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    • 22. 发明公开
    • InGaNAs 화합물 반도체 박막 및 그 형성 방법
    • 金属化合物半导体薄膜及其生长方法
    • KR1020030037410A
    • 2003-05-14
    • KR1020010068427
    • 2001-11-05
    • 주식회사 비첼
    • 강상규
    • H01L21/20
    • C30B25/02C30B29/403H01L21/02395H01L21/0254H01L21/02546H01L21/0262
    • PURPOSE: An InGaNAs compound semiconductor thin film and a method for growth thereof are provided to prevent the desorption of nitrogen atoms by effectively adding the nitrogen atoms supplied from a metal organic compound containing Ga-N to the InGaNAs thin film. CONSTITUTION: An InGaNAs thin film(8) is deposited on a lower DBR(Distributed Bragg Reflector)(7) of a compound semiconductor device by using a plurality of precursors. At this time, at least one of the precursors is a metal organic compound containing molecule-type Ga-N. At this time, nitrogen atoms supplied through the metal organic compound having the molecule-type Ga-N are distributed in the InGaNAs thin film(8) with the predetermined concentration, wherein the molecule-type Ga-N has a strong cohesion, thereby protecting the desorption of the nitrogen atoms.
    • 目的:提供InGaNAs化合物半导体薄膜及其生长方法,通过有效地将含有Ga-N的金属有机化合物的氮原子有效地添加到InGaNAs薄膜来防止氮原子的解吸。 构成:通过使用多种前体将InGaNA薄膜(8)沉积在化合物半导体器件的下DBR(分布式布拉格反射器)(7))上。 此时,至少一种前体是含有分子型Ga-N的金属有机化合物。 此时,通过具有分子型Ga-N的金属有机化合物供给的氮原子以规定浓度分布在InGaNAs薄膜(8)中,其中分子型Ga-N具有强的内聚力,从而保护 氮原子的解吸。