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    • 3. 发明专利
    • Substrate processor, alarm management method for the same, and storage medium
    • 基板处理器,相同的报警管理方法和存储介质
    • JP2013077053A
    • 2013-04-25
    • JP2011215099
    • 2011-09-29
    • Tokyo Electron Ltd東京エレクトロン株式会社
    • KANEKO TOMOHIRO
    • G05B23/02
    • G08B21/18G05B23/027
    • PROBLEM TO BE SOLVED: To provide a substrate processor and the like for efficiently performing recovery operation with respect to a plurality of pieces of alarm information.SOLUTION: In a substrate processor 1 provided with a plurality of modules 2, detection parts 41a to 41d detect factors that interlock the modules 2 and output detection signals. An interlock management part 42 receives the detection signals, outputs master alarm information that the factors have been detected, and outputs a signal for interlock operation to the modules 2 of which the management part is in charge. Module controllers 43a to 43c perform interlock operation with respect to the modules 2 on the basis of the detection signals and outputs slave alarm information that the interlock has been operated. An alarm management part 40 determines a master-slave relationship between the master alarm information and the slave alarm information and displays alarm information in master-slave relationship as a group.
    • 要解决的问题:提供用于相对于多个报警信息有效执行恢复操作的基板处理器等。 解决方案:在具有多个模块2的基板处理器1中,检测部分41a至41d检测互锁模块2并输出检测信号的因素。 互锁管理部件42接收检测信号,输出检测到因素的主报警信息,并向管理部件负责的模块2输出用于互锁操作的信号。 模块控制器43a至43c基于检测信号执行与模块2的互锁操作,并且输出互锁已被操作的从属报警信息。 报警管理部件40确定主报警信息和从属告警信息之间的主从关系,并以主从关系的告警信息为一组。 版权所有(C)2013,JPO&INPIT
    • 9. 发明专利
    • Monitoring device and thermoregulator
    • 监测装置和热电偶
    • JP2009032058A
    • 2009-02-12
    • JP2007195958
    • 2007-07-27
    • Yamatake Corp株式会社山武
    • HIRAYAMA HIROBUMI
    • G05D23/19
    • G05B23/0272G05B23/027G05D23/1902G05D23/22Y10S345/904
    • PROBLEM TO BE SOLVED: To provide a monitoring device with a simple structure, in which abnormality of a temperature sensor in a thermoregulator can be easily visually confirmed (known) using an indicator provided on a device body. SOLUTION: The device is provided with: a monitoring device body provided with an indicator for displaying a state of a monitoring object detected using a sensor; an abnormality detection means which detects abnormality of the monitoring device body or the monitoring object and outputs an abnormality detection signal; a latch means which latches and holds the abnormality detection signal; and an abnormality display control means which varies the form of abnormality display by the indicator according to presence/absence of the abnormality detection signal when a latch signal is outputted from the latch means. The abnormality is thus displayed while discriminating whether it is of the current time or of the past time. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种结构简单的监测装置,其中可以使用设置在装置主体上的指示器容易地目视确认(已知)温度调节器中的温度传感器的异常。 该装置设置有:监视装置本体,设置有用于显示使用传感器检测的监视对象的状态的指示器; 异常检测装置,其检测监视装置主体或监视对象的异常,并输出异常检测信号; 闩锁装置,其锁存和保持异常检测信号; 以及异常显示控制装置,当从锁存装置输出锁存信号时,根据异常检测信号的存在/不存在来改变指示符的异常显示形式。 因此,在判断是当前时间还是过去时间的同时显示异常。 版权所有(C)2009,JPO&INPIT