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    • 11. 发明公开
    • 광학 모듈 조립체 및 이를 구비한 촬상 장치
    • 光学模块组装和包含其的摄影装置
    • KR1020090060676A
    • 2009-06-15
    • KR1020070127587
    • 2007-12-10
    • 삼성전자주식회사
    • 정재우최승욱
    • H04N5/225G03B17/00H01L27/146
    • H04N5/2254
    • An optical module assembly and a pickup device having the assembly are provided to fix a sensor to an external barrel by using an elastic fixation member, thereby shortening mounting processes and a mounting cost of the sensor. A lens barrel(110) moves in optical axial direction, and is equipped with a lens. An external barrel(120) guides movement of the lens barrel, and is equipped with a sensor mounting unit. A sensor(130) is installed in the sensor mounting unit, and detects the movement of the lens barrel. A supporting unit(140) is disposed on one side of the external barrel, and supports the external barrel. An elastic fixation member(150) is installed in the supporting unit, and fixes the sensor to the external barrel by elastic power.
    • 提供具有组件的光学模块组件和拾取装置,以通过使用弹性固定构件将传感器固定到外筒上,从而缩短安装过程和传感器的安装成本。 透镜镜筒(110)沿光轴方向移动,并配有透镜。 外筒(120)引导镜筒的运动,并配有传感器安装单元。 传感器(130)安装在传感器安装单元中,并检测镜筒的运动。 支撑单元(140)设置在外筒的一侧,并支撑外筒。 弹性固定构件(150)安装在支撑单元中,并通过弹性力将传感器固定到外筒上。
    • 12. 发明公开
    • 잉크젯 프린팅 장치 및 그 구동방법
    • 喷墨打印装置及其驱动方法
    • KR1020090037119A
    • 2009-04-15
    • KR1020070102582
    • 2007-10-11
    • 삼성전자주식회사
    • 정재우홍영기강성규
    • B41J2/06B41J2/01
    • B41J2/06B41J2/14B41J2/14233B41J2202/09
    • An inkjet printing apparatus and a driving method are provided that the ultra-fine droplet is realized and the droplet speed is maintained with the revolution per minute level higher. An inkjet printing apparatus comprises a manifold(153) which supplies the ink, a pressure chamber(155) which is filled with the ink supplied from manifold, a flow channel plate which includes a nozzle(158) discharging the ink, a piezo actuator(140) which includes the bottom electrode(141) which successively is laminated, and the piezoelectric-foil(142) and upper electrode(143), a first electrostatic electrode(161) which are arranged in the flow channel plate, and which forms the electrostatic field, and a second electrostatic electrode which forms the electrostatic field between the first power electrostatic electrode, and in which the recording medium is loaded.
    • 提供了一种喷墨打印设备和驱动方法,其实现了超微细液滴,并且以每分钟高的转数维持液滴速度。 一种喷墨打印装置,包括:供给墨的歧管(153),填充有从歧管供应的墨的压力室(155),流路板,其包括排出墨的喷嘴(158),压电致动器 140),其包括依次层叠的底部电极(141)和压电箔(142)和上部电极(143),布置在流动通道板中的第一静电电极(161) 静电场和在第一功率静电电极之间形成静电场的第二静电电极,并且其中记录介质被加载。
    • 13. 发明公开
    • 리스트릭터를 통한 역류를 억제하는 멤브레인을 구비한잉크젯 헤드
    • 用于通过限制器防止回流的喷嘴头
    • KR1020080049485A
    • 2008-06-04
    • KR1020060120106
    • 2006-11-30
    • 삼성전자주식회사
    • 위상권오세영정재우송미정
    • B41J2/045B41J2/17
    • B41J2/045B41J2/14032B41J2/14145
    • An ink-jet head having a membrane is provided to prevent crosstalk between adjacent nozzles by preventing backflow of ink through a restrictor. An ink-jet head having a membrane for preventing backflow through a restrictor(163) includes a piezoelectric actuator(140). The piezoelectric actuator receives a driving signal for discharging ink and deforms a vibration plate(180). The vibration plate is formed under the piezoelectric actuator and is deformed by volume reduction of a pressure chamber(164). The pressure chamber contains ink and discharges the ink through a damper(165) and nozzles(166) due to pressure increase. A sub chamber is connected with the pressure chamber, is influenced by pressure change from the pressure chamber, and deforms a membrane(172) upward with the increased pressure in order to reduce the sectional area of the restrictor for preventing backflow of the ink and crosstalk between the nozzles.
    • 具有膜的喷墨头被设置成通过防止墨通过限制器的回流来防止相邻喷嘴之间的串扰。 具有用于防止通过限流器(163)的回流的膜的喷墨头包括压电致动器(140)。 压电致动器接收用于排出油墨的驱动信号并使振动板(180)变形。 振动板形成在压电致动器下方并且通过压力室(164)的体积减小而变形。 压力室包含墨水,并且由于压力增加而通过阻尼器(165)和喷嘴(166)排出墨水。 子室与压力室连接,受到来自压力室的压力变化的影响,并且随着压力增加使膜(172)向上变形,以便减小限制器的截面积,以防止油墨的回流和串扰 在喷嘴之间。
    • 14. 发明公开
    • 반도체 소자 제조공정에 채용하기 적합한 인터록 시스템 및그에 따른 인터록 관리방법
    • 用于半导体器件制造和互连管理方法的互锁系统
    • KR1020080007709A
    • 2008-01-23
    • KR1020060066677
    • 2006-07-18
    • 삼성전자주식회사
    • 정재우조성호안정수
    • H01L21/00
    • H01L21/67242H01L21/67248
    • An interlock system for use in a semiconductor device manufacturing process and an interlock managing method therefor are provided to stabilize the semiconductor device manufacturing process by identifying a cause of an interlock and performing a proper management. An equipment server(20) corresponding to semiconductor device manufacturing equipment is installed. A host system(100) is connected to one or more equipment servers to perform various communication processes related to controls with the equipment servers. A reference information database(110) is connected to the host system to store interlock control information as reference information when the semiconductor device manufacturing equipment is in an abnormal state. A call system(150) is connected to the host system to perform a calling operation using an electronic communication medium.
    • 提供一种用于半导体器件制造工艺的互锁系统及其互锁管理方法,用于通过识别互锁的原因并进行适当的管理来稳定半导体器件制造过程。 安装对应于半导体器件制造设备的设备服务器(20)。 主机系统(100)连接到一个或多个设备服务器,以执行与设备服务器的控制相关的各种通信过程。 当半导体器件制造设备处于异常状态时,参考信息数据库(110)连接到主机系统以存储互锁控制信息作为参考信息。 呼叫系统(150)连接到主机系统以使用电子通信介质执行呼叫操作。
    • 15. 发明公开
    • 잉크젯 헤드의 노즐 플레이트 표면에 발잉크성 코팅막을형성하는 방법
    • 喷嘴喷嘴表面形成油墨涂膜的方法
    • KR1020080004224A
    • 2008-01-09
    • KR1020060062980
    • 2006-07-05
    • 삼성전자주식회사
    • 차태운정재우위상권
    • B41J2/16B41J2/165B41J2/135
    • A method of forming an ink-repellent coating film on a surface of a nozzle plate of an inkjet head is provided to efficiently prevent ink wetting on the surface of the nozzle plate at a nozzle outlet by forming an ink-repellent coating film uniformly at an inner wall of the nozzle outlet. A method of forming an ink-repellent coating film on the surface of a nozzle plate(110) of an inkjet head includes the steps of: rotating the nozzle plate mounted on upper parts of sources(150a,150b) about a center shaft; evaporating an ink-repellent material of the sources mounted on the lower part of the nozzle plate; depositing the evaporated ink-repellent material on the surface of the nozzle plate; and regularly depositing the ink-repellent material on the outer surface of the nozzle plate as well as on the inner wall of the nozzle outlet, wherein the depth of the ink-repellent coating film formed on the inner wall of the nozzle outlet is adjustable by changing the position of the sources.
    • 提供了一种在喷墨头的喷嘴板的表面上形成防墨涂层的方法,以在喷嘴出口处有效地防止油墨在喷嘴板的表面上润湿, 喷嘴出口的内壁。 在喷墨头的喷嘴板(110)的表面上形成防油涂膜的方法包括以下步骤:使围绕中心轴安装在源(150a,150b)上部的喷嘴板; 蒸发安装在喷嘴板下部的源的拒墨材料; 将蒸发的油墨排斥材料沉积在喷嘴板的表面上; 并且将喷墨板的外表面以及喷嘴出口的内壁上规则地排斥防墨材料,其中形成在喷嘴出口的内壁上的防墨涂层的深度可通过 改变来源的位置。
    • 16. 发明授权
    • 잉크젯 헤드의 댐퍼와 그 형성 방법
    • 喷嘴头的阻尼器及其形成方法
    • KR100773566B1
    • 2007-11-05
    • KR1020060135015
    • 2006-12-27
    • 삼성전자주식회사
    • 이재창정재우위상권
    • B41J2/015B41J2/01B41J2/045
    • A damper of an ink-jet head and a method for forming the same are provided to simplify the process by forming a first damper, a manifold, and a restrictor by using one dry etching process. A damper of an ink-jet head connecting a plurality of pressure chambers and a plurality of nozzles includes a first damper(126a), a second damper(126b), and a third damper(126c). The upper end of the first damper is connected to the plurality of pressure chambers. The second damper is connected to the lower end of the first damper. The upper end of the third damper is connected to the second damper and the lower end thereof is connected to the plurality of nozzles. The cross-section of the second damper becomes wider as it goes from the lower end of the first damper toward the third damper. The cross-section of the third damper becomes narrower as it goes from the upper end thereof toward the lower end thereof.
    • 提供喷墨头的阻尼器及其形成方法,以通过使用一次干法蚀刻工艺形成第一阻尼器,歧管和限流器来简化工艺。 连接多个压力室和多个喷嘴的喷墨头的阻尼器包括第一阻尼器(126a),第二阻尼器(126b)和第三阻尼器(126c)。 第一阻尼器的上端连接到多个压力室。 第二阻尼器连接到第一阻尼器的下端。 第三阻尼器的上端连接到第二阻尼器,并且其下端连接到多个喷嘴。 第二阻尼器的横截面随着从第一阻尼器的下端朝向第三阻尼器而变宽。 第三阻尼器的横截面从其上端向下端变窄,
    • 17. 发明公开
    • 셔터방의 파우더 발생 방지기능을 갖는 반도체 소자제조장치
    • 半导体器件制造设备具有减少快门室中粉末形成的功能
    • KR1020070032451A
    • 2007-03-22
    • KR1020050086690
    • 2005-09-16
    • 삼성전자주식회사
    • 조성호김형동안정수정재우
    • H01L21/02
    • An apparatus for manufacturing a semiconductor device having a powder formation preventing function in a shutter room is provided to reduce wafer contamination by using a powder blowing prevention unit. A purge gas input unit(50) is installed from the outside to an inner end of a shutter room(20) to increase pressure of the shutter room with respect to a portion of residual gas of a process chamber(10) that is flowing to a loadlock chamber(30). A powder blowing prevention unit(60) is made of a laminated filter in the shutter room and prevents a blowing of a powder upon generation of a vortex flow of a purge gas outputted from the purge gas input unit. An adhesion preventing coating layer having a uniform thickness is formed along an inner wall of the shutter room.
    • 提供一种用于制造在快门室中具有粉末形成防止功能的半导体器件的设备,以通过使用防粉尘单元来减少晶片污染。 吹扫气体输入单元(50)从外部安装到快门室(20)的内端,以增加快门室相对于流动到处理室(10)的残余气体的一部分的压力 负载锁定室(30)。 吹风防止单元(60)由快门室中的层叠过滤器制成,并且在从净化气体输入单元输出的吹扫气体的涡流产生时防止粉末吹出。 沿着快门室的内壁形成具有均匀厚度的防粘附层。
    • 19. 发明公开
    • 공정 시간 비교에 의한 반도체 공정 오류 제어 방법
    • 通过工艺时间对比控制半导体工艺误差的方法
    • KR1020060125997A
    • 2006-12-07
    • KR1020050047533
    • 2005-06-03
    • 삼성전자주식회사
    • 정재우
    • H01L21/02
    • A method for controlling a semiconductor process error through a process time comparison is provided to prevent a process proceeding without interlocking of manufacture equipment when a process error is occurred by using an error value and an error table. After completing a specific unit process among unit processes, an actual process time used for the specific unit process is checked(S110). The actual process time and a processing time of the specific unit process defined in a recipe are compared to determine whether an error value is included in an error range defined in an error table(S120). If the error value is included in the error range, a subsequence unit process is proceeded, and if the error value exceeds the error range, an interlock and an alarm are generated(S140).
    • 提供了一种通过处理时间比较来控制半导体处理误差的方法,以防止在通过使用错误值和错误表发生处理错误时不进行制造设备互锁的过程。 在单元处理完成特定单元处理之后,检查用于特定单元处理的实际处理时间(S110)。 比较配方中定义的特定单位处理的实际处理时间和处理时间,以确定错误值是否包括在错误表中定义的错误范围内(S120)。 如果误差值包含在误差范围内,则进行子序列处理,如果误差值超过误差范围,则产生互锁和报警(S140)。
    • 20. 发明授权
    • 프린터 헤드의 결함 여부 검출장치 및 방법
    • 用于检测打印头的缺陷的装置和方法
    • KR100647301B1
    • 2006-11-23
    • KR1020040106519
    • 2004-12-15
    • 삼성전자주식회사
    • 이화선정재우임승모
    • B41J2/045B41J2/125
    • B41J2/16579B41J2/0451B41J2/04581B41J2002/14354
    • 프린터 헤드의 결함 여부 검출장치 및 방법이 개시된다. 이 장치는 잉크 쳄버의 잉크 토출의 구동력을 제공하는 제1 내지 제N(여기서, N은 1보다 큰 양의 정수이다) 엑츄에이터, 제1 내지 제N 엑츄에이터를 진동시키는 진동 발생신호를 생성하는 진동 발생신호 생성부, 생성된 진동 발생신호를 수신하여 제1 내지 제N 엑츄에이터 중 제K(여기서, K는 1 내지 N 중 어느 하나의 정수이다) 엑츄에이터로 진동 발생신호를 출력하는 제1 스위칭부, 제K 엑츄에이터의 진동에 의해 함께 진동하는 제1 내지 제N 엑츄에이터 중 하나 이상의 진동신호들을 수신하고, 수신된 진동신호들 중 제K 엑츄에이터에 인접하는 제L(여기서, L은 1 내지 N 중 어느 하나의 정수이다) 엑츄에이터의 진동신호에 해당하는 제L 진동신호를 출력하는 제2 스위칭부 및 제2 스위칭부로부터 출력된 제L 진동신호와 프린터 헤드의 결함이 없을 때의 제L 엑츄에이터의 고유 진동신호를 비교하여, 프린터 헤드의 결함 여부를 검출하는 결함 여부 검출부를 구비하는 것을 특징으로 한다. 따라서, 본 발명에 따르면, 프린터 헤드의 균열 또는 접착 불량에 따른 결함을 간단한 구성 요소에 의해 검출할 수 있도록 한다.