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1. 发明专利

JP2007511104A Method and system for processing the work piece in a semiconductor processing system under vacuum 有权
公开(公告)号：JP2007511104A
公开(公告)日：2007-04-26
申请号：JP2006539863
申请日：2004-11-10
申请人：ブルーシフトテクノロジーズインコーポレイテッド
发明人：ヴァン・デル・ミューレン，ペーター
IPC分类号： H01L21/677 , B25J17/00 , B65G1/00 , B66C1/00 , C23C16/54 , F26B5/04 , F26B13/30 , G06F7/00 , G06F19/00 , H01L20060101 , H01L21/00
CPC分类号： H01L21/67167 , B25J9/042 , H01L21/67126 , H01L21/67161 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67253 , H01L21/67259 , H01L21/67706 , H01L21/67727 , H01L21/67733 , H01L21/67736 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/67754 , H01L21/67757 , H01L21/67781 , H01L21/68 , H01L21/68707 , H01L21/68735 , Y10S414/135 , Y10S414/137 , Y10S414/139 , Y10T74/20305
摘要： Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The system may include one or more vertically stacked load locks or vertically stacked process modules.

2. 发明专利

JP2002536274A 失效
公开(公告)号：JP2002536274A
公开(公告)日：2002-10-29
申请号：JP2000598439
申请日：2000-02-10
IPC分类号： B66F19/00 , B66C1/00 , B66C23/00 , B66D3/18
摘要： The invention relates to a system for controlling a load lifting device ( 1 ) with a controllable drive ( 2 ) and a lifting element ( 5 ) which is linked with the drive ( 2 ) and which is-at least in a non-operational position due to the gravitational force-vertically (Z-Z) aligned. A load receiving element ( 7 ) is linked with the lifting element ( 5 ). The system further comprises a control circuit for balancing the loads. Said control circuit encompasses a device for producing a path-dependent signal which corresponds to a substantially vertical (Z-Z) movement of the lifting element ( 5 ) and which represents the input signal for the control of the drive ( 2 ).

3. 发明专利

JP3202107B2 失效
公开(公告)号：JP3202107B2
公开(公告)日：2001-08-27
申请号：JP21861293
申请日：1993-09-02
IPC分类号： B66C1/10 , B66C1/00 , B66C1/42 , B66C1/44 , B66C1/62 , E04G21/16

4. 发明专利

JP2000191285A CRANE 失效
公开(公告)号：JP2000191285A
公开(公告)日：2000-07-11
申请号：JP24487899
申请日：1999-08-31
申请人： PALFINGER AG
发明人： WIMMER ERIC
IPC分类号： B66C13/20 , B66C1/00 , B66C13/18 , B66C23/82 , E02F9/22 , F15B11/028
摘要： PROBLEM TO BE SOLVED: To quickly operate dynamic overload preventing devices at the same time by reducing change of the detected pressure or change of load in response to the detected pressure of a cylinder or a load change of a piston with the lapse of time, and forming the signal for operating a valve cross sectional area adjusting device. SOLUTION: A wind-up cylinder is controlled through a remote control device formed of a transmitter 9 and a receiver 10. The signal sent from the transmitter 9 is transferred to a slide valve 12 having a capacity adjusting device through the receiver 10. Operating oil from a pressure-oil pipe 13 is pressure-fed from the valve 12 to a piston side 3a or a rod side 3b of the wind-up cylinder. The piston side 3a is provided with a load holding valve 11. The wind-up force is computed on the basis of the measured pressure values of the piston side 3a and the rod side 3b, and transferred to a differential unit 8. The differential unit 8 aims at the reduction of change of the detected pressure, and outputs the output signal for operating a driving device for adjusting the valve cross sectional area.

5. 发明专利

JP2773903B2 失效
公开(公告)号：JP2773903B2
公开(公告)日：1998-07-09
申请号：JP15445189
申请日：1989-06-19
IPC分类号： B65G57/04 , B25J15/06 , B65G59/04 , B66C1/00 , B66C1/02

6. 发明专利

JP2763027B2 失效
公开(公告)号：JP2763027B2
公开(公告)日：1998-06-11
申请号：JP22174787
申请日：1987-09-04
申请人： DAINIPPON INSATSU KK
发明人： KOBAYASHI HIROSHI , YUGUCHI NORYUKI
IPC分类号： B65H5/10 , B65G59/04 , B65H5/14 , B66C1/00 , B66C1/02 , B66C13/06

7. 发明专利

JP2756466B2 失效
公开(公告)号：JP2756466B2
公开(公告)日：1998-05-25
申请号：JP32914989
申请日：1989-12-19
申请人： ISHIKAWAJIMA KENZAI KOGYO KK
发明人： MATSUI KATSUNORI
IPC分类号： E21D11/40 , B66C1/00 , B66C1/10 , B66C1/62 , B66C1/66 , B66C13/08

8. 发明专利

JPH10129975A ATTACHMENT WITH POWER UNIT FOR CRANE 失效
公开(公告)号：JPH10129975A
公开(公告)日：1998-05-19
申请号：JP30356496
申请日：1996-10-30
申请人： KOMATSU MFG CO LTD , YAMAKAWA ENG
发明人： OTA SHINICHI , MIZUTANI SHUICHI , MATSUMOTO RYOZO
IPC分类号： B66C1/00 , B66C1/42 , B66C3/02
摘要： PROBLEM TO BE SOLVED: To reduce the man-hour for changing an attachment to improve the working capacity, by changeably suspending the attachment from a lower part of a power unit suspended from a point of a wire of a crane, through a connecting means. SOLUTION: A power unit 10 comprises a stem 12 comprising a hoisting accessory 11 fixed to a point thereof, an engine 14 installed inside of a case 13, and a power unit apparatus such as a hydraulic pump 15 or the like. A rotating means 18 comprising a stewing motor 18b on an upper part, is connected with a shaft part 12a of a lower end of the stem 12. The carrying operation of the loose material such as sediment can be performed by an opening and crossing operation of, for example, a clam basket 21, and the clam basket 21 can be opened and closed in the desired direction by rotating the rotating means 18 by driving the slewing motor 18b, when the control of the opening and closing direction is necessary. When the other attachment is changed for the clam basket 21, the clam basket 21 is lowered to the ground, a connecting pin 22 is drawn out to be removed, and the other attachment is mounted on the power unit 10.

9. 实用新型

JP2567158Y2 失效
公开(公告)号：JP2567158Y2
公开(公告)日：1998-03-30
申请号：JP16431588
申请日：1988-12-19
IPC分类号： B66C1/10 , B66C1/00 , B66C1/62 , B66C1/66 , B66C13/06 , B66C13/46 , B66C17/04

10. 实用新型

JP2559864Y2 失效
公开(公告)号：JP2559864Y2
公开(公告)日：1998-01-19
申请号：JP16431788
申请日：1988-12-19
IPC分类号： B66C1/10 , B66C1/00 , B66C1/62 , B66C1/66 , B66C13/06 , B66C13/46 , B66C17/04

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