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    • 94. 发明公开
    • 금속의 환원 방법, 다층 배선 및 그 제조 방법 또는 반도체장치 및 그 제조 방법
    • 降低金属,多层互连结构及其制造方法的方法及其半导体器件及其制造方法
    • KR1020070096752A
    • 2007-10-02
    • KR1020060079823
    • 2006-08-23
    • 후지쯔 가부시끼가이샤
    • 나카타요시히로
    • H01L21/28C22B5/10C22B5/12C22B5/02
    • H01L21/76834H01L21/02063H01L21/76807H01L21/76814H01L21/76829H01L21/76835
    • A method for reducing a metal, a multilayer interconnection structure and a manufacturing method of the same, and a semiconductor device and a manufacturing method for the same are provided to enhance reliability by reducing an interconnection resistance and a parasitic resistance between interconnections. A method for reducing a metal includes a process for hydrolyzing vapor including at least a carboxylic acid ester compound by using water vapor in order to reduce an oxidized metal. The carboxylic acid ester compound is a compound expressed by one of the following chemical expressions 1 and 2, HCOOR1 chemical expression 1, and CnHmCOOR2 chemical expression 2 where each of R1 and R2 represents a hydrocarbon of 1 to 3 carbon atoms, n represents an integer of 1 to 3, and m represents an integer of 3 to 7. The method is executed under a heating condition of 50 to 400 degrees centigrade.
    • 提供一种减少金属的方法,多层互连结构及其制造方法,以及半导体器件及其制造方法,通过减小互连之间的互连电阻和寄生电阻来提高可靠性。 一种还原金属的方法包括通过使用水蒸气水解包含至少一种羧酸酯化合物的蒸气以减少氧化金属的方法。 羧酸酯化合物是由以下化学表达式1和2之一表示的化合物,HCOOR1化学式1和CnHmCOOR2化学式2,其中R1和R2各自表示1〜3个碳原子,n表示整数 为1〜3,m为3〜7的整数。该方法在50〜400摄氏度的加热条件下进行。
    • 96. 发明公开
    • 니켈 금속 및 이의 제조방법
    • 镍金属及其制造方法
    • KR1020060038909A
    • 2006-05-04
    • KR1020057014056
    • 2004-07-29
    • 발레 인코 재팬 가부시키가이샤
    • 아베마사루츠지세이치로
    • C22B23/02C22B5/12
    • C22B23/021C22B5/12
    • There are provided a production process of nickel metal, which can enhance nickel oxide reduction efficiency and can realize reduced energy and cost, and high-purity nickel metal. The process comprises the step of performing a contact reaction between nickel oxide and a reducing gas to produce nickel metal from the nickel oxide, the contact reaction being carried out in the copresence of a stoichiometrically relatively very small amount of a sodium-containing compound. The content of sodium in the nickel metal produced by the process is controlled to not more than 0.13% by weight in terms of the amount of a sodium atom based on the amount of the nickel metal.
    • 提供了镍金属的生产工艺,其可以提高氧化镍还原效率,并且可以实现降低的能量和成本,以及高纯度的镍金属。 该方法包括在氧化镍和还原性气体之间进行接触反应以从镍氧化物制备镍金属的步骤,接触反应以化学计量相对非常少量的含钠化合物共存进行。 通过该方法制造的镍金属中的钠含量以镍原料的量计,以钠原子计的量控制在不大于0.13重量%。