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    • 3. 发明专利
    • Embedded type semiconductor laser and manufacture thereof
    • 嵌入式半导体激光器及其制造
    • JPS59124185A
    • 1984-07-18
    • JP23452682
    • 1982-12-28
    • Hitachi Ltd
    • TODOROKI SATORU
    • H01S5/00H01S5/22H01S5/227
    • H01S5/227H01S5/2227H01S5/2228H01S5/2275
    • PURPOSE:To decrease a current flowing a part other than an active layer to the large extent, by embedding and growing a plurality of P-N junction layers, which have larger forbidden band width than the forbidden band widths of P type InP and N type InP or the active layer. CONSTITUTION:On an N type InP substrate 1, the following layers are laminated; an N type InP lightguide layer 2, an N or P type InGaAsP active layer 3 which has a smaller forbidden band widht than that of the layer 2, a P type InP lightguide layer 4 and a P type InGaAsP cap layer 5 which has a forbidden band width larger than that of the layer 3 and smaller than that of the layer 4. Then, a stripe shaped mask 6 is formed on the layer 5. The area, which is not covered by the mask 6, is etched to a part of the layer 2 by mesa etching. Then, a plurality of P-N junctions layers 7 are embedded and laminated in the etched region. Thereafter, the mask 6 is removed, and a P diffused layer 8 reaching a part of the layer 4 is formed in this part. Electrodes 9 and 10 are formed on the surface including the layer 8 and the back surface of the substrate 1, respectively. In this way, a current flowing a part other than the layer 3 is largely decreased, and the elongation of a life is implemented.
    • 目的:通过嵌入和生长具有比P型InP和N型InP的禁带宽更大的禁带宽度的多个PN结层,来减少流过活性层以外的部分的电流, 活动层。 构成:在N型InP基板1上层叠以下层; N型InP光导层2,具有比层2更小的禁带宽度的N或P型InGaAsP有源层3,具有禁止的P型InP光导层4和P型InGaAsP覆盖层5 带宽大于层3的宽度,并且小于层4的宽度。然后,在层5上形成条形掩模6.未被掩模6覆盖的区域被蚀刻到 层2通过台面蚀刻。 然后,将多个P-N结层7嵌入并层压在蚀刻区域中。 此后,去除掩模6,并且在该部分中形成到达层4的一部分的P +扩散层8。 电极9和10分别形成在包括基板1的层8和背面的表面上。 以这种方式,流过除了层3之外的部分的电流大大降低,并且实现寿命的延长。