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1. 发明专利

JP2002106563A DRIVING DEVICE 失效
公开(公告)号：JP2002106563A
公开(公告)日：2002-04-10
申请号：JP2000293266
申请日：2000-09-27
申请人： TOSHIBA CORP , EBARA CORP , NSK LTD
发明人： OKUMURA KATSUYA , SUGIHARA KAZUYOSHI , SOFUGAWA TAKUJI , AONO HIROSHI , SAJI NOBUHITO , NAKAMURA TAKESHI
IPC分类号： B65G49/00 , F16C32/06 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a driving device capable of maintaining cleanliness inside a process chamber and keeping a bearing at a low-load condition even if capacity of the process chamber is increased. SOLUTION: Free insertion of a cylindrical shaft 30 from the outside of the process chamber P leads to drive of a workpiece mounted on the end part of the window side through the outside of the process chamber P. In such cases, a shaft diameter of a cylindrical member 30 can be invariant even though the process chamber size is increased in accordance with work. Therefore, the length of a differential exhaust seal 50 opposing the peripheral surface is unchanged, whereby the force supported by a static pressure bearing part 72 can be suppressed to a low level.

2. 发明专利

JPH0861232A REGENERATION METHOD FOR CRYOPUMP AND DEVICE FOR THE SAME 失效
公开(公告)号：JPH0861232A
公开(公告)日：1996-03-08
申请号：JP22415394
申请日：1994-08-24
申请人： EBARA CORP
发明人： NOMICHI SHINJI , HAYAKAWA JUNICHI , AONO HIROSHI
IPC分类号： F04B37/08
摘要： PURPOSE: To regenerate a cryo-panel in a short time by abruptly cooling the surface of the cryo-panel while keeping the temperature of the cryo-panel sur face at the value of gas discharging, after completing the gas discharge from the cryo-panel surface, and abruptly cooling a second cryo-panel surface to a specified value. CONSTITUTION: When gas discharge from surfaces of first and second cryo- panels 7, 8 is completed, that is, regeneration is completed, a regeneration valve 14 is opened while temperature of the cryo panels 7, 8 are kept at each preset value (the temperature at the time of discharging gas). A turbo molecule pump 11 and a roughing vacuum pump 12 are operated for reducing an inner pressure of a pump casing 2 to 1/10 Pa or lower. Afterward, a refrigenerator 6 is operated for cooling the surface of the first cryo-panel to 80K or lower, and cooling the surface of the second cryo-panel 8 to 20K or lower. Rotational speed of an oxpander motor 9 is set at maximum for abruptly cooling, at this time.

3. 发明专利

JP2007203290A Method for treating exhaust gas 审中-公开
标题翻译：处理排气的方法
公开(公告)号：JP2007203290A
公开(公告)日：2007-08-16
申请号：JP2007017535
申请日：2007-01-29
申请人： Ebara Corp , 株式会社荏原製作所
发明人： SHINOHARA TOYOJI , MORI YOICHI , SUZUKI YASUHIKO , AONO HIROSHI , SHIRAO YUJI
IPC分类号： B01D53/70 , B01D53/62 , B01D53/68 , B01D53/86
CPC分类号： Y02A50/2341
摘要： PROBLEM TO BE SOLVED: To provide a method for treating an exhaust gas which enables the simultaneous and efficient treatment of a fluorine-containing compound and CO at a low running cost, applies a low load onto a device material, can reduce a device cost and never emits hazardous gases. SOLUTION: The method for treating an exhaust gas including a fluorine-containing compound and CO has a pre-treatment section for removing a powdery component, a water-soluble component or a hydrolytic component from the exhaust gas, a heating oxidative decomposing section for performing heating oxidative decomposition of the treated exhaust gas which has passed through a mist separator 26, and a post-treatment section for post-treating the treated exhaust gas to be non-hazardous by removing an acid gas which has been produced by the heating oxidative decomposition. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供能够以低运行成本同时有效地处理含氟化合物和CO的排气处理方法，对装置材料施加低负荷，可以减少设备成本，并且不会排放有害气体。解决方案：用于处理包含含氟化合物和CO的废气的方法具有用于从废气中除去粉末组分，水溶性组分或水解组分的预处理部分，加热氧化分解用于对通过雾化分离器26的处理过的废气进行加热氧化分解的部分;以及后处理部分，用于通过除去已经由雾分离器26产生的酸性气体来处理未处理的废气，加热氧化分解。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JPH0893643A CRYOPUMP 失效
公开(公告)号：JPH0893643A
公开(公告)日：1996-04-09
申请号：JP25867094
申请日：1994-09-27
申请人： EBARA CORP
发明人： NOMICHI SHINJI , HAYAKAWA JUNICHI , AONO HIROSHI
IPC分类号： F04B39/06 , F04B37/08
摘要： PURPOSE: To provide a cryopump which can stably retain its exhaust speed by simple construction. CONSTITUTION: In a cryopump which is provided with first/second stage cryopanels 13, 17 to condense and/or adsorb gas during pump operation and a refrigerating machine part 10 which cools down the first/second stage cryopanels 13, 17 and which is a cooling part to thermally insulate and expand ordinary temperature high pressure working gas from a compressor by an expander 18 driven by an expander motor 40 so as to generate extremoly low temperature, a temperature sensor 35 to detect the surface temperature of the first stage cryopanel 13 is provided. And also, a control part 50 which controls the rotational speed of the expander motor 40 within a predetermined range so that the surface temperature of the first stage cryopanel 13 can be retained within the predetermined range by the output from the temperature sensor 35, is provided.

5. 发明专利

JP2004223302A Exhaust gas treatment method and treatment apparatus therefor 有权
标题翻译：排气处理方法及其处理装置
公开(公告)号：JP2004223302A
公开(公告)日：2004-08-12
申请号：JP2002352712
申请日：2002-12-04
申请人： Ebara Corp , 株式会社荏原製作所
发明人： SHINOHARA TOYOJI , MORI YOICHI , SUZUKI YASUHIKO , AONO HIROSHI , SHIRAO YUJI
IPC分类号： B01D53/70 , B01D47/06 , B01D53/62 , B01D53/68 , B01D53/77 , B01D53/86
CPC分类号： Y02A50/2341 , Y02C20/30
摘要： PROBLEM TO BE SOLVED: To provide an exhaust gas treatment method capable of efficiently treating a fluorine-containing compound and CO at the same time, reduced in running cost, low in the load to an apparatus material, capable of reducing an apparatus cost and discharging no harmful gas. SOLUTION: At least one of a powder component, a water soluble component and a hydrolizable component contained in an exhaust gas containing at least either of the fluorine-containing compound or CO is removed and, after O 2 and water (H 2 O) are added to the exhaust gas, the exhaust gas containing O 2 and water is heated to decompose or oxidize at least one of the fluorine-containing compound and CO. Subsequently, the acidic gas, which is produced when the fluorine-containing compound is decomposed, is removed from the exhaust gas subjected to decomposition or oxidation treatment. The heating of the exhaust gas containing O 2 and water is preferably performed at 700-900°C. COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：要解决的问题：为了提供能够同时有效地处理含氟化合物和CO的排气处理方法，降低运行成本，降低装置材料的负荷，能够减少装置成本和排放无有害气体。解决方案：除去含有至少任一种含氟化合物或CO的废气中所含的粉末成分，水溶性成分和可水解成分中的至少一种，在O 2之后， SB>和水（H 2 O）加入到废气中，将含有O 2 SBB的废气和水加热分解或氧化至少一种氟含氟化合物和CO。随后，当分解或氧化处理的废气中除去在含氟化合物分解时产生的酸性气体。含有O 2 SBB的废气和水的加热优选在700-900℃下进行。版权所有（C）2004，JPO＆NCIPI

6. 发明专利

JP2006075832A Treating method and device of exhaust gas 有权
标题翻译：废气处理方法及装置
公开(公告)号：JP2006075832A
公开(公告)日：2006-03-23
申请号：JP2005275283
申请日：2005-09-22
申请人： Ebara Corp , 株式会社荏原製作所
发明人： SHINOHARA TOYOJI , MORI YOICHI , SUZUKI YASUHIKO , AONO HIROSHI , SHIRAO YUJI
IPC分类号： B01D53/70 , B01D53/62 , B01D53/86
摘要： PROBLEM TO BE SOLVED: To provide a treating method and a device of an exhaust gas which enable the simultaneous and efficient treatment of a fluorine-containing compound and CO at a low running cost, applies a low load onto a device material, can reduce a device cost and never emits hazardous gases. SOLUTION: A thermal oxidative decomposition treatment is performed on the exhaust gases by adding O 2 and water (H 2 O) thereto and heating the solution, and a decomposition treatment is performed on the fluorine-containing compound which can not be treated completely by the thermal oxidative decomposition treatment with a catalyzing reaction, then, an acid gas produced when the fluorine-containing compound is decomposed is removed from the exhaust gases on which the decomposition treatment is performed. The thermal oxidative decomposition treatment is performed to decompose the fluorine-containing compound of 4C or more, and the catalyzing treatment is performed to decompose the fluorine-containing compound of 3C or less. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：为了提供能够以低运行成本同时有效地处理含氟化合物和CO的废气的处理方法和装置，对装置材料施加低负荷，可以降低设备成本，并且不会排放有害气体。解决方案：通过向其中加入O 2 和水（H 2 O）对废气进行热氧化分解处理并加热溶液，并分解对通过催化反应的热氧化分解处理不能完全处理的含氟化合物进行处理，然后从分解的含氟化合物的废气中除去产生的含氟化合物分解的酸性气体进行治疗。进行热氧化分解处理以使含有4C以上的含氟化合物分解，进行催化处理以使含氟化合物分解为3C以下。版权所有（C）2006，JPO＆NCIPI

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