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    • 2. 发明专利
    • On-machine measuring method and measuring device
    • 机器测量方法和测量装置
    • JP2011020233A
    • 2011-02-03
    • JP2009168925
    • 2009-07-17
    • Kyoto UnivMori Seiki Co Ltd国立大学法人京都大学株式会社森精機製作所
    • MATSUBARA ATSUSHIYAMAJI IWAOKONO DAISUKEKOIKE YUSUKE
    • B23Q17/20G01B11/24
    • G01B11/24B23Q17/20B23Q17/24G01B21/045
    • PROBLEM TO BE SOLVED: To provide a device capable of accurately measuring the shape of a machined surface of a workpiece on a machine tool.
      SOLUTION: A reference mirror 21 is arranged on a table 2, and a first laser displacement sensor L
      1 for measuring the machined surface of the workpiece W and a second laser displacement sensor L
      2 for measuring the reference surface of the reference mirror 21 are arranged on a tool holder 3. The table 2 and the tool holder 3 are relatively moved by a measuring motion giving section 24 at a sine wave locus, and sensitivity of the first laser displacement sensor L
      1 is computed by a sensitivity calculation section 28 on the basis of machined surface displacement data measured at this condition and reference surface displacement data. Then, the machined surface displacement data is corrected by a real shape data calculation section 29 on the basis of the calculated sensitivity, and real shape data of the machined surface is calculated by taking the difference between the corrected machined surface displacement data and the reference surface displacement data.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供能够精确地测量机床上的加工表面的加工表面的形状的装置。 < P>解决方案:参考镜21布置在工作台2上,用于测量工件W的加工表面的第一激光位移传感器L 和第二激光位移传感器L 用于测量参考反射镜21的参考表面的2 布置在工具架3上。工作台2和工具架3被测量运动给定部分24以正弦波轨迹相对移动,并且灵敏度 基于在该条件下测量的加工表面位移数据和基准面位移数据,由灵敏度计算部28计算第一激光位移传感器L 1 。 然后,根据计算出的灵敏度,通过实数形状数据计算部29校正加工面位移数据,并且通过取得经校正的加工面位移数据与基准面的差来计算加工面的实际形状数据 位移数据。 版权所有(C)2011,JPO&INPIT