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    • 1. 发明专利
    • Method for producing hafnium complex
    • 生产高复合物的方法
    • JP2009292731A
    • 2009-12-17
    • JP2008131124
    • 2008-05-19
    • Central Glass Co Ltdセントラル硝子株式会社
    • YAMADA SHUHEIRYOKAWA ATSUSHI
    • C07C29/70C07C31/28C07C41/01C07C43/13C07C45/77C07C49/92C07F7/00
    • C07C49/92C07C29/70C07C41/18C07C45/77C07C31/28C07C43/04
    • PROBLEM TO BE SOLVED: To provide a method for producing tetra-t-butoxyhafnium, tetrakis(acetylacetonato)hafnium, tetrakis(1-methoxy-2-methyl-2-propanolato)hafnium or the like, which is a raw material for producing films in the production of semiconductors. SOLUTION: Provided is a method for producing the tetra-t-butoxyhafnium, tetrakis(acetylacetonato)hafnium, tetrakis(1-methoxy-2-methyl-2-propanolato)hafnium or the like, which comprises a process of adding a compound represented by general formula: A(O y XO n R f ) m to a hafnium amide complex represented by general formula: Hf[N(R 1 )(R 2 )] 4 and then vacuum-distilling the mixture, a process of adding a lithium alkylamide represented by general formula: Li(NR 3 R 4 ) to the obtained distillate and then vacuum-distilling the mixture, and a process of adding t-butanol, acetylacetone, 1-methoxy-2-methyl-2-propanol or the like to the resultant distillate and then vacuum-distilling the mixture. COPYRIGHT: (C)2010,JPO&INPIT
    • 待解决的问题:提供作为原料的四 - 叔丁氧基铪,四(乙酰丙酮)铪,四(1-甲氧基-2-甲基-2-丙醇)铪等)的制造方法 用于生产半导体的薄膜。 解决方案:提供四叔丁氧基铪,四(乙酰丙酮)铪,四(1-甲氧基-2-甲基-2-丙醇)铪等)的制造方法,其包括将 由通式表示的化合物:代表的铪酰胺络合物代表的化合物:A(O Y XO n R 通过通式:Hf [N(R SB SB)](R SB 2)SB SB 4,然后真空蒸馏混合物,加入 将由通式Li(NR SB 3 R SB SB 4)表示的锂烷基酰胺与所得馏出物反应,然后真空蒸馏混合物,并加入叔丁醇, 乙酰丙酮,1-甲氧基-2-甲基-2-丙醇等,然后真空蒸馏该混合物。 版权所有(C)2010,JPO&INPIT