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1. 发明专利

JP2005036253A Silicon-aluminum composite metal, and its plated body 审中-公开
标题翻译：硅铝复合金属及其制品
公开(公告)号：JP2005036253A
公开(公告)日：2005-02-10
申请号：JP2003197776
申请日：2003-07-16
申请人： Celanx Kk , Taiheiyo Cement Corp , セランクス株式会社 , 太平洋セメント株式会社
发明人： HIGUCHI TAKESHI , SATO TATSUZO , ODANO CHOKUSUI , SHIMOJIMA HIROMASA
IPC分类号： B22D19/00 , B22D23/00 , C22C1/10 , C23C30/00
摘要： PROBLEM TO BE SOLVED: To provide a silicon-aluminum composite metal particularly having high Young's modulus and low linear thermal expansion coefficient and being machinable as is the case with a metal and also to provide its plated body and further to impart uniform smoothness equal to that of a plated surface of a plated metal to the above plated body having a plated machined surface.
SOLUTION: The silicon-aluminum composite metal is constituted of silicon and aluminum or an aluminum alloy and has ≥100 GPa Young's modulus and ≤10×10
-6 /°C linear thermal expansion coefficient at a temperature between room temperature and 400°C. Further, the silicon-aluminum composite metal is obtained by infiltrating, under no pressure, molten aluminum or an aluminum alloy into a filled body or molded body of 50 to 70% volume filling ratio of silicon powder at 700 to 1,000°C in a nitrogen atmosphere containing magnesium vapor.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供特别是具有高杨氏模量和低线性热膨胀系数的硅铝复合金属，并且与金属的情况一样可加工，并且还提供其镀层体并进一步赋予均匀的光滑度与电镀金属的电镀表面相同，具有电镀加工表面的上述电镀体。解决方案：硅铝复合金属由硅和铝或铝合金构成，≥100GPa杨氏模量和≤10×10 -6 /℃线性热膨胀系数室温至400℃之间的温度。此外，硅铝复合金属是通过在无氮压力下将熔融铝或铝合金浸入填充体或成型体中，在氮气中在700〜1000℃下填充体积为50〜70％体积填充率的硅，含有镁蒸汽的气氛。版权所有（C）2005，JPO＆NCIPI

2. 发明专利

JP2005029814A Substrate holder 审中-公开
标题翻译：基板支架
公开(公告)号：JP2005029814A
公开(公告)日：2005-02-03
申请号：JP2003193344
申请日：2003-07-08
申请人： Celanx Kk , Taiheiyo Cement Corp , セランクス株式会社 , 太平洋セメント株式会社
发明人： ODANO CHOKUSUI , HARADA TAMOTSU , SHIMOJIMA HIROMASA
IPC分类号： C23C14/50 , C23C16/458 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a substrate holder which extends the interval of cleaning the substrate holder and saves time and manpower for cleaning, though the substrate holder is washed every time after a film-forming operation has been repeated several times, because particle dust having exfoliated from it causes a defective product. SOLUTION: The substrate holder for holding a substrate in a film-forming apparatus has a recess formed thereon so as to bury/hold the substrate, and has a plurality of grooves formed on the faces out of those to be film-formed and other than the recess on the substrate holder. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种衬底保持器，其延长了清洁衬底保持器的间隔，并且节省了用于清洁的时间和人力，尽管在成膜操作重复多次之后每次洗涤衬底保持器，因为从其剥离的颗粒尘埃会导致缺陷产物。解决方案：用于在薄膜形成装置中保持基板的基板保持器具有形成在其上的凹部，以便掩埋/保持基板，并且具有形成在要成膜的那些的两个表面上的多个凹槽而不是衬底保持器上的凹部。版权所有（C）2005，JPO＆NCIPI

3. 发明专利

JP2004087642A Pin-type chuck and method for manufacturing the same 审中-公开
公开(公告)号：JP2004087642A
公开(公告)日：2004-03-18
申请号：JP2002244555
申请日：2002-08-26
申请人： Celanx Kk , Taiheiyo Cement Corp , セランクス株式会社 , 太平洋セメント株式会社
发明人： ODANO CHOKUSUI , SHIMOJIMA HIROMASA , HARADA TAMOTSU , HIGUCHI TAKESHI
IPC分类号： C04B41/87 , C23C4/06 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a technique capable of manufacturing a large-area pin-type chuck whose reflectivity is low and whose pin is patterned precisely without requiring a complicated manufacturing process. SOLUTION: A ceramics layer of a low reflectivity is formed by flame spraying on a base consisting of metal-ceramic compound material. After sealing processing of the ceramic layer, a pin and a dam are blast processed at the ceramic layer to manufacture the large-area pin-type chuck. Thus, the large-area pin-type chuck whose reflectivity is low and whose pin part is patterned precisely without requiring the complicated manufacturing process is obtained. COPYRIGHT: (C)2004,JPO

4. 发明专利

JP2002285366A METHOD FOR CLEANING METAL-CERAMICS COMPOSITE MATERIAL 失效
公开(公告)号：JP2002285366A
公开(公告)日：2002-10-03
申请号：JP2001083926
申请日：2001-03-23
申请人： TAIHEIYO CEMENT CORP , CELANX KK
发明人： SHIMOJIMA HIROMASA , ODANO CHOKUSUI
IPC分类号： B08B3/12 , C23G1/24 , C23G5/024 , C23G5/032
摘要： PROBLEM TO BE SOLVED: To provide a method for ultrasonic cleaning of a metal-ceramics composite material by which a discolored film is not formed on the surface of the composite material, in the cleaning. SOLUTION: A metal-ceramics composite material consisting of ceramics powder or ceramics fiber as a reinforcing material and aluminum or an aluminum alloy as a matrix is subjected to ultrasonic cleaning in a solvent, which does not contain moisture, or in water of

5. 发明专利

JP2002275559A METHOD FOR MANUFACTURING METAL CERAMIC COMPOSITE MATERIAL 失效
公开(公告)号：JP2002275559A
公开(公告)日：2002-09-25
申请号：JP2001080480
申请日：2001-03-21
申请人： TAIHEIYO CEMENT CORP , CELANX KK
发明人： SHIMOJIMA HIROMASA , ODANO CHOKUSUI , HIGUCHI TAKESHI
IPC分类号： B22D19/00 , B22D19/14 , B22D21/04 , B22D23/00 , C22C1/10 , C22C47/06 , C22C49/06
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a metal-ceramic composite material by which the composite material can be continuously manufactured. SOLUTION: A preform made of ceramic powder or ceramic fiber is inserted and held in a nitrogen atmosphere filled with Mg vapor at from 500 deg.C to 700 deg.C and then the preform is immersed in aluminum or an aluminum alloy melted at from 700 deg.C to 900 deg.C in a non-pressurized nitrogen atmosphere to obtain the metal-ceramic composite material.

6. 发明专利

JP2002235129A METHOD FOR PRODUCING METAL - CERAMICS COMPOSITE MATERIAL HAVING REDUCED GAS RELEASABILTIY 失效
公开(公告)号：JP2002235129A
公开(公告)日：2002-08-23
申请号：JP2001031822
申请日：2001-02-08
申请人： TAIHEIYO CEMENT CORP , CELANX KK
发明人： SHIMOJIMA HIROMASA , ODANO CHOKUSUI
IPC分类号： C22C1/10 , C22C21/00 , C22C47/06 , C22C101/02
摘要： PROBLEM TO BE SOLVED: To provide a method for producing a metal-ceramics composite material, by which the composite material having reduced gas releasability can be obtained. SOLUTION: The method for producing the metal - ceramics composite material having reduced gas releasability comprises forming a preform by using ceramics powder or a ceramic fiber subjected to heat treatment at 500 to 1,500 deg.C under the atmosphere or a nitrogen atmosphere, then infiltrating aluminum or a aluminum alloy melted in an electric furnace into the preform at 700 to 900 deg.C under a nitrogen atmosphere without pressurizing the aluminum or the aluminum alloy and cooling the infiltrated material to form a composite material, and after that, heat treating the cooled composite material at 300 to 600 deg.C under vacuum.

7. 发明专利

JP2002235127A METHOD FOR PRODUCING METAL - CERAMICS COMPOSITE MATERIAL INCORPORATING HEATER, OR THE LIKE 失效
公开(公告)号：JP2002235127A
公开(公告)日：2002-08-23
申请号：JP2001031009
申请日：2001-02-07
申请人： TAIHEIYO CEMENT CORP , CELANX KK
发明人： HIGUCHI TAKESHI , SHIMOJIMA HIROMASA , ODANO CHOKUSUI , HARADA TAMOTSU
IPC分类号： H05B3/10 , C04B41/51 , C04B41/88 , C22C1/10 , C22C47/06 , C22C49/06 , C22C49/14 , C22C101/04 , C22C101/14 , C22C101/16 , H05B3/18
摘要： PROBLEM TO BE SOLVED: To provide a method for producing a metal - ceramics composite material incorporating a heater, or the like, which is produced at a low cost and free from leakage of water. SOLUTION: The method for producing the metal - ceramics composite material incorporating a heater, or the like, comprises forming a preform in which a stainless steel heater, or the like, is buried by using ceramics powder or a ceramics fiber being a reinforcing material, and then infiltrating aluminum or an aluminum alloy melted under a nitrogen atmosphere into the preform without pressurizing the aluminum or the aluminum alloy.

8. 发明专利

JP2002212653A METHOD FOR PRODUCING METAL-CERAMICS COMPOSITE MATERIAL 失效
公开(公告)号：JP2002212653A
公开(公告)日：2002-07-31
申请号：JP2001004079
申请日：2001-01-11
申请人： TAIHEIYO CEMENT CORP , CELANX KK
发明人： HARADA TAMOTSU , SHIMOJIMA HIROMASA , ODANO CHOKUSUI , HIGUCHI TAKESHI
IPC分类号： B22D19/00 , C04B41/52 , C04B41/88 , C22C1/10 , C22C47/06
摘要： PROBLEM TO BE SOLVED: To provide a method for producing a metal-ceramics composite material by which the exudation of aluminum or its alloy is suppressed, and further, a barrier material is not left as dust on the surface. SOLUTION: In the method for producing the metal-ceramic composite material, a preform is formed of ceramics powder or ceramics fiber as a reinforcing material. The surface of the preform is coated with slurry consisting of low melting point oxide powder, and is dried. Thereafter, melted aluminum or its alloy as a matrix is infiltrated into the preform under non-pressurization.

9. 发明专利

JP2002164421A SUBSTRATE HOLDING MEMBER 失效
公开(公告)号：JP2002164421A
公开(公告)日：2002-06-07
申请号：JP2000360923
申请日：2000-11-28
申请人： TAIHEIYO CEMENT CORP , CELANX KK
发明人： TSUTO HIROYUKI , ODANO CHOKUSUI , SHIMOJIMA HIROMASA
IPC分类号： B65G49/06 , B22D19/00 , B65G49/07 , C04B41/88 , C22C1/10 , C22C49/06 , C22C101/14 , H01L21/677 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a substrate holding member having high rigidity in comparison with metal and does not cause a heat distortion to a substrate, and does not break like ceramic when impact is given. SOLUTION: A substrate holding member is composed of metal-ceramics composite material having a SiC powder content of 60-80 vol.% as a reinforcement and aluminum alloy of an Al-Si-Mg system in a matrix.

10. 发明专利

JP2004225145A Method for manufacturing ceramic-metal matrix composite 审中-公开
公开(公告)号：JP2004225145A
公开(公告)日：2004-08-12
申请号：JP2003017219
申请日：2003-01-27
申请人： Celanx Kk , Taiheiyo Cement Corp , セランクス株式会社 , 太平洋セメント株式会社
发明人： HARADA TAMOTSU , HAYASHI MUTSUO , SHIMOJIMA HIROMASA , ODANO CHOKUSUI , HIGUCHI TAKESHI
IPC分类号： B22D19/00 , B22D19/14 , C22C1/10 , C22C47/04
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic-metal matrix composite which contains almost 50 vol.% or more of ceramics as reinforcements and is easily recycled, in spite of being manufactured by a casting method.
SOLUTION: The ceramic-metal matrix composite comprises aluminum or an aluminum alloy as a matrix, and grains of general-purpose ceramics such as alumina, silicon carbide, zirconia and silicon nitride, which have the surface coated with metal or glass in order to improve the wettability, and have a particle size of 0.1 mm or larger but 30 mm or smaller, as the ceramic reinforcement. The manufacturing method comprises filling the ceramic grains into a sand mold, and then pouring aluminum or the aluminum alloy into the mold with a conventionally used casting method.
COPYRIGHT: (C)2004,JPO&NCIPI

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