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JP2014109530A Defect inspection device and defect inspection method 有权
标题翻译：缺陷检查装置和缺陷检查方法
公开(公告)号：JP2014109530A
公开(公告)日：2014-06-12
申请号：JP2012265062
申请日：2012-12-04
申请人： Yasunaga Corp , 株式会社安永
发明人： HIKITA TETSUYA , MURAKAMI RYOSUKE
IPC分类号： G01N21/956 , G01B11/02 , G01B11/30
摘要： PROBLEM TO BE SOLVED: To provide a device and method for defect inspection, which allow in-line total inspection to be made quickly to check for defects on objects under inspection.SOLUTION: A defect inspection device includes: image acquisition means 121 which acquires a two-dimensional information image and a three-dimensional information image of an object under inspection; three-dimensional inspection area specifying means 122 which adjusts the position of the two-dimensional information image using two-dimensional information produced from the two-dimensional information image acquired by the image acquisition means, and specifies a partial area for performing defect inspection using three-dimensional information from a whole area of the positioned two-dimensional information image; three-dimensional information producing means 123 which produces three-dimensional information just for the partial area specified by the three-dimensional inspection area specifying means from the three-dimensional information image acquired by the image acquisition means; and specified area inspection means which checks for defects on the object under inspection by comparing the three-dimensional information produced for the specified partial area and reference three-dimensional information representing a reference for the object under inspection to pass the inspection.
摘要翻译：要解决的问题：提供一种用于缺陷检查的装置和方法，其允许快速地进行在线全面检查以检查被检查物体的缺陷。解决方案：缺陷检查装置包括：图像获取装置121，其获取二维信息图像和被检查物体的三维信息图像; 三维检查区域指定装置122，其使用由图像获取装置获取的二维信息图像产生的二维信息来调整二维信息图像的位置，并且使用三个检查区域指定装置指定用于执行缺陷检查的部分区域定位二维信息图像的整个区域的三维信息; 三维信息产生装置123，用于根据由图像获取装置获取的三维信息图像，为三维检查区域指定装置指定的部分区域产生三维信息; 以及指定区域检查装置，通过比较为指定的部分区域生成的三维信息和表示被检查对象的参考的参考三维信息来检查检查对象的缺陷以通过检查。

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