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    • 1. 发明专利
    • CHARGING BEAM EXPOSING DEVICE
    • JPS6440186A
    • 1989-02-10
    • JP19529487
    • 1987-08-06
    • MITSUBISHI ELECTRIC CORP
    • TOBUSE HIROAKIKAWASHIMA YOSHIKAZU
    • B23K15/02B23K15/00
    • PURPOSE:To measure the deflecting position and the focusing position of an electron beam with high accuracy by projecting a convergent deflecting electron beam on each of plural probes with the diameter less than the electron beam spot diameter with the tips of the probes coincident with the upper surface of a sample and making its detected electric current value maximum. CONSTITUTION:The plural probes 12 with the same diameter as the electron beam spot diameter or less diameter than the same are arranged on a probe supporting base 13 so that the tips are made to the prescribed position. The probes 12 are raised by a motor 14 through a through hole 11 of a mounting table 10 of a sample 9 and the tips are coincident with the height of the upper surface of the sample 9. Focusing coils 4 and polarizing coils 5 are actuated by electric currents IF, IX and IY sent from respective power sources 6-8 by voltage commands VF, VX and VY from the storage data of a controller 16 to project the electron beam 1 on each of the probes 12. The command of the controller 16 is corrected so that the detected current value of each of the probes 12 at that time is made to the maximum current value IM to measure the deflecting position and the focusing position of the electron beam 1 with the high accuracy.
    • 2. 发明专利
    • Guiding system of unmanned carrying vehicle
    • 无人驾驶车辆指导系统
    • JPS6198412A
    • 1986-05-16
    • JP21869484
    • 1984-10-19
    • Mitsubishi Electric Corp
    • TOBUSE HIROAKIKOSAKA NORIYUKI
    • G05D1/02
    • G05D1/0244G05D1/0246
    • PURPOSE:To attain the drive/stop control with high accuracy by using the strobo flash to irradiate intermittently a guide tape stuck continuously on the floor surface and calculating the video input, the posture angle and the position shift of an unmanned truck every 2 fields of an ITV camera to feed them back. CONSTITUTION:The strobo flash is emitted for image pickup of a guide tape when the timing signal 30 of a synchronism generating circuit 25 rises up to an H level. A video binary coded signal 23 is supplied to a boundary point extracting circuit 31 in response to the 1st horizontal scan of the image picked-up screen. Then a detection pulse 32 is delivered. A counter 34 is reset with a horizontal drive pulse and counts the sampling pulses to send them to a latch circuit 38. Then the counter 34 is held when the white/black boundary point extracting signal 32 is supplied to an enable terminal. While a counter 35 is reset by a vertical drive pulse 28 at a horizontal scan time point. The output of the circuit 38 and the output of the counter 35 are connected to the data bus of a memory 34 and the address bus of the memory 34 respectively. The boundary extracting signal is written as the horizontal coordinates.
    • 目的:通过使用闪光灯间歇地将引导带连续地贴在地板表面上并计算视频输入,以每2场无人驾驶的卡车的姿态角度和位置偏移量,以高精度实现驱动/停止控制 一台ITV摄像机将其送回来。 构成:当同步发生电路25的定时信号30上升到H电平时,发出闪光闪光用于引导带的图像拾取。 响应于图像拍摄屏幕的第一次水平扫描,视频二进制编码信号23被提供给边界点提取电路31。 然后传送检测脉冲32。 计数器34用水平驱动脉冲复位,对采样脉冲进行计数,将其发送到锁存电路38.然后当白/黑边界点提取信号32被提供给使能端时,计数器34被保持。 而在水平扫描时间点,计数器35被垂直驱动脉冲28复位。 电路38的输出和计数器35的输出分别连接到存储器34的数据总线和存储器34的地址总线。 边界提取信号被写为水平坐标。
    • 7. 发明专利
    • ELECTRON BEAM DIRECT LITHOGRAPHY EQUIPMENT
    • JPH01120824A
    • 1989-05-12
    • JP27749787
    • 1987-11-04
    • MITSUBISHI ELECTRIC CORP
    • TOBUSE HIROAKI
    • H01L21/027H01L21/30H05K3/06
    • PURPOSE:To facilitate proper exposure and realize high quality printed board exposure by a method wherein auxiliary deflection scanning is superposed upon main deflection scanning and, even if the width of a pattern to be lithographed is variously changed, the main deflection scanning speed is controlled to vary so as to achieve always the most suitable dosage. CONSTITUTION:When lithography is started, the starting point coordinates, length, direction and auxiliary deflection gain information of one line are read out of a lithograph pattern memory 36. The auxiliary deflection gain information is inputted to a clock selecting circuit 30 as a digital value. In accordance with the information, the clock selecting circuit 30 selects a predetermined main deflection scanning control clock in order to maintain the exposure dosage constant for a pattern width to be lithographed, i.e., an auxiliary deflection scanning width and inputs the clock to a vector pattern generating circuit 38. If main deflection scanning clock frequencies which provide the most suitable dosage for the various auxiliary deflection scanning widths are created by a clock frequency dividing circuit 29 beforehand and one of the frequencies selected in accordance with the lithograph data, the suitable exposure can be performed for the lithography of various pattern widths.