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    • 7. 发明公开
    • 마이크로일렉트로메카니컬 구조의 광스위치 및 그 제조방법
    • 用于控制反射器的精确切换操作的微电子机械系统的光学开关及其制造方法
    • KR1020040101642A
    • 2004-12-03
    • KR1020030033325
    • 2003-05-26
    • 재단법인서울대학교산학협력재단
    • 이호영
    • G02B26/08
    • PURPOSE: An optical switch of a micro-electro-mechanical system for controlling accurately a switching operation of a reflector and a fabricating method thereof are provided to enhance an actuating characteristic by using a magnetic actuation method instead of an electrostatic actuation method. CONSTITUTION: An optical switch of a micro-electro-mechanical system includes a micro substrate and a magnetic field generator. The micro substrate(112) is formed with a spring having elastic force, a reflector adhered to the spring, and Permalloy. The magnetic field generator(109) is installed nearly to the micro substrate. A supporter(101) is used for connecting the micro substrate to the magnetic field generator.
    • 目的:提供用于精确控制反射器的开关操作的微机电系统的光开关及其制造方法,以通过使用磁致动方法代替静电致动方法来增强致动特性。 构成:微机电系统的光开关包括微基板和磁场发生器。 微型基板(112)形成有具有弹性力的弹簧,粘附到弹簧的反射器和坡莫合金。 磁场发生器(109)几乎安装在微型基板上。 支撑件(101)用于将微型基板连接到磁场发生器。