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1. 发明专利

JP2020091399A 露光用光源装置审中-公开
公开(公告)号：JP2020091399A
公开(公告)日：2020-06-11
申请号：JP2018228493
申请日：2018-12-05
申请人： USHIO ELECTRIC INC
发明人： HAYASHI KENJI , MIURA YUICHI
IPC分类号： G02B6/42 , G03F7/20 , H01S5/40
摘要：【課題】複数の半導体レーザ光源を用いて、角度分布の均一性を向上させた光を供給する露光用光源装置を提供する。【解決手段】複数の半導体レーザ光源と、複数の半導体レーザ光源に対応して配置され、半導体レーザ光源から出射された光線束を略平行の光線束に変換して出射する、複数のコリメート光学系と、コリメート光学系から出射された光線束が入射される入射面を含み、コリメート光学系から出射された光線束を集光する集光光学系12と、集光光学系から出射された光線束が集光する位置に配置された、円形状の入射面を含む光導波路とを備え、集光光学系の入射面における、半導体レーザ光源から出射されたそれぞれの光線束22は、仮想的に集光光学系の光軸15を中心に回転させて、同一の径方向に向かって並べたときに、隣接する光線束の一部が重なり、集光光学系の光軸からの距離が同一である光線束群に属する数の最大値と最小値の比率が2未満である。【選択図】図3B

2. 发明专利

JP2015179766A 半導体装置审中-公开
公开(公告)号：JP2015179766A
公开(公告)日：2015-10-08
申请号：JP2014057016
申请日：2014-03-19
申请人： USHIO ELECTRIC INC
发明人： SATO HIROTO
IPC分类号： H01S5/022 , F21S2/00
摘要：【課題】充分なスペックルノイズの低減を得ることができる半導体装置を提供する。【解決手段】各サブマウント3は、面発光部22の面に沿う第1方向の線熱膨張率が半導体チップ2の線熱膨張率よりも大きく、面発光部22の面に沿う方向で且つ前記第1方向と直交する第2方向の線熱膨張率が半導体チップ2の線熱膨張率よりも小さくなるように、形成される。そして、各サブマウント3は、第1方向が少なくとも一つの他のサブマウント3の第1方向と異なるように、配置される。【選択図】図3

3. 发明专利

JP2015179759A 半導体装置审中-公开
公开(公告)号：JP2015179759A
公开(公告)日：2015-10-08
申请号：JP2014056978
申请日：2014-03-19
申请人： USHIO ELECTRIC INC
发明人： MAESO TAKESHI , SATO HIROTO
IPC分类号： H01L23/373 , H01L33/64 , H01S5/022
摘要：【課題】製造時における加熱/冷却過程で半導体チップに対して加えられる応力を抑制しながらも、駆動時に半導体チップから生じる熱を効率的に排熱する機能を十分に発揮できる半導体装置を提供する。【解決手段】本発明の半導体装置は、半導体チップと、当該半導体チップを上面に載置するサブマウントを備える。サブマウントは、層状体が複数積層されてなる構成であって、積層方向に係る線熱膨張係数と層平面方向に係る線熱膨張係数のうちの一方が半導体チップの線熱膨張係数よりも低くて他方が前記半導体チップの線熱膨張係数よりも高く、層状体の積層方向が半導体チップのチップ面に対して傾斜しているか、又は前記チップ面の外縁に対して傾斜している。【選択図】図2

4. 发明专利

JP2015179291A レーザ光源装置及び画像投影装置审中-公开
公开(公告)号：JP2015179291A
公开(公告)日：2015-10-08
申请号：JP2015122557
申请日：2015-06-18
申请人： USHIO ELECTRIC INC
发明人： YAMADA HIROTAKA
IPC分类号： G03B21/14 , G02B27/14 , G02B27/48
摘要：【課題】充分なスペックルノイズの低減を得ることができるレーザ光源装置及び画像投影装置を提供する。【解決手段】画像投影装置は、レーザ光源装置を少なくとも一つ備え、レーザ光源装置から出射される光を投射光として用いる。レーザ光源装置は、同じ色のレーザ光を出射する複数のレーザ光源を備え、複数のレーザ光源のうち少なくとも二つのレーザ光源から出射される光においては、導光体の入射面に対する光軸の入射角度が等しく、当該少なくとも二つのレーザ光源は、異なる波長の光を出射する。【選択図】図2

5. 发明专利

JP2013254144A BONDING METHOD 审中-公开
公开(公告)号：JP2013254144A
公开(公告)日：2013-12-19
申请号：JP2012130694
申请日：2012-06-08
申请人： USHIO ELECTRIC INC
发明人： WATANABE KATSUYA , YAMAGUCHI YOSHIYUKI
IPC分类号： G02B6/00 , F21S2/00 , F21V8/00 , F21Y101/00 , G02F1/1333
摘要： PROBLEM TO BE SOLVED: To make illuminance distribution of a light irradiation area uniform in a light irradiation device which guides light by a fiber bundle provided with an emission part which is configured by arranging fiber strands in a line.SOLUTION: Light emitting from a light source part 1 enters a bar-like solid light guide glass 4, advances while repeating reflection on an inner wall surface of the light guide glass 4 and being mixed, and it emits from the light guide glass 4 as light of a uniform illuminance distribution. The light emitted from the light guide glass 4 enters a first fiber bundle 2a and emits from an emission part 3 which is configured by arranging fiber strands 3a in a line. As the light guide glass 4 is provided, the illuminance distribution of the light emitting from each of the fiber strands 3a of the emission part 3 can be made uniform. It is also possible that a second fiber bundle is provided instead of the light guide glass 4, and an emission end of the second fiber bundle is arranged with a little interval with respect to an incident end of the first fiber bundle 2a, or that the second fiber bundle is provided between the light guide glass 4 and the light source part 1.

6. 发明专利

JP2012109233A LONG ARC TYPE DISCHARGE LAMP AND LIGHT IRRADIATION DEVICE 审中-公开
公开(公告)号：JP2012109233A
公开(公告)日：2012-06-07
申请号：JP2011232799
申请日：2011-10-24
申请人： USHIO ELECTRIC INC
发明人： MORI KAZUYUKI
IPC分类号： H01J61/20
摘要： PROBLEM TO BE SOLVED: To restrain a phenomenon in a long arc type discharge lamp having a pair of electrodes disposed oppositely in an arc tube and having mercury of 0.5 mg/cmor less and metal, such as iron, and halogen sealed therein that sealed-in metal is driven into the inside wall of the arc tube even when power is switched over frequently, thereby preventing an illuminance retention rate from being reduced in a short period of time.SOLUTION: The present invention relates to a long arc type discharge lamp having a pair of electrodes disposed oppositely in an arc tube, in which the arc tube has mercury (Hg) of 0.5 mg/cmor less sealed therein, at least one kind of metal, e.g., iron (Fe), thallium (Tl) or bismuth (Bi), sealed therein, and halogen sealed therein, where, letting the substance amount of the sealed metal except mercury be M (mol) and the substance amount of the sealed halogen be H (mol), the ratio H/M is within the range 2.1≤H/M≤5.0.

7. 发明专利

JP2006351435A PLASMA GENERATING APPARATUS 审中-公开
公开(公告)号：JP2006351435A
公开(公告)日：2006-12-28
申请号：JP2005178230
申请日：2005-06-17
申请人： USHIO ELECTRIC INC
发明人： YAMATANI DAIKI , NIIMI KOTA
IPC分类号： H05H1/24 , G21K5/08 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a plasma generating apparatus, wherein a worker can touch a gas inlet device in operation of the apparatus without being concerned regarding electric shocks, and the energy that should used for generation of a high-density and high-temperature plasma is not lost. SOLUTION: The plasma generating apparatus has a gas-introducing metal-made gas pipe 5, connected between the gas inlet device 2 and an annular discharge voltage impressing electrode 9, to introduce a discharge gas from the gas inlet device 2 into a vacuum vessel 13; and generates a high-density and high-temperature plasma of the discharge gas between the discharge voltage impressing electrode 9 and a grounding electrode 11, by impressing high-voltage pulses between the discharge voltage impressing electrode 9 and the grounding electrode 11 by a high-voltage pulse generator 7. An insulating pipe 6 is inserted in a part of the metal-made gas pipe 5, and the gas inlet device 2 is grounded. COPYRIGHT: (C)2007,JPO&INPIT

8. 发明专利

JP2006349347A MICROCHIP 审中-公开
公开(公告)号：JP2006349347A
公开(公告)日：2006-12-28
申请号：JP2005171790
申请日：2005-06-13
申请人： USHIO ELECTRIC INC
发明人： OGAWA YOSHIMASA
IPC分类号： G01N35/08 , B81B1/00 , G01N21/07 , G01N37/00
摘要： PROBLEM TO BE SOLVED: To provide a microchip, capable of preventing scattering of blood that is an examination liquid from the microchip, even if centrifugal force is applied to the microchip by a centrifuge. SOLUTION: In the microchip, having the examination liquid injection port 2 connected to a flow channel 11 formed by bonding a plurality of sheet members A and B to permit the examination liquid and a reagent to flow, the examination liquid injection port 2 protrudes toward the center X of the port 2 on the side opposite to the other sheet member B of a port forming surface. Especially, the forming surface of the examination liquid injection port 2 protrudes toward the center X of the port in a tapered state so as to continue toward the side opposite to the other sheet member B. COPYRIGHT: (C)2007,JPO&INPIT

9. 发明专利

JP2006344404A HIGH-PRESSURE DISCHARGE LAMP 审中-公开
公开(公告)号：JP2006344404A
公开(公告)日：2006-12-21
申请号：JP2005166805
申请日：2005-06-07
申请人： USHIO ELECTRIC INC
发明人： OKAMOTO SATORU
IPC分类号： H01J61/36
摘要： PROBLEM TO BE SOLVED: To provide a high-pressure discharge lamp of which quartz glass of a sealing tube part and metal foil hardly exfoliate and incidence of foil floatation is reduced, with high pressure-resistant strength of the sealing tube part. SOLUTION: In a vertical cross section of the sealing tube part of the high-pressure discharge lamp, B/A fulfills a formula 1: 0.01≤B/A≤0.13, wherein, A (mm) denotes a length of a first line segment (L1) connecting both ends of the metal foil (a1, a2), and B (mm) denotes a length of a second line segment (L2) connecting a middle point (b1) of the first line and a point (b2) where a perpendicular bisector (F) of the first line crosses the metal foil; and a relation between the length of the first line segment A (mm) and C1, C2 (mm) fulfills a formula 2: 0.22≤A/(C1+C2)≤1.1, wherein, a length of each line segment connecting a point (c1, c2) where an extended line of the first line segment (L1) crosses an outer periphery of the sealing tube part, and both end parts (a1, a2) of the metal foil close to the respective cross points (c1, c2). COPYRIGHT: (C)2007,JPO&INPIT

10. 发明专利

JP2006344399A LAMP FIXTURE 审中-公开
公开(公告)号：JP2006344399A
公开(公告)日：2006-12-21
申请号：JP2005166746
申请日：2005-06-07
申请人： USHIO ELECTRIC INC
发明人： IWABAYASHI HIROHISA
IPC分类号： F21S8/10 , F21V7/00 , F21V17/00 , F21Y101/00
摘要： PROBLEM TO BE SOLVED: To provide a lamp fixture not breaking a discharge lamp nor lowering a light output by mounting an auxiliary mirror on a sealing tube without using any adhesive agent. SOLUTION: On the lamp fixture, a reflection mirror 2 is arranged so as to surround a light emitting bulb 10 and a discharge lamp 1 having sealing tubes 11, 12 made of glass at both ends thereof, the sealing tube 11 at one end of the discharge lamp 1 is inserted into an opening 22 at tip end part of the reflection mirror 2, and the sealing tube 12 at the other end is extended toward a front side opening of the reflection mirror 2. The auxiliary mirror 3 made of glass, having a through-hole 310 at its center is inserted through the sealing tube 12 at the other side. A plurality of protruded parts 31a are formed on an inner face of the through-hole 310 of the auxiliary mirror 3, and the protruded parts 31a are welded to an outer face of the sealing tube 12 at the other end. COPYRIGHT: (C)2007,JPO&INPIT

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