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    • 3. 发明专利
    • Fluid apparatus
    • 流体装置
    • JPS61126387A
    • 1986-06-13
    • JP24895984
    • 1984-11-26
    • Yokogawa Electric Corp
    • MIURA AKIRA
    • F04B9/00B41L27/10F04B43/04F04B43/12F04B43/14H01L41/09
    • F04B43/046F04B9/00F04B43/12F04B43/14
    • PURPOSE:To improve response performance and reduce dimension by forming a part of the inner wall of a fluid chamber in flat form from a piezoelectric substrate formed by arranging a plurality of driving electrodes in row from and transferring fluid in the driving direction by driving in multiphase the driving electrodes of the piezoelectric substrate in a prescribed direction successively. CONSTITUTION:A plurality of driving electrodes 2 are arranged in row from on one surface of a piezoelectric substrate 1, and a back plate 3 is superposed onto the piezoelectric substrate 1 through a spacer 4, and a fluid chamber R is formed between the piezoelectric substrate 1 and the back plate 3. When a driving signal phi is supplied from an input terminal, a distorted wave is generated in the vicinity of the surface of the piezoelectric substrate 1 so as to shift from an electrode 21 towards an electrode 221 according to the lapse of time. Therefore, fluid can be transferred from the electrode 21 towards the electrode 221 by adding fluid into the fluid chamber R. The direction of transfer can be reversed by changing the phase order of the driving signals. Therefore, a pump which is small-sized and has high response performance and can transfer liquid from one edge to the other by opening the both edges of the apparatus can be obtained.
    • 目的:通过从压电基板形成平坦形式的流体室的内壁的一部分来改善响应性能并减小尺寸,所述压电基板通过在多相中驱动而排列多个驱动电极并沿驱动方向传送流体而形成 压电基板的驱动电极依次按规定的方向。 构成:从压电基板1的一个表面排列成多个驱动电极2,背板3通过间隔件4叠置在压电基板1上,在压电基板之间形成有流体室R 当从输入端子提供驱动信号phi时,在压电基板1的表面附近产生失真波,从而从电极21向电极221移动,根据 时间流逝 因此,流体可以通过将流体添加到流体室R中而从电极21向电极221传递。通过改变驱动信号的相位顺序可以反转传送方向。 因此,可以获得小尺寸并且具有高响应性能并且可以通过打开设备的两个边缘将液体从一个边缘传递到另一个的泵。
    • 4. 发明专利
    • 液体材料吐出装置
    • JPWO2017122683A1
    • 2018-11-15
    • JP2017000639
    • 2017-01-11
    • 武蔵エンジニアリング株式会社
    • 生島 和正
    • B05C5/00
    • B05C5/00F04B9/00
    • 課題:プランジャーを効率的に加速でき、装置の重心を低くでき、メンテナンス性が良好な液体材料吐出装置及び該装置を搭載した塗布装置の提供。解決手段:吐出口と連通し、液体材料が供給される液室と、液室よりも小径の先端部が液室内を進退動するプランジャーと、プランジャーを上方に付勢する弾性体と、実質的に水平方向に延びるように配置されたアームと、アームを動作させる駆動源となるアーム駆動装置と、アーム駆動装置が配設されるベース体と、を備えた液体材料吐出装置であって、アーム駆動装置と接続され、アーム駆動装置及びアームを揺動可能に支持する揺動機構部を備え、アーム駆動装置がアームの長さ方向に配設された複数個のアクチュエータを備え、アームがプランジャーを下方に押圧する押圧部を備え、プランジャーが押圧部に押圧される当接部を備え、アームの揺動運動によりプランジャーが直線往復移動する液体材料吐出装置及びその塗布装置。
    • 7. 发明专利
    • Chemical liquid supply device and chemical liquid supply method
    • 化学液体供应装置和化学液体供应方法
    • JP2011101851A
    • 2011-05-26
    • JP2009257828
    • 2009-11-11
    • Koganei Corp株式会社コガネイ
    • TAKEISHI TOSHIO
    • B05C11/10B05C5/00G03F7/16H01L21/027
    • G03F7/16B05C5/02B05C11/1002F04B9/00F04B13/00F04B43/06F04B43/084F04B43/10H01L21/67017
    • PROBLEM TO BE SOLVED: To discharge a certain amount of chemical liquid from a discharge nozzle with high accuracy while removing air bubbles, dust and the like contained in the chemical liquid. SOLUTION: The chemical liquid supply device includes a pump 12 provided with a pump chamber 15 expanded and contracted by an elastically deformable bellows 14, and the chemical liquid in a chemical liquid container 10 is led to the pump chamber 15 through a suction passage 21. The chemical liquid in the pump chamber 15 is discharged to the discharge nozzle 11 through a discharge passage 22. A circulation passage 23 which returns the chemical liquid, supplied from the pump chamber 15, to the pump chamber 15 and has an expansion/contraction portion is connected to the pump 12 in the form of a loop. The circulation passage 23 is provided with a filter 30 which filters the chemical liquid returned to the pump chamber 15. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:在除去药液中所含的气泡,灰尘等的同时,高精度地从排出喷嘴排出一定量的化学液。 解决方案:化学液体供应装置包括:泵12,其设置有由可弹性变形的波纹管14膨胀和收缩的泵室15,并且化学液体容器10中的化学液体通过抽吸被引导到泵室15 泵室15中的化学液体通过排出通道22排出到排出喷嘴11.一种循环通道23,其将从泵室15供应的化学液体返回到泵室15并具有膨胀 收缩部以循环的形式连接到泵12。 循环通道23设置有过滤器30,其过滤返回到泵室15的化学液体。版权所有(C)2011,JPO&INPIT