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    • 9. 发明专利
    • Optical interference type display panel and method of manufacturing the same
    • 光学干涉型显示面板及其制造方法
    • JP2005062815A
    • 2005-03-10
    • JP2004102019
    • 2004-03-31
    • Prime View Internatl Co Ltdプライム ビュー インターナショナル カンパニーリミテッド
    • LIN WEN-JIAN
    • G02B26/08B81B3/00B81B7/00B81B7/02B81C1/00F04B37/02F04F99/00G02B26/00G09F9/00G09F9/30
    • G02B26/001B81B7/0012B81B2201/045
    • PROBLEM TO BE SOLVED: To provide an optical interference type display panel in which an optical interference type reflection structure is protected from an external environment not to be damaged and to provide a method of manufacturing the optical interference type display panel.
      SOLUTION: A first electrode and a sacrificing layer are continuously formed on a substrate, then a first opening part for forming an inner support base is formed in the first electrode and the sacrificing layer. The support base is formed in the first opening part, then a second electrode is formed on the sacrificing layer and the support base, thus a fine electromechanical system structure is formed. Thereafter, a protective structure is adhered to a substrate for forming a chamber by using an adhesive, the fine electromechanical system structure is enclosed, and at least a second opening part is kept on the side wall of the chamber. Thereafter, the sacrificing layer is removed by using a release etching method through the second opening part and a cavity is formed in the optical interference type reflection structure. Finally, the second opening part is closed and the optical interference type reflection structure is sealed between the substrate and the protective structure.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种光学干涉型显示面板,其中光学干涉型反射结构被保护免受外部环境的损害,并提供制造光学干涉型显示面板的方法。 解决方案:在基板上连续地形成第一电极和牺牲层,然后在第一电极和牺牲层中形成用于形成内部支撑基座的第一开口部分。 支撑基底形成在第一开口部分中,然后在牺牲层和支撑基底上形成第二电极,从而形成精细的机电系统结构。 此后,通过使用粘合剂将保护结构粘附到用于形成室的基板,封闭微机电系统结构,并且至少第二开口部保持在室的侧壁上。 此后,通过使用通过第二开口部分的剥离蚀刻方法去除牺牲层,并且在光学干涉型反射结构中形成空腔。 最后,关闭第二开口部分,并将光学干涉型反射结构密封在基板和保护结构之间。 版权所有(C)2005,JPO&NCIPI