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    • 1. 发明公开
    • VALVE UNIT
    • 阀门单元
    • KR20070093711A
    • 2007-09-19
    • KR20060023934
    • 2006-03-15
    • SAMSUNG ELECTRONICS CO LTD
    • LEE JEONG GUNPARK JONG MYEONCHO YOON KYOUNG
    • C12Q1/68C12Q1/00
    • B01L3/502738F16K99/0001F16K99/0005
    • A micro-valve unit not using paraffin wax is provided to control the channel opening time more precisely compared to a conventional micro-valve unit and secure improved endurable pressure. A valve unit(100) comprises a channel(102) formed on a basic material(101) to form a flow path of fluid(F), a block(110) blocking the flow path and including a ferromagnetic material such as Fe, Ni, Co and an oxide thereof, an adhesive layer(115) formed by applying an UV curable adhesive, mainly made of an acrylic resin, between the outside of the block and the inside of the channel so as to adhere the block to the channel, an outside magnet(120) equipped at the outside of the channel to draw the block using magnetic force, and an UV light source(125) equipped at the outside of the channel to apply the UV to the adhesive layer. The valve unit is characterized in that the adhesive force of the adhesive layer irradiated by the UV is weakened and the block is dragged by the magnetic force of the outside magnet, thereby the flow path being opened. On the outside of the block, an adhesive force promoting layer(112) is formed to increase the adhesive force to the adhesive layer.
    • 提供不使用石蜡的微型阀单元,以便与传统的微型阀单元相比更精确地控制通道打开时间并确保改善的耐久压力。 阀单元(100)包括形成在基础材料(101)上以形成流体(F)的流动通道的通道(102),块(110)阻挡流动路径并且包括铁磁材料,例如Fe,Ni Co及其氧化物,通过在块体的外部和通道的内部之间施加主要由丙烯酸树脂制成的UV可固化粘合剂形成的粘合剂层(115),以将块粘附到通道上, 设置在通道外侧的外部磁体(120),用于使用磁力来绘制块;以及UV光源(125),其设置在通道的外部以将UV施加到粘合剂层。 阀单元的特征在于,由UV照射的粘合剂层的粘合力减弱,并且块被外部磁体的磁力拖动,从而流动路径被打开。 在该块体的外侧,形成粘合力促进层(112),以增加粘附层的粘附力。
    • 3. 发明公开
    • 전기작동식 일체형 마이크로밸브
    • 集成电动操作微型阀
    • KR1020000048700A
    • 2000-07-25
    • KR1019997002655
    • 1997-09-25
    • 에스엠씨 가부시키 가이샤
    • 해리스,제임스엠.코자드,브래드포드에이.홉킨스,딘얼라인쥬니어.피치,존에스.
    • F15C5/00
    • F16K99/0001F15C5/00F16K99/0005F16K99/0007F16K99/0034F16K99/0044F16K99/0061F16K2099/0069F16K2099/0074F16K2099/0078F16K2099/008F16K2099/0082F16K2099/0086
    • PURPOSE: A closed valves for industrial and ultra clean applications. Semiconductor processing applications are examples of ultra clean applications CONSTITUTION: A genus of integrated valves having an integrated actuator with a thin, flexible membrane formed of silicon driven by pressure of a fluid trapped in a cavity formed by bonding a first and second die. The cavity has a resistor formed therein through which current is driven to cause the pressure to rise and the flexible membrane to flex. Movement of membrane is used to drive a valve element to a position where it unblocks a port to open the valve. This genus includes species such as ultra clean embodiments where a containment barrier keeps ultra clean processing gases confined to a wetted area having materials and bonding agents selected so as to be chemically compatible with the materials and conditions in the wetted area. Low leak species include a compliant material for a valve seat which is deformed by a ridge surrounding a port in the closed position. It is this port which is blocked and unblocked by movement of the valve element to close and open the valve.
    • 目的:用于工业和超清洁应用的封闭阀门。 半导体处理应用是超清洁应用的示例构成:具有集成致动器的集成致动器的集成致动器,其具有由通过粘合第一和第二管芯形成的空腔中的流体压力驱动的由硅形成的薄的柔性膜。 空腔具有形成在其中的电阻器,通过该电阻驱动电流以使压力升高并且柔性膜弯曲。 膜的移动用于将阀元件驱动到其阻止端口以打开阀的位置。 该属包括诸如超洁净实施例的物质,其中容纳屏障将超清洁处理气体限制在限定于湿润区域的物质和粘合剂中,所述材料和粘合剂选择为与化学兼容的润湿区域中的材料和条件。 低泄漏物质包括用于阀座的柔性材料,其通过围绕封闭位置的端口的脊变形。 这个端口被阀元件的移动阻塞和解锁,以关闭和打开阀门。
    • 4. 发明公开
    • 정전기적으로 작동되는 양방향 고속 동작의 마이크로밸브
    • 双向快速动作静电致动微波
    • KR1020080063268A
    • 2008-07-03
    • KR1020087004715
    • 2006-07-26
    • 더 보오드 오브 트러스티스 오브 더 유니버시티 오브 일리노이즈
    • 산논마크에마셀리차트아이배병훈
    • F16K31/02
    • F16K31/025F16K99/0001F16K99/0005F16K99/0015F16K99/0034F16K99/0051F16K2099/0074F16K2099/008F16K2099/0084
    • A bi-directional electrostatic microvalve includes a membrane electrode (12) that is controlled by application of voltage to fixed electrodes (10, 14) disposed on either side of the membrane electrode. Dielectric insulating layers (lOiii, 10iv, 16, 18, 12vi, 12vii, 14iii, 14iv) separate the electrodes. One of the fixed electrodes defines a microcavity (24). Microfluidic channels formed into the electrodes provide fluid to the microcavity. A central pad (28) defined in the microcavity places a portion of the second electrode close to the membrane electrode to provide a quick actuation while the microcavity reduces film squeezing pressure of the membrane electrode. In preferred embodiment microvalves, low surface energy and low surface charge trapping coatings, such as fluorocarbon films made from cross-linked carbon di-fluoride monomers or surface monolayers made from fluorocarbon terminated silanol compounds coatings coat the electrode low bulk charge trapping dielectric layers limit charge trapping and other problems and increase device lifetime operation.
    • 双向静电微型阀包括通过向设置在膜电极的任一侧的固定电极(10,14)施加电压来控制的膜电极(12)。 绝缘绝缘层(10iii,10iv,16,18,12vi,12vii,14iii,14iv)分离电极。 固定电极之一限定微腔(24)。 形成在电极中的微流体通道为微腔提供流体。 限定在微腔中的中心衬垫(28)将第二电极的一部分靠近膜电极放置,以提供快速致动,同时微腔降低膜电极的膜挤压压力。 在优选的实施方案中,微型阀,低表面能和低表面电荷捕获涂层,例如由交联的碳二氟化物单体制成的碳氟化合物薄膜或由氟碳封端的硅烷醇化合物涂层制成的表面单层涂覆电极,低体积电荷捕获电介质层限制电荷 捕捉等问题,增加设备的使用寿命。