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    • 3. 发明专利
    • Oil diffusing pump and evacuation device
    • 油扩散泵和排气装置
    • JP2005180242A
    • 2005-07-07
    • JP2003419680
    • 2003-12-17
    • Seiko Epson Corpセイコーエプソン株式会社
    • IMAI MASAOHARA MITSUO
    • F04F9/00
    • PROBLEM TO BE SOLVED: To provide an oil diffusing section and an evacuation device which can certainly and efficiently conduct the heat generated by a heat generation section such as a heater to the side of the oil diffusing section and which can reduce the electric power supplied to the heat generation section.
      SOLUTION: An oil diffusing pump 31 connected to a vacuum chamber 11 so as to evacuate the inside of the vacuum chamber 11, includes the heat generation section 51 which generates heat by being supplied with electricity, and the oil diffusing section 32 which forms negative pressure by accelerating the vapor of working oil evaporated by being heated by the heat generation section 51 so as to exhaust the air within the vacuum chamber 11, thereby evacuating the inside of the vacuum chamber 11. A heat conduction member 100 is arranged between the heat generation section 51 and the oil diffusing section 32.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 解决的问题:提供一种油扩散部和排气装置,其能够有效地将由加热器等发热部产生的热量传播到油扩散部的一侧,并且能够减少电 供给到发热部的电力。 解决方案:连接到真空室11以便抽空真空室11内部的油扩散泵31包括通过供电而产生热量的发热部分51,以及油扩散部分32,其中 通过加热由发热部51加热而蒸发的工作油的蒸气,使真空室11内的空气排出,从而排出真空室11的内部,形成负压。导热构件100配置在 发热部51和油扩散部32.版权所有(C)2005,JPO&NCIPI
    • 5. 发明专利
    • DIFFUSION PUMP
    • JPH1182399A
    • 1999-03-26
    • JP27323397
    • 1997-08-29
    • BOC GROUP PLC
    • HUNTLEY GRAEME
    • F04F9/00
    • PROBLEM TO BE SOLVED: To prolong the service period in a diffusion pump provided with an oil reservoir for housing operating fluid and a hollow external main body provided with a means for heating the operating fluid when the operating fluid stays in the base by integrally providing the reservoir for operating fluid with the external main body. SOLUTION: A diffusion pump 1 is provided with a hollow external main body 2 having a circular cross section, and the external main body 2 is provided with an oil reservoir 32 for housing operating fluid, and a heater 18 for heating the operating fluid when the operating fluid stays in the base is arranged continuously to the base. A reservoir 30 for operating fluid is integrally arranged with the external main body 2. At the time of use, the operating fluid is heated by the heater 18 so as to generate the steam, and the steam is discharged from a jet stage by raising the steam chimney built in the external main body 2. The reservoir 30 is formed with the structure having two cylindrical surfaces 34, 36 concentrical with the axis of the pump, and communicated with the oil reservoir 32 through a small hole duct 38.
    • 6. 发明专利
    • MODIFICATION OF DIFFUSION PUMP
    • JPH09317639A
    • 1997-12-09
    • JP3349297
    • 1997-02-18
    • BOC GROUP PLC
    • GUREIMU HANTORII
    • F04B37/00F04F9/00
    • PROBLEM TO BE SOLVED: To set a chamber or a partitioning chamber to a predetermined vacuum pressure and exhaust speed by forming an inlet communicated with a chamber to be exhausted in a hollow outside main body. SOLUTION: This diffusion pump 1 is equipped with an outlet 16 connected to a backing pump and a first inlet 20 to which a chamber and a partitioning chamber which are to be exhausted and different are attached. This first inlet 20 is positioned by being located adjacently to a first jet stage. The diffusion pump 1 is equipped with a second inlet 22 to which the chamber and the partitioning chamber which are to be exhausted and different are attached. This second inlet 22 is positioned by being located adjacently to a second jet stage 14. The diffusion pump 1 in which this additional inlet 22 is arranged by being located adjacently to the second jet stage 14 provides an additional lower exhaust speed and higher pressure when compared with the first inlet 20.
    • 7. 发明专利
    • JPH05280499A
    • 1993-10-26
    • JP35140992
    • 1992-12-08
    • F04B37/16F04F5/20F04F5/36F04F9/00
    • PURPOSE: To refine paraffin wax so as to use it as a pump fluid and enhance the performance of a pump by heating a reservoir of paraffin wax to generate vapor, condensing the vapor from a vapor jet in a condensation zone, and recovering the condensed wax and uncondensed material. CONSTITUTION: A reservoir of paraffin wax is contained in the lower portion of a pump 11 in the region of a condensed wax outlet 9, a wax cycling pump 12 and the body of a wax vaporizer 14. A vapor is generated by heating the reservoir. The vapor is discharged through an inlet 8 to a gas entrainment zone connected to a vessel 1 to generate a vapor jet. Gas is allowed from the vessel 1 to enter the vapor jet, and vapor jet containing the gas is allowed to pass a condensation zone. Vapor from the vapor jet is condensed in the condensation zone. The condensed wax and uncondensed material are recovered separately. Thus, it is possible to use paraffin wax as a pump fluid, thereby improving the performance of the pump as a whole.
    • 8. 发明专利
    • OIL DIFFUSION PUMP
    • JPH03264800A
    • 1991-11-26
    • JP6180790
    • 1990-03-13
    • SONY CORP
    • TAKADA NORIYOSHIYASUDA HIDEOOGISHIMA YASUHIRO
    • F04F9/00H01J9/385
    • PURPOSE:To improve durability of a jet constitutional part by forming said constitutional part of iron or stainless steel, in the case of an oil diffusion pump having a chimney and the jet constitutional part, which constitutes a nozzle, in a casing. CONSTITUTION:An oil diffusion pump, used in an exhaust process for a vacuum tube or the like, is provided with a suction port 11 connected to a vessel side to be exhausted, for instance, to a vacuum tube side through a baffle, trap, etc., on the upper part and a chimney 2, which comprises inner and outer side chimneys 23, 24, inside a cylindrical casing 1 in which an exhaust port 10 connected to a rotary pump or the like, is provided on the lower part side surface. A main unit 20, composed of, for instance, three-stepped jet constitutional parts 3 to 5, is arranged. Each of jet constitutional parts 3 to 5 is formed in a structure in which the first to third nozzles 6 to 8 are constituted between umbrella parts 32, 42, 52 and cylinder parts 33, 43, 53. Here, these jet constitutional parts 3 to 5 are formed of iron or stainless steel.