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    • 1. 发明专利
    • Positive photosensitive composition
    • 正性感光组合物
    • JP2008287284A
    • 2008-11-27
    • JP2008198286
    • 2008-07-31
    • Fujifilm Corp富士フイルム株式会社
    • FUJIMORI TORU
    • G03F7/039C08F220/62G03F7/004H01L21/027
    • PROBLEM TO BE SOLVED: To provide a positive photosensitive composition which has high sensitivity and is improved in edge roughness of a pattern. SOLUTION: The positive photosensitive composition comprises: (A) a compound capable of generating an acid upon irradiation with actinic rays or radiation; (B) a resin which has a monocyclic or polycyclic alicyclic hydrocarbon structure, also has a repeating unit having a lactone structure represented by general formula (IV), (AI) or (VI), and decomposes by an action of an acid to increase its solubility in an alkali developer; and (C) a basic compound containing a ≥8C substituted or unsubstituted aliphatic hydrocarbon group within a molecule. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供具有高灵敏度并改善图案的边缘粗糙度的正性感光组合物。 正光敏组合物包含:(A)能够在光化射线或辐射照射时能产生酸的化合物; (B)具有单环或多环脂环烃结构的树脂,也具有由通式(IV),(AI)或(VI)表示的内酯结构的重复单元,并通过酸的作用分解以增加 其在碱性显影剂中的溶解度; 和(C)在分子内含有≥8C取代或未取代的脂族烃基的碱性化合物。 版权所有(C)2009,JPO&INPIT