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    • 3. 发明专利
    • Method and device for transfering fine structure pattern
    • 用于传递细微结构图的方法和装置
    • JP2007287942A
    • 2007-11-01
    • JP2006113963
    • 2006-04-18
    • Hitachi High-Technologies Corp株式会社日立ハイテクノロジーズ
    • HASEGAWA MITSURUOGINO MASAHIKOANDO TAKUJIKATAHO HIDEAKI
    • H01L21/027B30B9/00B81C99/00
    • B29C43/021B29C33/08B29C35/0888B29C43/003B29C43/10B29C59/022B29C2035/0827B29C2043/025B29C2043/3238B29C2059/023
    • PROBLEM TO BE SOLVED: To solve the following problems that there occur a transfer error of a concave-convex pattern and a decrease in effective transfer area about a transfer technology of a fine structure pattern for transfering the surface structure of the fine concave-convex pattern to the body to be transfered. SOLUTION: The fine structure pattern transfering device depresses a stamper (40) having a concave-convex surface (41) to a body (50) to be transfered to transfer the concave-convex surface (41) to the surface (51) to be transfered of the body (50). A pressurizing plate (60) having a large horizontal surface with the stamper (40) and the body (50) mounted with the surface (41) and the surface (51) contacted, a fluid spouting surface (31) for mounting the plate (60) and spouting the fluid to the lower surface of it, and a contact surface (21) for contacting the upper surface of the stamper (40), are included in the structure. COPYRIGHT: (C)2008,JPO&INPIT
    • 解决的问题为了解决传递微细凹槽的表面结构的精细结构图案的转印技术,存在凹凸图案的转印误差和有效转印区域的减小的以下问题 -convex图案要转移到身体。 解决方案:精细结构图案转印装置将具有凹凸表面(41)的压模(40)压向要转印的主体(50),以将凹凸表面(41)转印到表面(51) )被传送到身体(50)。 具有与压模(40)和安装有表面(41)和表面(51)接触的主体(50)的具有大水平表面的加压板(60),用于安装板的流体喷射表面(31) 60)并且将流体喷射到其下表面,并且用于接触压模(40)的上表面的接触表面(21)被包括在该结构中。 版权所有(C)2008,JPO&INPIT