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1. 发明专利

JP2004245644A Position detection device 有权
公开(公告)号：JP2004245644A
公开(公告)日：2004-09-02
申请号：JP2003033904
申请日：2003-02-12
申请人： Sony Precision Technology Inc , ソニー・プレシジョン・テクノロジー株式会社
发明人： ONO MITSURU , OKANO MICHIO , KAWAMOTO AKINORI , NAKAMURA KUNICHI , KUSUMI MASAAKI
IPC分类号： G01D5/245
摘要： PROBLEM TO BE SOLVED: To provide a position detection sensor capable of protecting an MR sensor against mixed foreign matter by setting a distance between a holding part holding the MR sensor and a scale based on a distance between the MR sensor and the scale and the film thickness of the scale, forming a hard film having external impact resistance on the surface of the MR sensor, and setting the hardness of the surfaces of the holding part and the scale to specified levels. SOLUTION: This position detection device comprises the scale on which position signals are recorded at specified pitches, a detector disposed at a position opposed to and movable relative to the scale and detecting the position signals from the scale, and the holding part holding the detector so that the detector can be moved relative to each other at a specified distance apart from the surface of the scale. A distance between the surfaces of the detector and the scale and the film thickness of the scale are equal to a distance between the surfaces of the holding part and the scale or longer, and the scale is formed of a material with a hardness lower than that of the holding part. COPYRIGHT: (C)2004,JPO&NCIPI

2. 发明专利

JPH0968407A DISPLACEMENT DETECTOR 失效
公开(公告)号：JPH0968407A
公开(公告)日：1997-03-11
申请号：JP22372895
申请日：1995-08-31
申请人： SONY PRECISION TECHNOLOGY INC
发明人： NABESHIMA NOBUO , KAWAMOTO AKINORI
IPC分类号： G01B11/00
摘要： PROBLEM TO BE SOLVED: To detect the displacement of a surface to be measured non-contact at a high accuracy regardless of the size thereof by measuring the position of an objective lens when a focus error reaches a specified value. SOLUTION: An objective lens 9 is placed at a starting position where the distance of the lens 9 to a surface 10 to be measured is so much larger than the focal length thereof and is lowered gradually to the surface 10 to be measured by driving 21 a mobile coil 17. In this process, the position at which a value of a focus error signal E of a photodetector 7 becomes 0 is defined as focusing position and an arithmetic circuit 24 inputs a focusing detection signal of a signal processing circuit 23 to store 25 a position signal (graduation 13) of the lens 9 obtained by the signal processing circuit 22 as reference signal. The lens is further lowered and the position thereof at which the value of the signal E reaches 0 again is defined as arrival position. Each time the surface 10 to be measured is moved to measure, the lens 9 is moved from the starting position to the arrival position and the circuit 24 calculates a difference between the focusing position signal of the lens 9 and a reference position, namely, a displacement of the measuring surface 10. This enables detection of the displacement regardless of the size of the displacement of the surface to be measured.

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