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1. 发明专利

JP2008153533A Method of manufacturing semiconductor device 有权
标题翻译：制造半导体器件的方法
公开(公告)号：JP2008153533A
公开(公告)日：2008-07-03
申请号：JP2006341646
申请日：2006-12-19
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： KATO JURI , OKA HIDEAKI , UEHARA MASAMITSU
IPC分类号： H01L21/306
CPC分类号： H01L21/3141 , H01L21/187 , H01L21/2007 , H01L21/823481 , H01L21/84
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device capable of suppressing deterioration in the etching selection ratio of SiGe to Si when etching the SiGe formed on the Si.
SOLUTION: An SiGe layer 11 is formed on an Si substrate 1 and an Si layer 13 is formed on the SiGe layer 11. The Si layer 13 and an SiGe layer 11 are etched partially, a groove H exposing the side of the SiGe layer 11 is formed, and a dummy pattern DP, which exposes at least one surface of the Si substrate 1 and the Si layer 13 from a part under the SiGe layer 11, is formed. After that, the SiGe layer 11 is wet-etched via the groove H, thus forming a cavity 25 between the Si substrate 1 and an Si layer 13. In the process for forming the cavity 25, the SiGe layer 11 is etched while etchant is in contact with the dummy pattern DP.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：提供一种制造半导体器件的方法，当蚀刻形成在Si上的SiGe时，能够抑制SiGe与Si的蚀刻选择比的劣化。解决方案：在Si衬底1上形成SiGe层11，并且在SiGe层11上形成Si层13. Si层13和SiGe层11被部分蚀刻，暴露在形成SiGe层11，并且形成从SiGe层11下面的部分露出Si衬底1和Si层13的至少一个表面的虚拟图案DP。之后，通过槽H对SiGe层11进行湿蚀刻，从而在Si衬底1和Si层13之间形成空腔25.在形成空腔25的工艺中，刻蚀SiGe层11，蚀刻剂为与虚拟图案DP接触。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2002268097A ELECTROPHORETIC DISPLAY DEVICE 失效
公开(公告)号：JP2002268097A
公开(公告)日：2002-09-18
申请号：JP2001070371
申请日：2001-03-13
申请人： SEIKO EPSON CORP
发明人： OBIKAWA TAKESHI , KATASE MAKOTO , KINOSHITA SATOSHI , UEHARA MASAMITSU
IPC分类号： G02F1/167
摘要： PROBLEM TO BE SOLVED: To improve the reliability and the response speed of an electrophoretic display device. SOLUTION: An organic compound containing two or more rings in the structural formula is incorporated in a dispersion medium 2 for dispersing electrophoretic particles 3 at >=30 vol.% content. The organic compound is one compound or a mixture of two or more compounds expressed by the following formulae of (1)-(4). A1-A6, C1 and C2 denote cyclic bodies.

3. 发明专利

JPH05165142A PHOTOSENSITIVE BODY 失效
公开(公告)号：JPH05165142A
公开(公告)日：1993-06-29
申请号：JP33724791
申请日：1991-12-19
申请人： SEIKO EPSON CORP
发明人： UEHARA MASAMITSU , TANIGUCHI MAKOTO , KITAMURA KAZUHIKO , MIZUMA ISAO
IPC分类号： C08F8/00 , C08F20/34 , C08F20/52 , C08F220/36 , C08F220/60 , C08F246/00 , G03C1/685
摘要： PURPOSE:To attain optimum wettability to an ink used by using a photosensitive body introduced specific plural kinds of a photosensitive group into side chain or main chain or a high polymer for an image forming body, and thereby adjusting stepwise the change of wettability of the surface of the image forming body caused by the photoisomerization of the photosensitive group. CONSTITUTION:This photosensitive body is incorporated with plural kinds of the photosensitive group expressed by the formula in a general structure of the high polymer in the side chain of the high polymer. In the formula, the code 2, 3 are different photosensitive groups from each other. The photosensitive groups are two kinds in the case of the formula, but may be two or more kinds thereof. And the change of the physical property such as dipole moment, wettability or absorption spectrum is finely adjustable by the reversible isomerization of photosensitive group due to the photoirradiation with a specific wave-length. And the state of photoisomerization is stabilized by introducing the photosensitive group into the high polymer structure.

4. 发明专利

JPH0580272A LIGHT IRRADIATION DEVICE 失效
公开(公告)号：JPH0580272A
公开(公告)日：1993-04-02
申请号：JP24363491
申请日：1991-09-24
申请人： SEIKO EPSON CORP
发明人： UEHARA MASAMITSU
IPC分类号： G02B27/09 , G02B27/00 , H01S3/101 , H04N1/04 , H04N1/113
摘要： PURPOSE:To provide the light irradiation device which requires none of a special rotary mechanism, a rotation control mechanism, and a linear light source and converges light without scattering with simple constitution by splitting and reflecting a laser light beam by using plural light reflecting means. CONSTITUTION:The light emitted by a laser light beam emission body 1 consisting of a semiconductor laser is expanded linearly at right angles to its emission direction. Then this light is further expanded thin and long by using a concave lens group and its length in the lengthwise direction is set a little bit longer than required length. Then the light beam which is expanded thin and long in parallel by using a convex lens group is passed through a slit to obtain a flat parallel light beam 5', which is guided out of a light shaping unit 8 and made to irradiate a fine reflecting mirror group 10 of plural light reflecting means arranged in a staircase shape. The parallel light beam group 5' is split and reflected to generate a group 5 of plural nearly parallel light beams, which irradiates the surface of a body to be irradiated.

5. 发明专利

JPH04278658A DISPLAY DEVICE 失效
公开(公告)号：JPH04278658A
公开(公告)日：1992-10-05
申请号：JP4038591
申请日：1991-03-07
申请人： SEIKO EPSON CORP
发明人： UEHARA MASAMITSU
IPC分类号： G06F1/16 , G06F3/147 , G06F15/02
摘要： PURPOSE:To attain plural display operations with use of a simple display element by enabling the display element to turn over the pages. CONSTITUTION:An each of plural display element is provided with a reception circuit 2 to receive an electric or optical signal which contains partly a display signal therein. The circuit 2 is connected to a connection terminal 3 provided at the edge of the element 1, and the terminal 3 is connected to a connector 8 in a single body. The connector 8 is attached to a main body 9. The main body 9 transfers the signals and the information and at the same time processes these signals and information through a group of terminals that perform the connection among the elements 1, various keyboard groups, and the external electronic equipments. Furthermore another display element 101 containing the auxiliary input elements 14 is provided in the main body 9 so that the information can be inputted on a screen. The flexible elements 1 can display the different types of information and also can easily grasp the total information as if they turned over the pages of a book.

6. 发明专利

JPH04243873A SELENOPHENE-BASED COMPOUND 失效
公开(公告)号：JPH04243873A
公开(公告)日：1992-08-31
申请号：JP624791
申请日：1991-01-23
申请人： SEIKO EPSON CORP
发明人： KOMATSU HIDEHIKO , UEHARA MASAMITSU , TANIGUCHI MAKOTO , KITAMURA KAZUHIKO , ISHII ISAO
IPC分类号： C07D345/00 , C07D517/14 , C09K9/02 , G01B7/24
摘要： PURPOSE:To obtain a selenophene-based compound which is a thermally stable photochromic substance effectively usable as a memory material. CONSTITUTION:A compound expressed by formula I [at least one of R1 to R6 is a C-containing group (preferably alkyl or acyl), H or halogen], e.g. 3,3'- azobis(2,4,5-trimethylselenophene). The above-mentioned compound is obtained by forming a heterocyclic 5-membered ring, nitrating the resultant ring and then reducing the prepared compound. For example, ethyl acetoacetate is reacted with 3-chloro-2-butanone to provide ethyl 2,3-diacetylbutanoate expressed by formula II. Potassium carbonate is then added thereto and refluxing is carried out while heating to afford 3-methyl-2,5-hexanedione expressed by formula III. The obtained compound expressed by formula III is subsequently reacted with phosphorus pentaselenide to provide 2,3,5-trimethylselenophene expressed by formula IV, which is then nitrated to afford a 4-nitro derivative. The formed 4-nitro derivative is subsequently reduced to provide the aforementioned exemplified compound.

7. 发明专利

JPH04234689A 失效
公开(公告)号：JPH04234689A
公开(公告)日：1992-08-24
申请号：JP48091
申请日：1991-01-08
申请人： SEIKO EPSON CORP
发明人： UEHARA MASAMITSU , KITAMURA KAZUHIKO , OOYAMA NORIKO , TANIGUCHI MAKOTO , ISHII ISAO , MIZUMA ISAO
IPC分类号： B41J2/00 , B41J2/385 , B41J3/00 , B41J29/00 , B41M1/00
摘要： PURPOSE:To make stable fixation possible with stains on ink caused by rubbing after printing prevented by a method wherein a substance on which the printing is made is heated up after transfer of images. CONSTITUTION:A light beam 6 makes pulse-like scanning over the surface of a plate 1 in accordance with intensity and order specified by a printing signal. After images are formed satisfactorily by the above-mentioned scanning with ink 7 supplied in accordance with the printing signal, the said ink images are fixed on paper 12 by pressure applied with a fixing roller 13. Then specified temperature gradient is formed on the paper 12 by operation of a heating device 11, and a part on which the ink is applied is heated up and dried. Thereby the fixed part is stabilized, enabling the printed images to become fast-drying and satisfactory.

8. 发明专利

JPH04164975A HOT-MELT INK FOR INK JET RECORDING 失效
公开(公告)号：JPH04164975A
公开(公告)日：1992-06-10
申请号：JP29043390
申请日：1990-10-26
申请人： SEIKO EPSON CORP
发明人： TANIGUCHI MAKOTO , UEHARA MASAMITSU , MATSUZAKI MAKOTO
IPC分类号： C09D11/00 , C09D11/02 , C09D11/033 , C09D11/34 , C09D11/38
摘要： PURPOSE:To obtain the title ink which can prevent the viscosity from increasing when kept at a high temperature over a long period of time and retains good printability even after the lapse of time by using a radical polymerization inhibitor as a constituent. CONSTITUTION:The title ink contains a radical polymerization inhibitor, suitably sulfur compounds, quinones, hydroqunones, catechol, polyoxy compounds, amines, nitro compounds, nitroso compounds, copper(II) chloride, picric acid, etc., and further 1, 4-dihydroxybenzene, 1, 4-naphthoquinone, diphenylpicrylhydrazyl, etc. The hot-melt ink having the inhibitor incorporated therein can prevent the viscosity from increasing when kept at a high temperature over along period of time and retains good printability even after the lapse of time.

9. 发明专利

JPH04107180A IMAGE FORMING APPARATUS 失效
公开(公告)号：JPH04107180A
公开(公告)日：1992-04-08
申请号：JP22768790
申请日：1990-08-29
申请人： SEIKO EPSON CORP
发明人： MIZUMA TSUTOMU , UEHARA MASAMITSU , TANIGUCHI MAKOTO , KITAMURA KAZUHIKO , ISHII ISAO
IPC分类号： B41F31/02 , B41F31/03 , B41L19/00
摘要： PURPOSE:To prevent the solidification of ink and to always use ink in a uniformly mixed state by providing an ink stirring means stirring the ink in an ink receiving part. CONSTITUTION:A motor cover 11 is provided to the lower part of a developing device 5 and a thermostat 14 having a motor 13 equipped with a stirring blade 12 being a stirring means and a heater being an ink temp. holding means built therein is arranged. The thermostat 14 is set so as to hold ink temp. to arbitrary temp. Ink is stirred always or only at the time of printing or at a time other than the time of printing according to circumstances and the stirring means is used properly according to necessity. A stirring means 16a is also provided in an ink tank 16 and, when stirring is carried out in the ink tank 16, uniform mixing effect is further applied to the ink 3.

10. 发明专利

JPH0499625A IMAGE FORMATION DEVICE 失效
公开(公告)号：JPH0499625A
公开(公告)日：1992-03-31
申请号：JP21840690
申请日：1990-08-20
申请人： SEIKO EPSON CORP
发明人： TANIGUCHI MAKOTO , UEHARA MASAMITSU , KITAMURA KAZUHIKO , ISHII ISAO , MIZUMA ISAO
IPC分类号： B41C1/10 , G03C5/56
摘要： PURPOSE:To ensure that ink is transferred smoothly from a development roller to an image formation element and defective printing due to irregular ink deposition or ink run on a recording medium is prevented by specifying the unevenness of a coated surface of an optically reversible isomerized material. CONSTITUTION:An optically reversible isomerized layer 102 indicates such a phenomenon that the structure of a cis element is isomerized by a trans element due to light/exposure 105. Therefore, a latent image is formed on an image formation element 103 by selective light exposure. To allow migration of ink from the surface of an inked latent image formation element to a medium for image transfer 111, both have to be allowed to come in contact with each other and then have to be peeled off the other. However, if the surface unevenness is tolerated to 0.01mum or lower, their mutual adhesive power increases resulting in an unstabe peeloff position fixing. Subsequently, image quality deteriorates significantly due to delicate differences in transfer parameters such as temperature, humidity and the rotary speed of an image formation element. On the other hand, if the accuracy of unevenness on the coated surface of the optically reversible isomerized material is adjusted to a tolerance of 0.01mum or higher to 1mm or lower, stable transfer and peeloff processes are ensured, resulting in the mentioned transfer parameters causing no change leading to any problems. Thus a satisfactory print image is obtained on the medium for transfer 111.

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