量%的溶剂和0.1〜2重量%的硅烷偶联剂。 粘合剂在碱性水溶液中熔化。 可交联单体由两个或更多个乙烯基双键形成。 硅烷偶联剂具有一个或多个异氰酸酯基。
    • 25. 发明公开
    • 미세 도전성 분말 분산용 알칼리 가용성의 네가형 고점도포토레지스트 조성물
    • 具有高粘度性的碱性可溶型负离子型电致发光组合物,用于分散精细导电粉
    • KR1020040011904A
    • 2004-02-11
    • KR1020020045204
    • 2002-07-31
    • 주식회사 동진쎄미켐
    • 박찬석김길래김봉기
    • G03F7/027
    • PURPOSE: A negative type photoresist composition which has excellent dispersion ability of fine conductive powder, coating property, stability during storage, and rapid developing time in aqueous alkali solution due to its high viscosity and adhesiveness without the crystallization of macromolecular resin is provided by introducing monomers having self-plasticity. CONSTITUTION: An alkali-soluble negative type photoresist composition with high viscosity used for dispersing fine conductive powder comprises: (a) 30-70 wt% of acrylate copolymer represented by formula 1 incorporating monomers having self-plasticity; (b) 0.5-5 wt% of a photo-initiator for photopolymerization; (c) 10-30 wt% of photopolymerizable monomer; (d) 0.1-5 wt% of an antifoaming agent; (e) 0.1-2 wt% of a leveling agent; and (f) 0.05-3 wt% of a stabilizer. In formula 1, R1 is carboxylic, aromatic, C1-20 of alkyl group, or copolymer of monomers comprising hydroxy group; R2 is ethylhexyl, isobutyl, tert-butyl, octyl, 3-methoxybutyl or methoxy propylene glycol group; n1 is an integer of 8 to 40; n2 is an integer of 1 or 2. The composition has a viscosity of 10000 to 20000 and a molecular weight of 15000 to 50000.
    • 目的:通过引入单体,提供由于其高粘度和粘合性而导致的高导电性粉末的分散能力,涂布性能,储存稳定性和碱性水溶液中的快速显影时间的负型光致抗蚀剂组合物 具有自我塑造。 构成:用于分散细导电粉末的具有高粘度的碱溶性负型光致抗蚀剂组合物包括:(a)30-70重量%的由式1表示的丙烯酸酯共聚物,其结合具有自塑性的单体; (b)0.5-5重量%的用于光聚合的光引发剂; (c)10-30重量%的可光聚合单体; (d)0.1-5重量%的消泡剂; (e)流平剂0.1-2wt%; 和(f)0.05-3重量%的稳定剂。 式1中,R 1为羧酸,芳香族,烷基的C 1-20,或包含羟基的单体的共聚物。 R2是乙基己基,异丁基,叔丁基,辛基,3-甲氧基丁基或甲氧基丙二醇基团; n1为8〜40的整数, n2为1或2的整数。该组合物的粘度为10000〜20000,分子量为15000〜50000。
    • 26. 发明公开
    • 레지스트 제거용 신너 조성물
    • 用于去除电阻的薄膜组合物
    • KR1020030043190A
    • 2003-06-02
    • KR1020010074243
    • 2001-11-27
    • 주식회사 동진쎄미켐
    • 김길래박춘호김경아
    • G03F7/32
    • G03F7/322C11D3/044G03F7/063G03F7/30G03F7/34G03F7/425
    • PURPOSE: A thinner composition for removing resist is provided, which is used to remove the edge part of resist film coated on a substrate or an unnecessary film component formed on the back face of a substrate in manufacturing process of a TFT-LCD device or a semiconductor device. CONSTITUTION: The thinner composition comprises 0.1-10 wt% of an inorganic and/or organic alkali; 0.1-30 wt% of an organic solvent; 0.01-10 wt% of a nonionic surfactant; 50-99 wt% of water; and optionally 0.01-5 wt% of an anionic surfactant and/or 0.01-1.0 wt% of an antifoaming agent. Preferably the organic solvent is an organic amine-based solvent, an alcohol ether-based organic solvent, a nitrogen-containing organic solvent or a sulfur-containing organic solvent; the nonionic surfactant is selected from the group consisting of polyoxy ethyl ether, polyoxy propyl ether, polyoxy ethyl propyl ether, polyoxy ethyl alkyl phenyl ether, polyoxy propyl alkyl phenyl ether, polyoxy ethyl oxypropyl alkyl phenyl ether and their mixtures; and the anionic surfactant is selected from the group consisting of alkyl ether sulfate, alkyl sulfate, alkyl benzenesulfonic acid, alkyl benzenesulfonate, alkyl naphthalene sulfonate and their mixtures.
    • 目的:提供用于去除抗蚀剂的较薄组合物,其用于在TFT-LCD装置的制造过程中除去涂覆在基板上的抗蚀剂膜的边缘部分或形成在基板背面上的不需要的膜部件 半导体器件。 构成:较薄的组成包含0.1-10重量%的无机和/或有机碱; 0.1-30重量%的有机溶剂; 0.01-10重量%的非离子表面活性剂; 50-99重量%的水; 和0.01-5重量%的阴离子表面活性剂和/或0.01-1.0重量%的消泡剂。 优选有机溶剂是有机胺类溶剂,醇醚类有机溶剂,含氮有机溶剂或含硫有机溶剂; 非离子表面活性剂选自聚氧乙基醚,聚氧丙基醚,聚氧乙基丙基醚,聚氧乙基烷基苯基醚,聚氧丙基烷基苯基醚,聚氧乙基氧丙基烷基苯基醚及其混合物; 阴离子表面活性剂选自烷基醚硫酸盐,烷基硫酸盐,烷基苯磺酸,烷基苯磺酸盐,烷基萘磺酸盐及其混合物。