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1. 发明专利

JP2010271238A High-speed x-ray shutter apparatus 审中-公开
标题翻译：高速X射线快门装置
公开(公告)号：JP2010271238A
公开(公告)日：2010-12-02
申请号：JP2009124385
申请日：2009-05-22
申请人： Shimadzu Corp , 株式会社島津製作所
发明人： MITSUHARA MASAYUKI
IPC分类号： G21K1/04
摘要： PROBLEM TO BE SOLVED: To provide a high-speed X-ray shutter apparatus that markedly shortens the time required, from the start of block of the X-ray until finish of block, even if the X-ray is irradiated through a comparatively large X-ray emission port.
SOLUTION: The apparatus has a constitution, wherein a shutter plate 231 for closing/opening the X-ray emission port 22a of an X-ray generating apparatus 21 is fixed to the tip part of a piston rod 232a of a long cylinder 232, and the piston rod 232a is in a positioned state to a retreated end in the open state of the X-ray emission port 22a, and the long cylinder is driven from the state; and after passing through a prescribed approach section, the shutter plate 231 closes the X-ray emission port 22a near an advanced end of the piston rod 232a. After the start of driving of the long cylinder 232, the speed of the piston rod 232a (shutter plate 231) is gradually accelerated from 0, and closing of the X-ray emission port 22a is initiated, when a high speed is reached, to thereby shorten the time required, from the start of closing until the finish of closing.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种高速X射线快门装置，其从X射线的块开始直到完成块显着缩短所需的时间，即使X射线被照射通过一个比较大的X射线发射口。解决方案：该装置具有一种结构，其中用于关闭/打开X射线产生装置21的X射线发射端口22a的快门板231固定到长圆柱体的活塞杆232a的末端部分 232，并且活塞杆232a处于X射线排出口22a的打开状态下的后退端的定位状态，长筒从该状态驱动; 在通过规定的接近部分之后，挡板231封闭靠近活塞杆232a的前端的X射线排出口22a。在开始驱动长圆柱体232之后，活塞杆232a（活门板231）的速度从0逐渐加速，并且当达到高速时X射线发射端口22a的闭合开始到从而缩短从关闭开始到关闭完成所需的时间。版权所有（C）2011，JPO＆INPIT

2. 发明专利

JP2009115726A X-ray fluoroscopic system 审中-公开
标题翻译： X射线荧光系统
公开(公告)号：JP2009115726A
公开(公告)日：2009-05-28
申请号：JP2007291545
申请日：2007-11-09
申请人： Shimadzu Corp , 株式会社島津製作所
发明人： MITSUHARA MASAYUKI
IPC分类号： G01N23/04
摘要： PROBLEM TO BE SOLVED: To provide an X-ray fluoroscopic system that speeds up a system operation for variation in fluoroscopic enlargement ratio and slanting fluoroscopy comparing with a conventional art, and does not cause a shortage of X-ray light quantity by a slanting fluoroscopy angle.
SOLUTION: Two elements of an X-ray generating device 1, an X-ray detector 2, and a table 3 are moved at least in the mutually approach/separation direction by a driving mechanism having three or more straight drive type actuators (42a or the like) arranged around each of them and bending/stretching mechanisms (41a or the like) disposed at its both ends. The straight drive type actuators (42a or the like) of each element are controlled so that they are operated in a coordinated manner to tilt it at any moving position.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：与现有技术相比，提供一种X射线荧光透视系统，其加速荧光检查放大率的变化和倾斜荧光透视的系统操作，并且不会由于X射线光量的不足而导致X射线光量的不足倾斜的透视角度。解决方案：通过具有三个或更多直线驱动型致动器的驱动机构，至少在相互接近/分离方向上移动X射线产生装置1，X射线检测器2和台3的两个元件（42a或类似物）以及设置在其两端的弯曲/拉伸机构（41a等）。每个元件的直线驱动型致动器（42a等）被控制成使得它们以协调的方式操作以在任何移动位置倾斜。版权所有（C）2009，JPO＆INPIT

3. 发明专利

JP2010017753A Small heating furnace for simulation test of reflow furnace 审中-公开
标题翻译：小型加热炉，用于仿真炉的模拟试验
公开(公告)号：JP2010017753A
公开(公告)日：2010-01-28
申请号：JP2008182202
申请日：2008-07-14
申请人： Shimadzu Corp , 株式会社島津製作所
发明人： MITSUHARA MASAYUKI
IPC分类号： B23K1/008 , B23K1/00 , B23K3/04 , B23K31/02 , F27B17/02 , H05K3/34
摘要： PROBLEM TO BE SOLVED: To provide a small heating furnace for the simulation test of a reflow furnace, by which movement of a lead-free solder in a reflow furnace is observed executing an accurate simulation through X-ray radioscopy under a temperature rise and fall equal to those in a reflow furnace.
SOLUTION: As the furnace body of the small heating furnace, an openable and closable housing 10 is used, in which a thin flat space is composed of a material having high X-ray transmissivity. Further, small-diameter heaters 2a, 2b are uniformly set in the housing 10 along the expanding direction of the flat space, and Peltier elements 3a, 3b for cooling the space are also provided in the housing 10. These small-diameter heaters 2a, 2b and Peltier elements 3a, 3b are controllably driven so that the temperature in the housing 10 agrees with the temperature rising/falling curve that is predetermined. Thus, high temperature-responsiveness and temperature-uniformity in the small heating furnace are realized, so that, while realizing the temperature change equal to that of a solder in a reflow furnace, the movement of a solder in the small heating furnace is observed using an X-ray radioscopy device.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于回流炉模拟试验的小型加热炉，通过该方法可以观察到回流炉中的无铅焊料的移动，在温度下通过X射线透视法进行精确的模拟上升和下降等于回流炉中的上升和下降。解决方案：作为小型加热炉的炉体，使用可开闭的壳体10，其中薄的平坦空间由具有高X射线透射率的材料构成。此外，小直径加热器2a，2b沿着平坦空间的扩展方向均匀地设置在壳体10中，并且用于冷却空间的珀尔帖元件3a，3b也设置在壳体10中。这些小直径加热器2a， 2b和珀耳帖元件3a，3b被可控地驱动，使得壳体10中的温度与预定的温度上升/下降曲线一致。因此，实现了小型加热炉中的高温反应性和温度均匀性，使得在回流炉中实现与焊料的温度变化相同的温度变化时，可以观察到小型加热炉中的焊料的移动， X射线透视装置。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2007170860A X-ray fluoroscopic system 审中-公开
标题翻译： X射线荧光系统
公开(公告)号：JP2007170860A
公开(公告)日：2007-07-05
申请号：JP2005365322
申请日：2005-12-19
申请人： Shimadzu Corp , 株式会社島津製作所
发明人： MITSUHARA MASAYUKI
IPC分类号： G01N23/04
摘要： PROBLEM TO BE SOLVED: To provide an X-ray fluoroscopic system with a detector tilting mechanism, having a simple low-cost constitution and being capable of developing similar functions as those of conventional detector tilting mechanisms that use an arcuate guide.
SOLUTION: A tilting mechanism 4 for tilting an X-ray detector 2 is constituted so as to support a tilting body 43 to be made revolvable about the axis A1 orthogonal to an X-ray optical axis L, with respect to a support member 41 and the base-end part of a first linear driving type actuator 44 is supported on the support member 41 so as to be revolvable about the axis A2 parallel to the axis A1 while a tilting body 43 is locked with the leading end part extending and contracting, with respect to the base end part of the first linear driving type actuator 44, and the tilting body 43 is tilted by the driving of the first linear driving type actuator 44. A second linear driving type actuator 45, for moving the X-ray detector 2 on the tilting body 43, is provided to tilting body 43 to move the X-ray detector 2 on the tilting body 43, corresponding to the tilting angle of the tilting body 43 so as to hold the X-ray detector 2 in a state of being turned to the X-ray focus 1a at all times.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供具有检测器倾斜机构的X射线荧光透视系统，其具有简单的低成本构造并且能够发展与使用弓形引导件的常规检测器倾斜机构类似的功能。解决方案：用于倾斜X射线检测器2的倾斜机构4被构造成支撑相对于支撑件支撑相对于X射线光轴L正交的轴线A1可旋转的倾斜体43 构件41和第一线性驱动型致动器44的基端部被支撑在支撑构件41上，使得能够围绕平行于轴线A1的轴线A2旋转，同时倾斜体43被锁定，前端部延伸并且相对于第一线性驱动型致动器44的基端部收缩，并且倾斜体43通过第一线性驱动型致动器44的驱动而倾斜。第二线性驱动型致动器45，用于移动X 倾斜体43上的射线检测器2设置在倾斜体43上，以使倾斜体43上的X射线检测器2对应于倾斜体43的倾斜角度移动，以便保持X射线检测器2 处于一直处于X射线焦点1a的状态。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2005150054A X-ray device for animal irradiation 审中-公开
标题翻译：用于动物辐射的X射线装置
公开(公告)号：JP2005150054A
公开(公告)日：2005-06-09
申请号：JP2003390158
申请日：2003-11-20
申请人： Shimadzu Corp , 株式会社島津製作所
发明人： MITSUHARA MASAYUKI , DOI YOSHIKATSU
IPC分类号： A01K67/00 , G21K5/00 , G21K5/02 , H05G1/44
摘要： PROBLEM TO BE SOLVED: To provide an X-ray device in which a prescribed dose of X-ray can be irradiated on a desired position of an animal that is the object of irradiation. SOLUTION: Arranging a shutter device 3 between a rotation table 6 for mounting the irradiated object and an X-ray tube ball 1, and before irradiating the X-ray on the irradiated object, the dosage datagram per unit time which is obtained by arranging a dosimeter probe P at a prescribed position of the rotation table 6, irradiating the X-ray under a prescribed condition, and measuring, is memorized in a memory means 10, and when the irradiated object is rotated and placed on the table 6 and the X-ray is irradiated on it under the same condition, because the X-ray dose irradiated on this irradiated object is estimated and calculated using the dosage datagram memorized in the memory means 10 and a shutter device 3 is automatically closed at a time point when the dose reaches the prescribed integrated dose, it becomes possible to irradiate the prescribed dose of the X-ray on the irradiated object accurately without being affected by a heel effect or the like. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种X射线装置，其中可以在作为照射对象的动物的期望位置照射规定剂量的X射线。解决方案：在用于安装被照射物体的旋转台6和X射线管球1之间并且在对照射物体照射X射线之前，将快门装置3排列成所获得的每单位时间的剂量数据报通过将剂量计探针P配置在旋转台6的指定位置，在规定条件下照射X射线，测量被存储在存储装置10中，并且当被照射物体旋转并放置在台6上时并且在相同条件下将X射线照射在其上，因为使用存储在存储装置10中的剂量数据报来估计并计算照射在该照射物体上的X射线剂量，并且快门装置3一次自动关闭当剂量达到规定的积分剂量时，可以准确地照射被照射物体上的规定剂量的X射线，而不受脚后跟等的影响。版权所有（C）2005，JPO＆NCIPI

6. 发明专利

JP2005024506A X-ray fluoroscope for precise measurement 有权
标题翻译：用于精密测量的X射线荧光
公开(公告)号：JP2005024506A
公开(公告)日：2005-01-27
申请号：JP2003270746
申请日：2003-07-03
申请人： Shimadzu Corp , 株式会社島津製作所
发明人： MITSUHARA MASAYUKI
IPC分类号： G01N23/04
摘要： PROBLEM TO BE SOLVED: To provide an X-ray fluoroscope which measures actual dimensions with high precision on a screen, even for an area of interest, within an object of fluoroscopy, to which the distance from the surface of a sample table is unknown, after performing spatial calibration using a reference sample. SOLUTION: When performing spatial calibration, the X-ray fluoroscope stores fluoroscopic magnifying power M together with a spatial calibration value C. When observing an arbitrary area of interest V within the object of fluoroscopy W, the X-ray fluoroscope precisely calculates the fluoroscopic magnifying power m of the area of interest V by calculating the height h above the surface of the sample table 2, updates the spatial calibration value based on the ratio between M and m, and measures actual dimensions between arbitrary two points on the screen by using the spatial calibration value, regardless of a change in fluoroscopic magnifying power. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种X射线荧光透镜，其在荧光透视的对象内甚至对于感兴趣的区域在屏幕上高精度地测量实际尺寸，其距离样品台的表面的距离在使用参考样品进行空间校准后，未知。
解决方案：当执行空间校准时，X射线荧光镜将荧光检查放大倍数M与空间校准值C一起存储。当观察荧光检查对象W内的任意感兴趣区域V时，X射线荧光镜精确计算通过计算样品台2的表面上方的高度h，感兴趣区域V的荧光检查放大倍率m基于M和m之间的比率来更新空间校准值，并测量屏幕上任意两点之间的实际尺寸通过使用空间校准值，而不考虑荧光检查放大倍率的变化。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JP2004214130A Device for uniformly irradiating x-ray 审中-公开
公开(公告)号：JP2004214130A
公开(公告)日：2004-07-29
申请号：JP2003002014
申请日：2003-01-08
申请人： Shimadzu Corp , 株式会社島津製作所
发明人： MITSUHARA MASAYUKI
IPC分类号： G21K3/00 , G21K5/02 , H01J35/16
摘要： PROBLEM TO BE SOLVED: To provide a device for uniformly irradiating X-ray, allowing X-ray spatial dose distribution to be uniform across a wide range.
SOLUTION: A metal filter 2 is formed in a manner that the thickness is increased where X-ray dose is higher, according to the result of X-ray dose distribution measurement provided by an irradiation outlet 13 of a X-ray tube 1. The X-ray from the irradiating outlet 13 is passed through the metal filter 2 to outside, which cancels dose distribution based on a heel effect, to provide X-ray having uniform dose over a wide rage.
COPYRIGHT: (C)2004,JPO&NCIPI

8. 发明专利

JP2004170226A X-ray fluoroscopic apparatus for wafer inspection 有权
公开(公告)号：JP2004170226A
公开(公告)日：2004-06-17
申请号：JP2002336024
申请日：2002-11-20
申请人： Shimadzu Corp , 株式会社島津製作所
发明人： MITSUHARA MASAYUKI
IPC分类号： G01N23/04 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To automatically inspect a large number of fine soldering bumps or the like formed on a semiconductor wafer.
SOLUTION: A kind of the wafer W is automatically recognized based on X-ray fluoroscopic information of the semiconductor wafer W conveyed on a sample table 3, a map of a position to be inspected such as the each semiconductor bump is automatically prepared based on the same fluoroscopic information, and the sample table 3 is automatically moved based on the map to conduct fluoroscopic inspection.
COPYRIGHT: (C)2004,JPO

9. 发明专利

JP2001256909A X-RAY GENERATOR 失效
公开(公告)号：JP2001256909A
公开(公告)日：2001-09-21
申请号：JP2000067508
申请日：2000-03-10
申请人： SHIMADZU CORP
发明人： MITSUHARA MASAYUKI
IPC分类号： H05G1/02 , H01J35/08
摘要： PROBLEM TO BE SOLVED: To provide an X-ray generator having a focus spot size greatly smaller than that of a conventional X-ray generator, eliminating change of the focus spot size even if a tube current is increased, and facilitating a long service. SOLUTION: The X-ray generator uses a target 1 which has a plurality of particulates 12 consisting of target materials fixed to a film substrate 11 one by one at preset interval. The film substrate 11 is wound up so that the particulates 12 consisting of the target material are located in sequence one by one in a focus spot of an electron beam B radiated to the target 1. The size of the particulates 12 consisting of the target material is made smaller than the size of the focus spot of the electron beam B for permitting generation of an X-ray from a region smaller than the focus spot of the electron beam B and the long service of the X-ray generator in proportion to the number of the particulates 12.

10. 发明专利

JPH04294235A DYNAMIC BALANCE TESTER 失效
公开(公告)号：JPH04294235A
公开(公告)日：1992-10-19
申请号：JP8321791
申请日：1991-03-23
申请人： SHIMADZU CORP
发明人： MITSUHARA MASAYUKI
IPC分类号： G01M1/22 , G01M1/30
摘要： PURPOSE:To improve working efficiency of a dynamic balance tester by shortening time required for a PLL circuit with a rotation reference signal input to synchronize with the signal. CONSTITUTION:A switch SW1 is used to select an oscillation circuit having oscillation frequency close to rotation frequency of a body W to be tested among oscillation circuits 41 to 4n. Before a predetermined period has elapsed from start of measurement, an oscillation output (c) of the oscillation circuit is input to a PLL circuit 6, and after the predetermined period has elapsed, a switch SW2 is switched to apply a rotation reference signal (a) detected by an optical sensor 1 to the PLL circuit 6 to obtain a stabilized rotation reference signal (d) synchronized with the signal (a).

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