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1. 发明专利

JP2001084932A HOT CATHODE OF X-RAY TUBE AND MANUFACTURING METHOD THEREOF 失效
公开(公告)号：JP2001084932A
公开(公告)日：2001-03-30
申请号：JP25982999
申请日：1999-09-14
申请人： RIGAKU DENKI CO LTD
发明人： OSAKA NAOHISA , KURIBAYASHI MASARU
IPC分类号： H01J35/06 , H01J9/04
摘要： PROBLEM TO BE SOLVED: To easily manufacture a thermionic emitter to be any shape and prevent it from falling off by forming a recessed part to a heating element, filling powder of thermionic emitting material inside the recessed part, and sintering and securing it. SOLUTION: A heating element 10 is made of glassy carbon. The glassy carbon is of large electrical resistance and can heat thermionic emitting material to sufficient temperature without having to make an exciting path (without complicating the shape) long, and accuracy of finishing is high, since an edge can be processed sharply when a groove 22 is processed. The groove 22 is formed on an upper surface of an emitter supporting part 20 of the heating element 10, and powder of lanthanum hexaboride as the termionic emitting material is filled inside the groove 22. The heating element 10 is then mounted to an open-type X-ray tube and excited while exhausting the inside of the tube to form a vacuum. Voltage to be applied is gradually increased to slow a temperature rise. Gas exhaust of the filled powder is thereby performed first, and the powder is simultaneously sintered.

2. 发明专利

JP2001021507A XAFS MEASURING APPARATUS 失效
公开(公告)号：JP2001021507A
公开(公告)日：2001-01-26
申请号：JP19009899
申请日：1999-07-05
申请人： RIGAKU DENKI CO LTD
发明人： TAGUCHI TAKEYOSHI , OSAKA NAOHISA , KURIBAYASHI MASARU
IPC分类号： G01N23/08
摘要： PROBLEM TO BE SOLVED: To provide a small and simple XAFS measuring apparatus capable of performing an XAFS(X-ray absorption fine structure) measurement with high resolution by increasing the parallel degree of monochromized X-rays. SOLUTION: X-rays radiated from an X-ray source F is formed into a parallel X-ray beam by a paraboloidal mirror 1, the parallel X-ray beam irradiates a tubular analyzing crystal 2, and a parallel X-ray beam of a specified wavelength is taken out by the analyzing crystal 2. As for the X-ray beam, the X-ray intensity of the X-ray beam before being made incident on a sample is measured by a detector 8, and the X-ray intensity after penetration is measured by a detector 9. By changing an incident angle of the parallel X-ray beam to the analyzing crystal 2, the energy value of the X-ray which is made incident on the sample is changed. As the use of the paraboloidal mirror 1 enables the formation of an parallel X-ray beam of high parallel degree and the radiation thereof to the analyzing crystal 2, a tubular crystal can be used as the analyzing crystal 2.

3. 发明专利

JP2001084931A HOT CATHODE OF X-RAY TUBE 失效
公开(公告)号：JP2001084931A
公开(公告)日：2001-03-30
申请号：JP25924599
申请日：1999-09-13
申请人： RIGAKU DENKI CO LTD
发明人： KURIBAYASHI MASARU
IPC分类号： H01J35/06
摘要： PROBLEM TO BE SOLVED: To realize a focus shape and focus size on a target as designed. SOLUTION: A heating element 10 is composed of a pair of current-carrying terminals 12, 14, a pair of leg parts 16, 18 and an emitter support part 20. A slot 22 (recessed part) is formed on the upper surface of the emitter support part 20. The slot 22 is provided with a pair of sidewalls and a flat bottom face. A thermoelectron emitter 24 is embedded in an embedding recessed part of the bottom face. The surface of the thermoelectron emitter 24 is exposed to part of the bottom face, and the exposed surface is flush with the bottom face. The electron flow, emitted from the exposed surface of the thermoelectron emitter 24, converges by an electric field formed by the sidewalls of the recessed part 22.

4. 发明专利

JP2006324230A X-RAY TUBE 有权
公开(公告)号：JP2006324230A
公开(公告)日：2006-11-30
申请号：JP2006102728
申请日：2006-04-04
申请人： RIGAKU DENKI CO LTD
发明人： NONOGUCHI MASAHIRO , KURIBAYASHI MASARU
IPC分类号： H01J35/06
摘要： PROBLEM TO BE SOLVED: To prevent an electron beam irradiation area on a target from being bent by devising the shape of an opening in an X-ray tube provided with an electron gun having a structure wherein an opening of an Wehnelt electrode is unsymmetrical with respect to an electron emission body. SOLUTION: A long and slender coiled filament 16 is arranged in the long and slender opening 18a of the Wehnelt electrode. Two long sides 26a, 28a of the opening 18a are located in unsymmetrical positions with respect to the centerline in the width direction of the filament 16. The two long sides 26a, 28a are bent in the same direction respectively as viewed from the normal line direction of a surface of the Wehnelt electrode. Radii of curvatures R1, R2 of two long sides 26a, 28a differ from each other. Thereby, the electron beam irradiation area on the target becomes almost linear without being bent. COPYRIGHT: (C)2007,JPO&INPIT

5. 发明专利

JP2003092076A THERMIONIC CATHODE OF X-RAY TUBE 审中-公开
公开(公告)号：JP2003092076A
公开(公告)日：2003-03-28
申请号：JP2001284581
申请日：2001-09-19
申请人： RIGAKU DENKI CO LTD
发明人： TAGUCHI TAKEYOSHI , TSUKAMOTO KATSUMI , KURIBAYASHI MASARU
IPC分类号： H01J1/20 , H01J9/04 , H01J35/06
摘要： PROBLEM TO BE SOLVED: To prevent a thermionic emitter from being cracked by dividing an emitter region, with a thermionic cathode of an X-ray tube with a structure supporting the thermionic emitter with a heating element. SOLUTION: A thermionic emitter 12 is structured by a plurality of emitter regions 14 separated from each other. Maximum size of each emitter region is to be not more than 3 mm. With this, crack is done away with. A thermionic cathode consists of a heating element 10 made of glass carbon and a thermionic emitter 12 supported by this. The thermionic emitter 12 consists of a plurality of emitter regions 14, each of which is made of a sintered compact of lanthanum hexaboride. The thermionic cathode is made as follows. Four grooves 16 are formed at the thermionic emission side (on the upper side, in the figure) of the heating element 10 having a thickness of 1 mm. Each groove 16 is 2.6 mm long, 0.5 mm wide and 0.3 mm deep. Four emitter regions 14 are completed by filling lanthanum hexaboride in the grooves and sintering it.

6. 发明专利

JP2002039970A X-RAY DEVICE 失效
公开(公告)号：JP2002039970A
公开(公告)日：2002-02-06
申请号：JP2000228443
申请日：2000-07-28
申请人： RIGAKU DENKI CO LTD
发明人： KURIBAYASHI MASARU , YASUKAWA SHOICHI
IPC分类号： G01N23/20 , G21K1/06
摘要： PROBLEM TO BE SOLVED: To enable X rays of different wavelengths to be used easily in an X-ray measurement. SOLUTION: The X-ray device includes a plurality of X-ray generators 4A and 4B for generating X rays to irradiate a sample S, and a second-dimensional X-ray detector 3 for detecting X rays coming from the sample S. The plurality of X-ray generators 4A and 4B can bring X rays of different wavelengths by different angles into the sample S, and moreover at least one of the plurality of X-ray generators 4A and 4B is equipped with an X-ray condenser 6 for collecting X rays. Since the X-ray condenser 6 is set to the side where X rays are emitted from the X-ray generators 4A and 4B, it becomes possible to irradiate X rays of a practically full intensity to the sample S even if the X-ray generators 4A and 4B are micro focus ones. Accordingly, it is practically possible to set the plurality of X-ray generators to one sample S.

7. 发明专利

JP2001266780A X-RAY GENERATING APPARATUS 失效
公开(公告)号：JP2001266780A
公开(公告)日：2001-09-28
申请号：JP2000083390
申请日：2000-03-24
申请人： RIGAKU DENKI CO LTD
发明人： TAKAHASHI SADAYUKI , OSAKA NAOHISA , KURIBAYASHI MASARU
IPC分类号： H05G1/34 , H01J35/06 , H05G1/00
摘要： PROBLEM TO BE SOLVED: To eliminate the need for flowing a great current into a high-tension cable by using an electron flow with a carbon nanotube as an electron emission source for heating a cathode. SOLUTION: Electron emission electrodes 18 are arranged at intervals on the back of a hot cathode 14. Each of the electron emission electrodes 18 consists of a electrode base 20 and an emitter 22 fixed to the surface thereof. The emitter 22, as an electron emission member, is formed of a carbon nanotube. A voltage is applied between the hot cathode 14 and the electron emission electrode 18, so as to make the electron emission electrodes 18 negative with respect to the potential of the hot cathode 14. Then, electrons 24 are emitted from the emitters 22 of the electron emission electrodes 18 by the operation of field emission. The electrons 24 are accelerated by an electric field and collide with the back of the hot cathode 14. With the collision of the electrons, the hot cathode 14 is heated to emit thermoelectrons 26. The thermoelectrons 26 collide with a target.

8. 发明专利

JP2000251811A COOLING DEVICE USED IN X-RAY TUBE 失效
公开(公告)号：JP2000251811A
公开(公告)日：2000-09-14
申请号：JP5441999
申请日：1999-03-02
申请人： RIGAKU DENKI CO LTD
发明人： OSAKA NAOHISA , HARADA JINPEI , KURIBAYASHI MASARU
IPC分类号： H01J35/12
摘要： PROBLEM TO BE SOLVED: To provide a cooling device for a target substrate which eliminates thermal damages occurring in a target substrate of an X-ray tube. SOLUTION: This cooling device used in an X-ray tube, equipped with a target plate cools a reverse side 3 of the target 1 subjected to incidence of an electron beam 9 by cooling water 7 wherein a cooling water channel 6 is formed along the reverse side 3 and a separator 4 is installed over the reverse side 3 of the target 1 and is equipped with a vaporized jet intake 5 which opens above the reverse side 3 of the target area is made incident with the electron beam 9, so that a bubble 8 produced by the vaporized jet is discharged together with the cooling water 7 supplied through the cooling channel 6 out of the vaporized jet intake 5 into the inside of the separator 4.

9. 发明专利

JP2001250496A X-RAY GENERATOR 失效
公开(公告)号：JP2001250496A
公开(公告)日：2001-09-14
申请号：JP2000059916
申请日：2000-03-06
申请人： RIGAKU DENKI CO LTD
发明人： TAKAHASHI SADAYUKI , KURIBAYASHI MASARU , OSAKA NAOHISA
IPC分类号： H01J35/06
摘要： PROBLEM TO BE SOLVED: To resolve various problems associated with the use of a hot cathode, by adopting a cold-cathode electron emission source composed of carbon nanotubes as a cathode. SOLUTION: An electron gun unit is comprised of a Wehnelt-cylinder 12, and a cathode 14 is in the Wehnelt 12. The cathode 14 is composed of a cathode base 22 and an emitter 24 that is fixed to the surface of the cathode base 22. The emitter 24 is a member for an electron emission, and made of carbon nanotubes. A target 16 is arranged to face the electron gun unit 10. The electrons, which have been emitted from the emitter 24 due to the effect of an electric field generated by the cathode 14, a lead-out electrode 18, and a target 16, are accelerated at the lead-out electrode 18 and focused at a window 20 of the Wehnelt-cylinder 12, then collide with the surface of the target 16 to generate an X-ray.

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