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    • 9. 发明专利
    • ETCHING ELECTRODE COVER
    • JPH03166322A
    • 1991-07-18
    • JP30492589
    • 1989-11-27
    • NEC CORP
    • INOUE TAKASHI
    • C22B4/00H01L21/302H01L21/3065
    • PURPOSE:To develop an electrode cover for dry etching having an excellent cooling effect by adhering an In sheet having resilience on the opposite surface of the metallic plate of the electrode cover for dry etching constituted of the metallic plate and an electrode coating material stuck on the front surface thereof. CONSTITUTION:A double-coated adhesive tape 3 is stuck onto one surface of the metallic plate 2 which is made of oxygen-free copper and is polished on both surfaces and a polypropylene plate 4 as the electrode coating material is stuck thereon. The In sheet 1 which has the extremely high resilience at ordinary temp. and is easily deformed to meet the ruggedness of the front surface of the electrode is stuck to the surface on the opposite side of the metallic plate 2. This electrode cover for dry etching comes into contact with the electrode surface via the easily deformable In sheet and, therefore, the adhesive property to the electrode is improved and the high cooling effect is obtd. simply by placing the cover on the electrode.