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    • 5. 发明专利
    • MINUTE ELECTROMECHANICAL SWITCH
    • JPH0917300A
    • 1997-01-17
    • JP8243696
    • 1996-04-04
    • ROCKWELL INTERNATIONAL CORP
    • YUN JIEISON YAO
    • H01H1/20H01H59/00H01H36/00
    • PROBLEM TO BE SOLVED: To obtain a large range between respective ON/OFF impedances in GHz frequency by forming a capacitor structure capable of electrostatically performing attraction toward a lower electrode by a cantilever arm and a part of an upper electrode. SOLUTION: In a moving part of a switch 10, a cantilever arm 20 is mounted on one end on the upper surface of an anchor structure 14 and extends above a signal line 18 as well as a lower electrode of a substrate 12. An upper electrode 24 formed on the arm 20 starts from above the structure 14, extends along the upper surface of the arm 20 and terminates at the position above the lower electrode 16. The arm 20 and the electrode 24 becomes wide above the electrode 16, and form a capacitor structure 26. The switch 10 operates with a voltage applied to the electrode 24, and the structure 26 is attracted to the electrode 16 electrostatically by the voltage applied to the structure 26 as well as the electrode 24 positioned apart from the electrode 16. Accordingly a contact part 22 contacts the signal wire 18 to close a gap 19, thereby putting the signal line 18 ON.