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1. 发明专利

JP2002187099A MANIPULATOR 失效
公开(公告)号：JP2002187099A
公开(公告)日：2002-07-02
申请号：JP2000388666
申请日：2000-12-21
申请人： JEOL LTD
发明人： SUZUKI TOSHIAKI , SATO YASUHIKO
IPC分类号： B25J7/00 , B81B1/00 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a manipulator to support a sample or the like in a charged particle beam apparatus or the like. SOLUTION: An arm 32 is attached to an tip portion of a tubular probe 31 for pick up. The arm consists of a magnetic body 33 formed in a C shape and a coil 34, and a gap 35 is formed at a central portion of its tip portion. At both end portions that are apposite to each other across the gap 35, sample holding portions (36A, 36B) having extremely thin thickness extend outward perpendicularly to a tip plane 37 while maintaining the gap. The coil 34 is wound to a portion opposite to the tip portion of the magnetic body 33, and a power source 38 is connected to both ends of the coil via lead wires 37. The power source 38 is held inside a driving apparatus 39 equipped with a driving mechanism that moves the probe 31 for pick up in X, Y and Z directions.

2. 发明专利

JP2001291483A SAMPLE HOLDING APPARATUS FOR CHARGED PARTICLE BEAM APPARATUS 失效
公开(公告)号：JP2001291483A
公开(公告)日：2001-10-19
申请号：JP2000103150
申请日：2000-04-05
申请人： JEOL LTD
发明人： SUZUKI TOSHIAKI , SATO YASUHIKO
IPC分类号： G01N23/225 , G01N1/28 , G01N1/32 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a sample holding apparatus for charged particle beam apparatus, in which a processing part or an observing part of a sample can be found easily even if a sample cartridge is exchanged between charged particle beam apparatus such as FIB, TEM, and SEM, and in which there is no need to record an information of a sample on a storage case of a sample cartridge when detaching a sample cartridge from a sample holder of a charged particle beam apparatus and storing it. SOLUTION: The sample holding apparatus for a charged particle beam apparatus is composed of a sample cartridge and a sample holder. The sample cartridge is comprised of: a holding part, in which a sample is held, a memory means, in which data about the sample is stored; and a terminal for outside connection to perform reading and rewriting of a memory content, which has been stored in the memory means, from an external CPU at any time. The sample holder maintains the sample cartridge removable, transfers the memory content of the memory means obtained through the terminal for outside connection of the sample cartridge to the external CPU, and transfers the data sent from the external CPU to the memory means of the sample cartridge through the terminal for outside connection of the sample cartridge.

3. 发明专利

JP2005293865A Sample holder and sample tilt holder 有权
标题翻译：样品支架和样品倾斜支架
公开(公告)号：JP2005293865A
公开(公告)日：2005-10-20
申请号：JP2004102815
申请日：2004-03-31
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI , NISHIOKA HIDEO , SATO YASUHIKO , OKUNISHI EIJI , ENDO NORIAKI
IPC分类号： G01N1/32 , G01N1/28 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a sample holder for easily arranging a sample to a biaxial tilt holder.
SOLUTION: A rod-like introduction section 21 is formed so that it can be fitted to the goniometer of a transmission electron microscope. A chip-on cartridge 22 comprises a mounting section 23 and a shuttle (sample retaining section) 24. In the chip-on cartridge 22, a conventional chip-on cartridge is divided into two portions. One end of the mounting section 23 is formed so that it can be detachably mounted to the tip of the introduction section 21. The shuttle 24 is formed so that it can be detachably mounted to the other end of the mounting section 23. Therefore, a sample holder 20 shown in Fig. (b) can be obtained, by mounting the shuttle 24 to the mounting section 23 and by mounting the mounting section 23 to the tip of the introductions section 21.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供用于将样品容易地布置到双轴倾斜保持器的样品保持器。解决方案：形成杆状导入部21，使其能够配合到透射型电子显微镜的测角器上。芯片盒22包括安装部分23和梭子（样品保持部分）24。在芯片上的卡盘22中，常规的打码卡盒被分成两部分。安装部23的一端形成为能够可拆卸地安装在导入部21的前端。梭24形成为可拆卸地安装在安装部23的另一端。因此，图1所示的样品保持器20。（b）可以通过将梭24安装到安装部23并且将安装部23安装到引入部21的末端来获得。（C）版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2004198276A Method for fabricating sample for transmission electron microscope 有权
公开(公告)号：JP2004198276A
公开(公告)日：2004-07-15
申请号：JP2002367715
申请日：2002-12-19
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI , NISHIOKA HIDEO , SATO YASUHIKO , OKUNISHI EIJI , ENDO NORIAKI
IPC分类号： G01N1/06 , G01N1/28 , G01N1/32 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a method for fabricating a sample for a transmission electron microscope which easily fabricates the thin film sample with a desired cross section. SOLUTION: A sample block 1 cut from a sample raw material is placed on a placement face 2a of a sample base 2 so as to laterally turn a processed face of the sample block 1. The processed face of the sample block 1 is orthogonal to the placement face 2a. After the placement, the sample base 2 is mounted to a FIB and a thin film process for the sample block 1 is implemented. COPYRIGHT: (C)2004,JPO&NCIPI

5. 发明专利

JP2003007246A Electron microscope 审中-公开
标题翻译：电子显微镜
公开(公告)号：JP2003007246A
公开(公告)日：2003-01-10
申请号：JP2001189355
申请日：2001-06-22
申请人： Jeol Ltd , 日本電子株式会社
发明人： SUZUKI TOSHIAKI , SATO YASUHIKO
IPC分类号： G01N1/32 , G01N1/28 , H01J37/20 , H01J37/26 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To provide an electron microscope that significantly increases work efficiency.
SOLUTION: That part of an electron-optical lens barrel 20 of the transmission electron microscope, which has an objective lens 23 is mounted with at least two preprocessing chambers 28A and 28B. Electron-optical lens barrels 29A and 29B of a focused ion beam device are mounted on respective top lids of the preprocessing chambers. Walls of the pre-exhaust chambers 28A and 28B opposite to the electron-optical lens barrel 20 of the transmission electron microscope have respective holes 36A and 36B, in which sample holders 35A and 35B can be inserted. While an observed sample Sa is observed under the transmission electron microscope, an observed sample Sb is subjected to additional machining in the focused ion beam device. While the observed sample Sa is subjected to additional machining in the focused ion beam device, the observed sample Sb is observed under the transmission electron microscope.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供显着提高工作效率的电子显微镜。解决方案：具有物镜23的透射电子显微镜的电子光学镜筒20的一部分安装有至少两个预处理室28A和28B。聚焦离子束装置的电子光学镜筒29A和29B安装在预处理室的相应的顶盖上。与透射电子显微镜的电子光学透镜镜筒20相对的预排气室28A和28B的壁具有可插入样品保持器35A和35B的孔36A和36B。虽然在透射电子显微镜下观察到观察到的样品Sa，但是在聚焦离子束装置中对观察到的样品Sb进行附加的机械加工。在观察到的样品Sa在聚焦离子束装置中进行附加的加工时，在透射电子显微镜下观察观察到的样品Sb。

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