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91. 发明公开

KR1020070077813A 표면수식된 탄소나노튜브 조성물 有权
标题翻译：形成表面改性碳纳米管的图案单层的方法
公开(公告)号：KR1020070077813A
公开(公告)日：2007-07-27
申请号：KR1020070071001
申请日：2007-07-16
申请人： 삼성전자주식회사
发明人： 박종진 , 이재준 , 정명섭
IPC分类号： G03F7/00 , G03F1/00 , B82B3/00
CPC分类号： G03F7/027 , B82Y30/00 , C01B32/174 , C09D7/70 , G03F7/008 , G03F7/012 , G03F7/038 , G03F7/039
摘要： A method for forming a pattern of surface-modified carbon nanotubes on a substrate comprising various materials by introducing a functional group having a double bond into the surface of the carbon nanotube and photocuring the surface-modified carbon nanotubes. The method includes the steps of: offering carbon nanotubes having a double bond-containing functional group introduced to the surface; dissolving the carbon nanotubes with an photo-initiator in an organic solvent so as to prepare a coating solution; applying the coating solution on the surface of a substrate, followed by vaporizing the solvent through prebaking to form a film; exposing the dried film to UV lights through a photomask having a desired patterned formed to induce photopolymerization reaction of carbon nanotubes; and developing the exposed film using an organic developing solution and removing non-exposed part of the film to obtain a negative pattern of the carbon nanotubes. The nanotubes are surface modified by the double bond-containing compound of the formula(1) or (2), in which R=H or CH3; X=Cl, NH2 or OH; R1=H or CH3; R2=C1~C6 alkyl; and X=Cl, NH2 or OH. The coating composition contains the surface-modified carbon nanotubes having a double bond-containing functional group, a photo initiator, and organic solvent.
摘要翻译：通过在碳纳米管的表面引入具有双键的官能团并对表面改性的碳纳米管进行光固化，在包含各种材料的基板上形成表面改性碳纳米管的图案的方法。该方法包括以下步骤：提供具有引入表面的含双键官能团的碳纳米管; 用光引发剂将碳纳米管溶解在有机溶剂中以制备涂布溶液; 将涂布溶液涂布在基材的表面上，然后通过预烘焙使溶剂汽化以形成膜; 通过具有所需图案形成的光掩模将干燥膜暴露于UV光以引发碳纳米管的光聚合反应; 并使用有机显影液显影曝光的薄膜，除去未暴露的薄膜部分，得到碳纳米管的负图案。纳米管由式（1）或（2）的含双键化合物进行表面改性，其中R = H或CH 3; X = Cl，NH 2或OH; R1 = H或CH3; R2 = C1〜C6烷基; 和X = Cl，NH 2或OH。涂料组合物含有具有双键官能团的表面改性碳纳米管，光引发剂和有机溶剂。

92. 发明公开

KR1020040043638A 표면수식된 탄소나노튜브를 이용한 패턴 형성방법 有权
标题翻译：使用表面改性碳纳米管的图案形成方法
公开(公告)号：KR1020040043638A
公开(公告)日：2004-05-24
申请号：KR1020020072017
申请日：2002-11-19
申请人： 삼성전자주식회사
发明人： 박종진 , 이재준 , 정명섭
IPC分类号： G03F7/00 , G03F1/00 , B82B3/00
CPC分类号： H05K3/02 , B82Y10/00 , B82Y30/00 , G03F7/027 , H01L51/0048 , H01L51/0052 , H05K2201/026 , H05K2201/0323 , H05K2203/0514 , Y10S977/89
摘要： PURPOSE: A method for forming a pattern by using a surface modified carbon nanotube is provided, to allow a carbon nanotube pattern to be formed easily on various materials by photography. CONSTITUTION: The method comprises the steps of introducing a double bond-containing functional group into the surface of a carbon nanotube; dissolving the carbon nanotube together with a photoinitiator in an organic solvent to prepare a coating solution; coating the coating solution on the surface of a substrate, and prebaking it to volatilize the solvent to form a film; exposing the dried film through a photomask where a desired pattern is formed to induce the photopolymerization of carbon nanotube in an exposure part; and developing the exposed film with an organic developer to remove the unexposed part of the film, thereby obtaining a negative pattern of carbon nanotube. Preferably the double bond-containing functional group is provided by the compound having the structure represented by the formula 1 or 2, wherein R or R1 is H or CH3; R2 is an alkyl group of C1-C6; and X is Cl, NH2 or OH.
摘要翻译：目的：提供通过使用表面改性碳纳米管形成图案的方法，以通过摄影容易地在各种材料上形成碳纳米管图案。方案：该方法包括将含双键官能团引入碳纳米管表面的步骤; 将碳纳米管与光引发剂一起溶解在有机溶剂中以制备涂布溶液; 将涂布溶液涂布在基材表面上，并预烘烤以挥发溶剂以形成膜; 将干燥的膜通过光掩模曝光，其中形成所需图案以引起曝光部分中碳纳米管的光聚合; 并用有机显影剂显影曝光的薄膜以除去未曝光的薄膜部分，从而获得碳纳米管的负图案。优选地，含双键的官能团由具有由式1或2表示的结构的化合物提供，其中R或R 1是H或CH 3; R2是C1-C6的烷基; X是Cl，NH 2或OH。

93. 发明公开

KR1020040036526A 화학적 자기조립 방법을 이용한 탄소나노튜브 적층 및패턴 형성 방법 有权
标题翻译：使用化学自组装的碳纳米管的分层方法和方法
公开(公告)号：KR1020040036526A
公开(公告)日：2004-04-30
申请号：KR1020030040461
申请日：2003-06-21
申请人： 삼성전자주식회사
发明人： 정명섭 , 박종진 , 정성욱 , 서승주 , 구본원
IPC分类号： G03F1/00 , G03F1/68 , B82B3/00 , B82B1/00
CPC分类号： B82Y30/00 , B82Y10/00 , G03F7/0392 , G03F7/165 , G03F7/168 , G03F7/40 , Y10S977/842
摘要： PURPOSE: A layering and patterning method for carbon nanotubes is provided to easily form a membrane of carbon nano tube monolayer or multilayer on various substrates such as glass, silicon wafer and plastic, by using a conventional photolithography process. CONSTITUTION: The patterning method for carbon nanotubes comprises the steps of: (a) carrying out surface treatment of a substrate to have an exposed amino group on its surface; (b) treating the substrate with aminoalkyl carboxylic acid having a structure of R-NH-(CH2)n-COOH(wherein, R is an acid-dissociative functional group, and n is natural number of 1-50) as a linker in the presence of a coupling agent, to form an amide bond between the amino group of the substrate and the carboxyl group of the aminoalkylcarboxylic acid; (c) coating a photo acid generator on the substrate, irradiating UV light through a patterned photomask to the substrate, developing it with an alkali developing solution to form positive patterns where a reactive amino group is exposed to the substrate surface; and (d) reacting the substrate with the carboxylated carbon nano tube in the presence of a coupling agent to form a carbon nano tube layer.
摘要翻译：目的：提供用于碳纳米管的分层和图案化方法，以便通过使用常规的光刻工艺容易地在诸如玻璃，硅晶片和塑料的各种基底上形成碳纳米管单层或多层膜。构成：碳纳米管的图案化方法包括以下步骤：（a）对其表面进行表面处理以使其具有暴露的氨基; （b）用具有R-NH-（CH2）n-COOH结构的氨基烷基羧酸（其中R为酸解离官能团，n为1-50的天然数）作为接头处理底物偶联剂的存在，在基材的氨基与氨基烷基羧酸的羧基之间形成酰胺键; （c）在基板上涂布光酸产生剂，将UV光通过图案化的光掩模照射到基底上，用碱性显影液显影，形成阳性图案，其中反应性氨基暴露于基底表面; 和（d）在偶联剂存在下使底物与羧化碳纳米管反应，形成碳纳米管层。

94. 发明授权

KR100055221B1 듀얼포드 메모리소자의 모우드 선택회로 失效
公开(公告)号：KR100055221B1
公开(公告)日：1992-10-07
申请号：KR1019900011616
申请日：1990-07-30
申请人： 삼성전자주식회사
发明人： 정명섭
IPC分类号： G06F12/00

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