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1. 发明专利

JP2000068296A DIE BONDER 失效
公开(公告)号：JP2000068296A
公开(公告)日：2000-03-03
申请号：JP23218098
申请日：1998-08-19
申请人： NICHIDEN MACH LTD
发明人： AOKI TORU
IPC分类号： H01L21/52 , H01L21/00
摘要： PROBLEM TO BE SOLVED: To reduce variations of finishing among substrates which flow to succeeding processes by making the configurations of the substrates equal to each other through bonding of nondefective pellets to the nondefective lands of substrates containing defective lands and defective pellets of the same type to the defective lands as dummies. SOLUTION: Substrates 1 are made to flow after defect marks are put on the defective lands of the substrates 1, and when the substrates 1 reach a bonding position BP, a die bonder discriminates the nondefective/defective states of the lands of the substrates 1 by means of a camera 3, and the nondefective/ defective states of pellets 4 which are successively brought to a pick-up position PP by means of another camera 7. Then the bonder bonds the pellets to the lands of the substrates 1, when both he lands and pellets 4 are nondefective. When the pellets 4 are defective, the bonder picks up the defective pellets and places the picked up pellets 4 on a stocker 9 (however, if the stopper 9 is full with defective pellets, the bonder leaves the pellets 4 as they are). When the lands are defective, in addition, the bonder picks up defective pellets 4a from the stocker 9 and bonds the pellets 4a to the defective lands.

2. 发明专利

JP2000031168A LEAD FRAME FEED MECHANISM 失效
公开(公告)号：JP2000031168A
公开(公告)日：2000-01-28
申请号：JP19525498
申请日：1998-07-10
申请人： NICHIDEN MACH LTD
发明人： HASE MINORU
IPC分类号： B65G47/82 , B65G1/00 , H01L21/50
摘要： PROBLEM TO BE SOLVED: To obtain a small lead frame feed mechanism for containing a lead frame in a magazine. SOLUTION: A feed roller 6 is driven to feed a lead frame 1 and to retract above through a single actuator by turning a cam 73b coupled with a pulse motor 60 for turning the feed roller 6 through a unidirectional clutch 73a when the pulse motor 60 is turned reversely thereby obtaining up/down motion of the feed roller 6. A pusher 61 being contained completely in a magazine 2 is turned by pushing the rear end of the lead frame 1 and driven through single actuator such that it is retracted at the time of nonuse and turned to push the rear end of the lead frame 1 as required.

3. 发明专利

JP2000012569A COVER FOR HEATER RAIL 失效
公开(公告)号：JP2000012569A
公开(公告)日：2000-01-14
申请号：JP17685498
申请日：1998-06-24
申请人： NICHIDEN MACH LTD
发明人： TAKASU SEIICHI
IPC分类号： B23K31/02 , H01L21/50 , H01L21/52 , H05K3/34
摘要： PROBLEM TO BE SOLVED: To reduce the inflow of outside air without, inhibiting the high speed operation of a device by providing an unoxidizing gas curtain which covers an opening to a substrate and spreading over a passage of a pellet-carrying mechanism. SOLUTION: A cover plate 27 of a cover 40 for a heater rail has a hole for supplying solder, a hole for stirring and spreading molten solder, and a rectangular hole 27c for supplying pellets. A hood 41 is arranged with its gas blowing outlet 41a near to one side of the hole 27c for supplying pellets. An unoxidizing gas is introduced in this condition from a gas inlet pipe 43, by controlling the pressure of the gas independently of an unoxidizing gas introduced into a tunnel and is discharged from the gas blowing outlet 41a, so as to form a gas curtain covering the hole 27c for supplying pellets. This can reduce the inflow of outside air, without impairing the high speed operation of a device.

4. 发明专利

JP2000012568A DIE BONDER 失效
公开(公告)号：JP2000012568A
公开(公告)日：2000-01-14
申请号：JP17601498
申请日：1998-06-23
申请人： NICHIDEN MACH LTD
发明人： ODA NORIO
IPC分类号： H01L21/52 , H01L21/00 , H01L21/50 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To miniaturize a device by reducing a motion range of a ring holder while taking the velocity of bonding operation into consideration. SOLUTION: A ring holder 16 whereon a semiconductor pellet 3 supplied in its alignment state is mounted is movable in XY direction and a pick-up position can reciprocate and move freely along a pick-up line L in X direction. Assumed position coordinates to the ring holder 16 of the semiconductor pellet 3 to be picked up using a center C of the ring holder 16 as the coordinate origin is (x), X direction coordinates PX of a pick-up position using a reference position S set at almost a center of an X direction motion range of the ring holder 16 as the coordinate origin are a position shown by an expression PX=ax (wherein 0

5. 发明专利

JPH11340248A COVER FOR HEATER RAIL 失效
公开(公告)号：JPH11340248A
公开(公告)日：1999-12-10
申请号：JP14892998
申请日：1998-05-29
申请人： NICHIDEN MACH LTD
发明人： TAKASU SEIICHI
IPC分类号： F24F9/00 , B23K31/02 , H01L21/50 , H01L21/52
摘要： PROBLEM TO BE SOLVED: To reduce flowing in of an outside air without blocking bast operation, by providing a curtain of non-oxidizing gas blown upward at an opening surface through which a base material is accessed for bonding a semiconductor pellet of a cover for a heater rail wherein the base material is transported for heating. SOLUTION: When a semiconductor pellet is assembled while transported in a tunnel to a lead frame, the semiconductor pellet is supplied with non- oxidizing gas through a pellet supply hole 31 formed with a pellet supply hole 27c of a cover plate 27 and a pellet supply hole 25a of a hood 25 matching it. The non-oxidizing gas like inert gas which is adjusted for pressure independent of the inside of the tunnel is introduced into a gas introduction pipe 25 to fill a space 30, and blown from a slit 25b to constitute a gas curtain. The gas curtain is provided close to the end of the pellet supply hole 31, the outside air being prevented from entangled in the tunnel through the pellet supply hole 31.

6. 发明专利

JPH11304445A CHECKING DEVICE OF BUMP ELECTRODE 失效
公开(公告)号：JPH11304445A
公开(公告)日：1999-11-05
申请号：JP11658098
申请日：1998-04-27
申请人： NICHIDEN MACH LTD
发明人： TANAKA SADAKI
IPC分类号： G01B11/24 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To check a bump electrode over a wide area by photographing once by providing a one-dimensional CCD camera covering one width of the arrange ment of a bump electrode, and processing the image of a signal obtained by scanning a semiconductor device in the other width direction of the arrangement of the bump electrode relatively to the camera. SOLUTION: A semiconductor device 2 on which a number of bump electrodes 1 are formed, is sent on a rail 3. An one-dimensional CCD camera 4 is arranged in such manner that the field of view faces in the direction perpendicular to the advancing direction of the semiconductor device 2, and comprises the field of view covering the total width of the arrangement of the bump electrode 1 with the resolution enough for checking the shape of the bump and the positioning accuracy. The image signals are successively sent synchronizing with the movement of the passing semiconductor device 2, and whether the bump electrode 1 has the defect or not is confirmed by processing the images. To perform image processing, a two-dimensional image is formed to compare with a reference image, whereby the existence of the solder ball and the existence of plural ball attraction can be confirmed. These can be indicated on a display to be visually confirmed.

7. 发明专利

JPH11150132A DIE BONDER 失效
公开(公告)号：JPH11150132A
公开(公告)日：1999-06-02
申请号：JP31489197
申请日：1997-11-17
申请人： NICHIDEN MACH LTD
发明人： TAKEUCHI KIYOKAZU
IPC分类号： H01L21/50 , H01L21/52
摘要： PROBLEM TO BE SOLVED: To obtain a die bonder for a water stage which is to be unmovable in X-Y directions, in which high speed operation can be realized by simplifying a mechanism for picking up and transferring a pellet while reducing the size. SOLUTION: A die bonder comprises a ratable wafer stage 1, and a suction nozzle 17 which moves freely on a moving line connecting the center of rotation and a bonding position and picking up a pellet P on the wafer stage 1 and transferring it to a bonding position. The wafer stage 1 rotates to align the pellet P which is picked up with the moving line, and then the suction nozzle 17 moves to the position of the pellet where the pellet P is picked up and transferred to the bonding position.

8. 发明专利

JPH1142585A WORKPIECE INVERTING MECHANISM 失效
公开(公告)号：JPH1142585A
公开(公告)日：1999-02-16
申请号：JP20269397
申请日：1997-07-29
申请人： NICHIDEN MACH LTD
发明人： MAKINO MAKOTO , MURAKAWA KAZUO
IPC分类号： B25J15/08 , B23Q7/00 , B65G47/14
摘要： PROBLEM TO BE SOLVED: To provide a high speed workpiece inverting mechanism. SOLUTION: A pawl structural unit 6a energized by a spring 12 in a direction closing a pawl 61a, 61b is connected to a pawl structural unit 6b by a link bar 7, the pawl structural unit 6a is rotated around a rotary shaft 5a provided in an upper surface of a stage 3, to open/close the pawl 61a, and a pawl structural unit 6b is rotated similarly around a rotary shaft 5b, to open/close the pawl 61b. The pawl structural unit 61a provided with a hit bar 63a is stopped in a prescribed stop position, to hit a stop pin 8 in a position just before rotation of the stage 3, and the stage 3 is rotated therefrom unit stopping, the pawl structural unit 6a is pressed to open the pawl 61a, 61b. Similarly when the stage 3 is rotated about 180 deg. in a reverse direction, a lever member 11 hits a stop pin 14 and presses the pawl structural unit 6a to open the pawl 61a, 61b.

9. 发明专利

JPH10329819A DEVICE AND METHOD FOR STRIPPING ADHESIVE TAPE 失效
公开(公告)号：JPH10329819A
公开(公告)日：1998-12-15
申请号：JP13954797
申请日：1997-05-29
申请人： NICHIDEN MACH LTD
发明人： UNNO AKIHITO
IPC分类号： B65B69/00
摘要： PROBLEM TO BE SOLVED: To certainly remove a piece of adhesive tape stuck to a chuck when the adhesive tape is stripped off, being held with the chuck, by a method wherein a spit is made to pierce through the adhesive tape held with the chuck and the chuck is opened under such a state and retreated upward. SOLUTION: As one end of a piece of adhesive tape 2 stuck to a work is held with a chuck 1 and stripped off and stops after being transferred to a specified position, a spit 3 is made by the operation of a cylinder 3a to penetrate through a hole 4a and pierces through the adhesive tape 2 at a split part 1a of the chuck 1. As the chuck 1 is opened under such a state, releasing the adhesive tape, and retreated upward, the adhesive tape 2 is stripped off from the chuck 1 as the adhesive tape is fixed to the spit 3. As the adhesive tape 2 arrives at a shielding plate 4 with the spit 3 moved backward, the adhesive tape 2 slips automatically out of the spit 3 and falls.

10. 发明专利

JPH10181853A WORK REVERSE MECHANISM 失效
公开(公告)号：JPH10181853A
公开(公告)日：1998-07-07
申请号：JP33942696
申请日：1996-12-19
申请人： NICHIDEN MACH LTD
发明人： MAKINO MAKOTO
IPC分类号： B65G47/86 , B65G47/248
摘要： PROBLEM TO BE SOLVED: To shorten the stopping period of a turntable, which is used in a transfer device for holding a work between its chucks arranged at isometric intervals around the turntable, during the reverse of the holding direction of the work. SOLUTION: A work reverse mechanism involves two reverse chucks 12 arranged in the symmetrical relation with respect to the center point C between stop positions P5 and P6 for a work held therebetween on a main turntable. In reversing a work, the reverse chuck 12 at the stop position P5 on a subsidiary turntable 11 first holds the work, and then turns by 180 degrees to transfer the work to the stop position P6 in synchronism with the turn of the chuck on the main turntable to the stop position P6. The reverse chucks 12 are provided with an angle correction mechanism which involves integrally a cam lever 13 adapted to freely turn relative to the subsidiary turntable 11 and a cam follower 15 pressed outward so as to be regulated by an angular cam face 17 for bringing the difference between both angular positions α and βof the cam levers 13 to the subsidiary turntable 11 at the stop positions P5 and P6 equal to the turning angle θ of the turntable.

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