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1. 发明专利

JP2004311713A Mold for producing semiconductor device 审中-公开
公开(公告)号：JP2004311713A
公开(公告)日：2004-11-04
申请号：JP2003103097
申请日：2003-04-07
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： SASAKI KEI , WATANABE HIROSHI , YABE HIDETAKA , AYA ATSUSHI
IPC分类号： H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a highly rigid mold for producing a semiconductor device with high production efficiency.
SOLUTION: The mold 1 for producing a semiconductor device being pressed against resist 11 in order to form a pattern 11a on the resist 11 comprises a mold body 7 having a pattern 4, and a surface layer 5 covering the pattern 4 wherein the surface layer 5 contains silicon.
COPYRIGHT: (C)2005,JPO&NCIPI

2. 发明专利

JP2004111704A Manufacturing method for membrane mask and membrane mask using same 审中-公开
公开(公告)号：JP2004111704A
公开(公告)日：2004-04-08
申请号：JP2002273122
申请日：2002-09-19
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： YABE HIDETAKA , SASAKI KEI , WATANABE HIROSHI , MARUMOTO KENJI
IPC分类号： G03F1/20 , H01L21/027 , G03F1/16
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a membrane mask for simultaneously increasing precision in the dimensions of a mask pattern and precision in a transfer pattern.
SOLUTION: A diamond film, whose surface is polished, is used as the membrane of the membrane mask for circuit pattern transfer and is etched for forming a pattern. Roughness on the surface of the diamond film is 0.1 to 10 nm and manufacture is made, by using a heavy metal layer as the etching mask for etching the diamond film. Additionally, a membrane mask can be manufactured, without removing the heavy metal layer, after etching the diamond film. Furthermore, a metal film or a silicon carbide film can be used, in place of the diamond mask.
COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2004207155A Fuel cell and manufacturing method thereof 审中-公开
公开(公告)号：JP2004207155A
公开(公告)日：2004-07-22
申请号：JP2002377585
申请日：2002-12-26
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： MATSUURA TSUKASA , TAKAHASHI MITSUGI , KOTOGAMI YOSHIHIDE , FUKUMOTO HISATOSHI , AIHARA SHIGERU , HIROI OSAMU , SATO TAKEHIKO , YABE HIDETAKA , FUKAMI TATSUYA
IPC分类号： H01M8/24 , H01M8/02
CPC分类号： Y02P70/56
摘要： PROBLEM TO BE SOLVED: To obtain a fuel cell and a manufacturing method thereof realizing compactness and high voltage by forming a series structure of unit cells on a silicon wafer. SOLUTION: The plurality of unit cells 106 formed by laminating a fuel side catalyst layer 4, an electrolyte film 5 and an oxidizing agent side catalyst layer 6 are formed on the surface of the silicon wafer 1, and cavities 14 are formed below respective unit cells 106. The plurality of unit cells 106 are connected in series by electrically connecting the fuel side catalyst layer 4 of one of the unit cells 106 of different unit cells 106 and the oxidizing agent side catalyst layer 6 of the other unit cell 106 via a barrier layer 7 made of a conductive material. The fuel side catalyst layer 4 and an exposing part of the electrolyte film 5 from the oxidizing agent side catalyst layer 6 are buried in an insulating body 7. COPYRIGHT: (C)2004,JPO&NCIPI

4. 发明专利

JP2004319213A Hydrogen generating device for portable fuel cell 审中-公开
公开(公告)号：JP2004319213A
公开(公告)日：2004-11-11
申请号：JP2003110373
申请日：2003-04-15
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： KOTOGAMI YOSHIHIDE , HIROI OSAMU , AIHARA SHIGERU , TAKAHASHI MITSUGI , FUKUMOTO HISATOSHI , YABE HIDETAKA , MATSUURA TSUKASA , FUKAMI TATSUYA , SATO TAKEHIKO
IPC分类号： C01B3/00 , C01B3/32 , H01M8/04 , H01M8/06
CPC分类号： Y02E60/327
摘要： PROBLEM TO BE SOLVED: To obtain a hydrogen generating device for a portable fuel cell for applying to portable equipment by eliminating the need for the use of an off gas and cooling water from the fuel cell. SOLUTION: A partial oxidizing chamber 5, a water vapor reforming chamber 6, a CO oxidizing processing chamber 8, a fuel vaporizing chamber 3, a hydrogen storage alloy chamber 9 and a fuel preheating chamber 2 repeat alternately heat generating and heat absorbing in the order of a partial oxidizing reaction, a water vapor reforming reaction, a CO selection oxidizing reaction, a fuel vaporizing reaction, a hydrogen storage reaction and fuel preheating, respectively, from a high temperature side, and are disposed so as to freely exchange heat with each adjacent reaction. COPYRIGHT: (C)2005,JPO&NCIPI

5. 发明专利

JP2004241212A Power supply system for portable instrument 审中-公开
公开(公告)号：JP2004241212A
公开(公告)日：2004-08-26
申请号：JP2003027775
申请日：2003-02-05
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： TAKAHASHI MITSUGI , HIROI OSAMU , AIHARA SHIGERU , KOTOGAMI YOSHIHIDE , FUKUMOTO HISATOSHI , YABE HIDETAKA , MATSUURA TSUKASA , FUKAMI TATSUYA , SATO TAKEHIKO
IPC分类号： H01M8/00 , H01M8/04 , H01M8/06 , H01M8/10
CPC分类号： Y02E60/521
摘要： PROBLEM TO BE SOLVED: To provide a small-sized power supply system for a portable instrument with a large capacity in which electric power of sufficient capacity can be obtained by using a fuel cell, and replenishment of kinetic energy can be carried out easily, and furthermore the electric power can be supplied stably even to the portable instrument always used in the state of ON.
SOLUTION: This is the power supply system for the portable instrument composed of the reproducible power supply main body part 2 generating the electric power mounted on the portable instrument 1 and driving the portable instrument, and a kinetic energy supply device 3 connected to the power supply main body at the time of generating the power supply main body part and supplying energy to the power supply main body part. The power supply main body part is provided with the fuel cell 4 of a solid polymer-type to generate electric power to drive the portable instrument, and a hydrogen storage container 7 to supply hydrogen to the fuel cell 4. The kinetic energy supply device is provided with a hydrogen generating means 22 removably connected to the hydrogen storage container and generating hydrogen supplied to the hydrogen storage container.
COPYRIGHT: (C)2004,JPO&NCIPI

6. 发明专利

JP2003338447A X-ray mask, x-ray aligner, x-ray exposure method, and semiconductor manufactured thereby 审中-公开
标题翻译： X射线掩模，X射线对准器，X射线曝光方法及其制造的半导体
公开(公告)号：JP2003338447A
公开(公告)日：2003-11-28
申请号：JP2002146369
申请日：2002-05-21
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： WATANABE HIROSHI , KICHISE KOJI , YABE HIDETAKA
IPC分类号： G03F1/22 , G03F1/68 , G03F7/20 , H01L21/027 , G03F1/16
CPC分类号： G03F1/20 , G03F1/22 , G03F1/29 , G03F1/32
摘要： PROBLEM TO BE SOLVED: To provide an X-ray mask enabling transfer of a high speed and fine pattern, and to provide an X-ray aligner, an X-ray exposure method and a semiconductor device manufactured by the X-ray exposure method.
SOLUTION: Light passing through a-c and light passing through b-c are the same phase and enhanced to each other by being set so as to satisfy the relation of an exposure gap (G=L
2 /λ). A phase difference between the light passing through a-e and the light passing through b-e is -π-π=-2π, both pieces of the light are in the same phase and enhanced to each other at a position (e). A phase difference between light passing through a-d and light passing through b-d is -π-0=-π, their phases are reverse phases at a position (d), and they are weaked to each other. Thus, a line and spatial pattern of a cycle of 2×L are enhanced to each other at a position on a resist face 5S just under the pattern of an X-ray absorptive body 40b and the pattern of an X-ray transmissive body 40a, and are cancelled each other at the position on the resist face 5S just under a boundary between the pattern of the X-ray absorptive body 40b and the pattern of the X-ray transmissive body 40a.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供能够传递高速和精细图案的X射线掩模，并且提供X射线对准器，X射线曝光方法和通过X射线制造的半导体器件曝光方法
解决方案：通过ac的光和通过bc的光是相同的相位，并且通过设置为满足曝光间隙（G = L 2 /λ）的关系而相互增强）。通过a-e的光和通过b-e的光之间的相位差为-π-π=-2π，两个光都处于相同的相位并且在位置（e）彼此增强。通过a-d的光和通过b-d的光之间的相位差为-π-0 =-π，它们的相位在位置（d）处是反相，并且它们彼此弱。因此，在X射线吸收体40b的图案的正下方的抗蚀剂面5S上的位置和X射线透射体40a的图案之间，2×L的循环的线和空间图案彼此增强并且在刚好在X射线吸收体40b的图案与X射线透射体40a的图案之间的边界的抗蚀面5S上的位置处彼此抵消。版权所有（C）2004，JPO

7. 发明专利

JP2006066277A Planar connection type solid polymer fuel cell and fuel cell power supply system 审中-公开
标题翻译：平面连接型固体聚合物燃料电池和燃料电池电源系统
公开(公告)号：JP2006066277A
公开(公告)日：2006-03-09
申请号：JP2004248650
申请日：2004-08-27
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： HIROI OSAMU , TAKAHASHI MITSUGI , AIHARA SHIGERU , KOTOGAMI YOSHIHIDE , FUKUMOTO HISATOSHI , YABE HIDETAKA , MATSUURA TSUKASA , FUKAMI TATSUYA , SATO TAKEHIKO
IPC分类号： H01M8/24 , H01M8/02 , H01M8/04 , H01M8/10
CPC分类号： Y02E60/521
摘要： PROBLEM TO BE SOLVED: To obtain a planar connection type solid polymer fuel cell and a fuel cell power supply system using it wherein energy efficiency is superior by setting the number of split parts of a total electrode area (a total catalyst area) so that energy loss caused by a resistance element of the wiring part is made smaller.
SOLUTION: A cathode electrode 3 is formed on one face of a solid polyelectrolyte membrane 2 in a matrix state of two lines and m rows, and an anode electrode is formed on the other face of the polyelectrolyte membrane 2 in a matrix stat of two lines and m rows so as to be opposite to the cathode electrode 3. By this, single cells 1 are arranged and formed on the same plane in the matrix shape of two lines and m rows. Then, 2m pieces of the single cells 1 are connected in series by the wiring part 5.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题为了获得使用其的平面连接型固体聚合物燃料电池和燃料电池供电系统，其中通过设定总电极面积的分割数量（总催化剂面积）能够提高能量效率，使得由布线部的电阻元件引起的能量损失变小。解决方案：阴极电极3以两行m行的矩阵状态形成在固体聚电解质膜2的一面上，阳极电极形成在聚电解质膜2的另一面上，矩阵状态两行和m行以与阴极3相对。由此，单电池1以两行m行的矩阵形状布置并形成在同一平面上。然后，2m个单电池1通过布线部分5串联连接。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2004336066A Method of manufacturing x-ray mask 审中-公开
标题翻译：制造X射线掩模的方法
公开(公告)号：JP2004336066A
公开(公告)日：2004-11-25
申请号：JP2004179780
申请日：2004-06-17
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： YABE HIDETAKA , KITAMURA KAEKO , SASAKI KEI
IPC分类号： C23C14/06 , C23C14/34 , G03F1/22 , H01L21/027 , G03F1/16
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing an X-ray mask which has favorable accuracy of the position of a pattern.
SOLUTION: An antireflection film 3a is formed on a membrane 2. An X-ray absorber 4 is formed so as to be contact with the surface of the antireflection film 3a. A resist pattern 7 which is composed of a material different from the X-ray absorber 4 is formed on the X-ray absorber 4. The X-ray absorber 4 is patterned using the resist pattern 7 as a mask. At least one of an antireflection film 4 and a mask layer 7 uses a chrome target and is composed of chrome nitride deposited by spattering using inert gas containing nitrogen as sputtering gas.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种具有良好的图案位置精度的X射线掩模的制造方法。解决方案：在膜2上形成防反射膜3a。形成X射线吸收体4以与抗反射膜3a的表面接触。在X射线吸收体4上形成由与X射线吸收体4不同的材料构成的抗蚀剂图案7.使用抗蚀剂图案7作为掩模对X射线吸收体4进行图案化。防反射膜4和掩模层7中的至少一个使用铬靶，并且由使用含有氮的惰性气体作为溅射气体的溅射而沉积的氮化铬组成。版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JP2004311514A Mold and method for forming pattern, method of manufacturing electronic device, and electronic device 审中-公开
公开(公告)号：JP2004311514A
公开(公告)日：2004-11-04
申请号：JP2003099403
申请日：2003-04-02
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： YABE HIDETAKA , SASAKI KEI , WATANABE HIROSHI , KICHISE KOJI , HIRAI YOSHIHIKO , YOSHIDA SATORU
IPC分类号： H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a mold for forming a pattern, which is improved in dimensional controllability by suppressing the bending of a pattern to be transferred, and to provide a method of forming a pattern, a method of manufacturing an electronic device, and an electronic device.
SOLUTION: The mold 1 for forming a pattern is pressed against a resist 11 for forming a pattern 11a on the resist 11. At least part of the surface of the mold 1 in contact with the resist 11 when the mold 1 is pressed against the resist 11 is made of a conductive layer 5.
COPYRIGHT: (C)2005,JPO&NCIPI

10. 发明专利

JP2004288575A Fuel cell power supply system for portable apparatuses, and driving method therefor 审中-公开
标题翻译：用于便携式设备的燃料电池电源系统及其驱动方法
公开(公告)号：JP2004288575A
公开(公告)日：2004-10-14
申请号：JP2003082186
申请日：2003-03-25
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： FUKUMOTO HISATOSHI , TAKAHASHI MITSUGI , HIROI OSAMU , AIHARA SHIGERU , KOTOGAMI YOSHIHIDE , YABE HIDETAKA , MATSUURA TSUKASA , FUKAMI TATSUYA , SATO TAKEHIKO
IPC分类号： H01M8/10 , H01M8/04
CPC分类号： Y02E60/521
摘要： PROBLEM TO BE SOLVED: To obtain a fuel cell power supply system for portable apparatuses that achieves the enhancement of long-term stability. SOLUTION: The fuel cell power supply system for portable apparatuses comprises a pressure sensing means 10, provided on a fuel supply piping 5 by which the connection between a fuel storage vessel 4 and a fuel battery cell 2 is established, for converting fuel gas pressures within a space into amounts of mechanical movement, a mechanical transmission means 30 for transmitting mechanical movements of the pressure sensing means 10, and a mechanical connection interrupting means 20a, b, provided on a part of an electric wiring 6 by which the connection between the fuel battery cell 2 and a body 1 of a portable apparatus is established, for turning on/off the connections of the electric wiring 6 in response to the mechanical movements transmitted. And, if a fuel gas pressure is not greater than a given lower limit pressure P low , the connection of the electric wiring 6 is designed to be turned off by the mechanical connection interrupting means 20. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：获得实现长期稳定性提高的便携式设备的燃料电池供电系统。解决方案：用于便携式设备的燃料电池电源系统包括压力检测装置10，设置在燃料供应管道5上，燃料供应管道5建立燃料储存容器4和燃料电池单元2之间的连接，用于转换燃料在空间内的气体压力达到机械运动的量，用于传递压力感测装置10的机械运动的机械传动装置30以及设置在电气配线6的一部分上的机械连接中断装置20a，b，建立燃料电池单元2和便携式设备的本体1之间，用于响应于传递的机械运动来接通/断开电线6的连接。并且，如果燃料气体压力不大于给定的下限压力P 低，则电气配线6的连接被设计为通过机械连接中断装置20关闭。版权所有（C）2005，JPO＆NCIPI

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