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    • 2. 发明专利
    • MEASURING METHOD OF ELECTRIC RESISTANCE OF THIN FILM
    • JPH0545389A
    • 1993-02-23
    • JP20798191
    • 1991-08-20
    • NIPPON KOKAN KKDAINIPPON INK & CHEMICALS
    • FUJIMOTO KOJI
    • G01R27/02
    • PURPOSE:To measure an electric resistance value easily and highly precisely without measuring the thickness of a sample, by calculating the electric resistance value of a thin film from detection voltages and electrification current values measured by at least two sets of electrode systems of, which inter-electrode distances are different. CONSTITUTION:A current is made to flow from an AC constant current source 1 to a thin film sample 3 through electrification electrodes 4 and voltages are detected by two sets of electrode systems composed of detecting electrodes 5 and 6. On the occasion, an electrification frequency is selected so that a stray current or a surface current is avoided. Electrification current values are converted into voltage values by a noninductive type shunt resistor 2 for current value detection and these values are passed through isolated amplifiers 7 to 9 and AC-DC converters 10 to 12 together with the voltages detected by the electrodes 5 and 6, sampled by an A/D converter 13 and inputted to an arithmetic device 14. In the device 14, the electrical resistivity of the sample 3 is calculated from inter-electrode distances, the current values and the voltage values. Thereby the time and labor for measuring the thickness of the sample 3 can be saved and also the resistivity can be measured with high precision. An electric resistance value such as a surface resistance value which is intrinsic to a substance can also be measured in the same way.