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1. 发明专利

JP2003007584A Method and system for manufacturing semiconductor device 有权
标题翻译：用于制造半导体器件的方法和系统
公开(公告)号：JP2003007584A
公开(公告)日：2003-01-10
申请号：JP2001185770
申请日：2001-06-20
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： YOSHITAKE YASUHIRO , MATSUMOTO SHUNICHI , MIWA TOSHIHARU , MIYAMOTO YOSHIYUKI
IPC分类号： G03F7/20 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To solve the problem of an advanced shrinkage device that a single aligner is used from the first step to the last step in order to avoid misalignment due to the difference of strain between exposing lenses but lowering in the availability of an expensive aligner due to the increase of work-in-process and the occurrence of waiting time blocks cost reduction.
SOLUTION: In the method for manufacturing a semiconductor device, strain of lens, coma and writing error of reticle are measured previously, the combination of an aligner and their correction values satisfying the regulation of the relevant process/product is calculated dynamically from shot size, device pattern and illumination conditions and then work using an aligner satisfying the regulation is designated.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：为了解决从第一步骤到最后一个步骤使用单个对准器的先进收缩装置的问题，以避免由于曝光透镜之间的应变差而导致的未对准，但是降低了昂贵的可用性由于工作中的增加和等待时间块成本降低的发生，对准器。解决方案：在半导体器件的制造方法中，先前测量了透镜的应变，光瞳的误差和写入误差，对于匹配器及其校正值的组合，满足相关工艺/产品的调节，从投射尺寸，指定设备图案和照明条件，然后使用满足规定的对准器进行工作。

2. 发明专利

JP2008161404A Magnetic resonance inspection device 有权
标题翻译：磁共振检测装置
公开(公告)号：JP2008161404A
公开(公告)日：2008-07-17
申请号：JP2006353697
申请日：2006-12-28
申请人： Hitachi Ltd , Hitachi Medical Corp , 株式会社日立メディコ , 株式会社日立製作所
发明人： NINOMIYA ATSUSHI , KASAI YOSHI , OCHI HISAAKI , TSUCHIHATA MASAYOSHI , MIYAMOTO YOSHIYUKI , NAGAI SHIZUKA
IPC分类号： A61B5/055 , G01R33/34
CPC分类号： G01R33/3415 , A61B5/055 , G01R33/34007 , G01R33/34084
摘要： PROBLEM TO BE SOLVED: To suppress the increase of the number of channels and to provide a reception coil for vertical magnetic field type MRI usable in a wide area. SOLUTION: A reception coil unit 500 includes a bed coil unit 600 for matching the longitudinal direction with the body axial direction of an inspection object 103 and an upper coil unit 700 detachably attached to the bed coil unit 600. The bed coil unit 600 is provided with a plurality of lower sub coils disposed at the lower part of a mounting surface 601, and the upper coil unit 700 is provided with a plurality of upper sub coils connected with the lower sub coils. The upper sub coil is divided into a flexible inner side support 20-1 covering the mounting surface 601 and a flexible outer side support 20-2 covering the outer side of the inner side support 20-1 and disposed. The upper sub coils and the lower sub coils are connected by attaching the upper coil unit 700 to the bed coil unit 600 to form two or more kinds of sub coils. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了抑制通道数的增加，并且提供可用于广域的垂直磁场型MRI的接收线圈。解决方案：接收线圈单元500包括用于使纵向方向与检查对象103的主体轴向匹配的床线圈单元600和可拆卸地附接到床线圈单元600的上线圈单元700.床线圈单元 600设置有设置在安装表面601的下部的多个下部子线圈，并且上部线圈单元700设置有与下部子线圈连接的多个上部子线圈。上副线圈分为覆盖安装面601的柔性内侧支撑20-1和覆盖内侧支撑件20-1的外侧的柔性外侧支撑20-2，并配置。上副线圈和下子线圈通过将上线圈单元700附接到床线圈单元600而连接，以形成两种或更多种子线圈。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2003332209A Method of manufacturing semiconductor device, and method, system, and program for diagnosing production line for semiconductor device 审中-公开
标题翻译：制造半导体器件的方法和用于诊断用于半导体器件的生产线的方法，系统和程序
公开(公告)号：JP2003332209A
公开(公告)日：2003-11-21
申请号：JP2002137278
申请日：2002-05-13
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： MIWA TOSHIHARU , MIZUMOTO HISASHI , TOKOROZUKI KAZUYUKI , MIYAMOTO YOSHIYUKI , YOKOUCHI TETSUJI
IPC分类号： G05B19/418 , G05B23/02 , H01L21/02 , H01L21/027
CPC分类号： Y02P90/14
摘要： PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing method and a method, a system, and a program for diagnosing a production line for a semiconductor device, which are capable of reducing a non-operating time of the production line by making a diagnosis of whether the kind of the semiconductor device the manufacturing process, or the manufacturing device causes a trouble or not in the semiconductor device manufacturing line.
SOLUTION: It is diagnosed in an inspection process that an off-specification product is caused by a manufacturing device or a process, and the above diagnosis is made by the use of inspection data on each process in the manufacturing lines of various kinds of semiconductor devices and the actual values of the manufacturing conditions under which the manufacturing device operates in the processes.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种用于诊断半导体器件的生产线的半导体器件制造方法和方法，系统和程序，其能够通过以下方式减少生产线的非工作时间对半导体器件制造线路中的半导体器件的种类或制造装置的故障进行诊断。
解决方案：在检验过程中诊断为脱离规格的产品是由制造装置或过程引起的，并且上述诊断是通过使用各种生产线中的每个工艺的检查数据进行的的半导体器件的制造条件的实际值和制造装置在该工艺中操作的制造条件的实际值。版权所有（C）2004，JPO

4. 发明专利

JP2003068599A Method for detecting abnormality of aligner and method for producing semiconductor using it 审中-公开
标题翻译：用于检测对准器异常的方法和使用其制造半导体的方法
公开(公告)号：JP2003068599A
公开(公告)日：2003-03-07
申请号：JP2001251145
申请日：2001-08-22
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： MIZUMOTO HISASHI , YOSHITAKE YASUHIRO , MATSUMOTO SHUNICHI , MIWA TOSHIHARU , MIYAMOTO YOSHIYUKI
IPC分类号： G03F9/00 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To find out the cause of an alignment error quickly and to take a countermeasure because it cannot be pursued although an alignment error can be detected by inspecting alignment after exposure and various causes of an alignment error are possible because some abnormality is occurring. SOLUTION: Measurements of alignment detected at the time of exposure are collected for each wafer and a decision is made whether an abnormality is present or not by performing operation. When a decision is made that an abnormality is present, abnormality is displayed on a living room terminal through a network and a countermeasure is taken by inspecting the cause of the abnormality.
摘要翻译：要解决的问题：为了快速找出对准错误的原因并采取对策，尽管通过检查曝光后的对准可以检测到对准误差，并且可能导致对准误差的各种原因，因为一些异常是发生。解决方案：对于每个晶片收集在曝光时检测到的取向的测量，并且通过执行操作来确定是否存在异常。当作出异常的判断时，通过网络在客厅终端上显示异常，并且通过检查异常的原因来采取对策。

5. 发明专利

JP2009045361A Magnetic resonance imaging apparatus 有权
标题翻译：磁共振成像装置
公开(公告)号：JP2009045361A
公开(公告)日：2009-03-05
申请号：JP2007216331
申请日：2007-08-22
申请人： Hitachi Ltd , Hitachi Medical Corp , 株式会社日立メディコ , 株式会社日立製作所
发明人： TSUCHIHATA MASAYOSHI , OCHI HISAAKI , NAGAI SHIZUKA , MIYAMOTO YOSHIYUKI , NINOMIYA ATSUSHI , KASAI YOSHI
IPC分类号： A61B5/055 , G01R33/34
摘要： PROBLEM TO BE SOLVED: To provide a magnetic resonance imaging apparatus having a receiving coil capable of imaging an optional cross section in a wide range such as a whole body at a high speed. SOLUTION: An inner coil unit 501, or a first coil layer, has a sensitivity distribution in the RL direction, is movable singularly, and is usable for a horizontal magnetic field type MRI apparatus and a vertical magnetic field type MRI apparatus. An inner coil unit 502 and an upper coil unit 503, or a second coil layer, and has a sensitivity distribution in the HF direction so that, when performing a parallel imaging executed by setting a phase encoding direction to the RL direction or the HF direction, this constitution can attain the high speed imaging by operating a corresponding coil layer on condition that the first coil layer and the second coil layer are formed and operated together. An external coil unit 504, or a third coil layer, has a sensitivity distribution in the AP direction. The first, second and third coil layers are combinedly operated to image the optional cross section in the wide range at the high speed. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种磁共振成像装置，其具有能够高速成像诸如全身的宽范围内的可选横截面的接收线圈。解决方案：内线圈单元501或第一线圈层在RL方向上具有灵敏度分布，可单独移动，并且可用于水平磁场型MRI设备和垂直磁场型MRI设备。内线圈单元502和上线圈单元503或第二线圈层，并且在HF方向上具有灵敏度分布，使得当通过将相位编码方向设置为RL方向或HF方向执行并行成像时这种结构可以在第一线圈层和第二线圈层一起形成和操作的条件下通过操作相应的线圈层而获得高速成像。外部线圈单元504或第三线圈层在AP方向上具有灵敏度分布。第一，第二和第三线圈层被组合地操作以在宽范围内以高速成像可选的横截面。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2000056824A PLANT AUTOMATIC OPERATION SUPPORT DEVICE 失效
公开(公告)号：JP2000056824A
公开(公告)日：2000-02-25
申请号：JP22562798
申请日：1998-08-10
申请人： HITACHI LTD
发明人： MIYAMOTO YOSHIYUKI , FUKAI MASAYUKI
IPC分类号： G05B23/02
摘要： PROBLEM TO BE SOLVED: To obtain the plant automatic operation support device which supports automatic operation in an actual plant and by a simulator. SOLUTION: An operation procedure is inputted to an operation procedure management part 6 in advance and when its document is clicked on a CRT 11, permission condition monitoring, operation commanding, and information display are performed by an interlock management part 8, an operation command output part 9, and a plant state management part 10 as to items where its information is supported, thereby controlling respective subloop controllers 3. Those data are transmitted through a network 4.

7. 发明专利

JPH1039071A CONTROLLER FOR REACTOR 失效
公开(公告)号：JPH1039071A
公开(公告)日：1998-02-13
申请号：JP19118096
申请日：1996-07-19
申请人： HITACHI LTD
发明人： ARITA SETSUO , MIYAMOTO YOSHIYUKI , FUKAZAWA YUKIHISA , ISHII YOSHIHIKO , ISHII KAZUHIKO
IPC分类号： G21C7/08 , G21D3/00 , G21D3/08
摘要： PROBLEM TO BE SOLVED: To obtain a controller by which a nuclear power plant can be controlled smoothly from a present state up to a desired value in every control mode when the nuclear power plant is started. SOLUTION: In the temperature-rise and pressure-rise control mode of a reactor, the deviation between target reactor-water temperature change rate and a reactor-water temperature change rate which is computed by an average-temperature-change-rate computing device 8 on the basis of the output signal of a reactor-water temperature detector 6 is found by an adder 7. A proportional integration computing operation is executed to the deviation by a PI computing unit 9. The deviation between its computed result and a neutron flux signal in which a logarithmic processing operation is executed to the output signal of a neutron detector 5 by a logarithmic computing unit 12 is found by an adder 11. In a control-rod-operation judgment device 14, a control-rod instruction which is used to operate a control rod on the basis of the magnitude of the deviation is output to a control-rod driving device 2. The initial value of an integrator 9B at the start of the control of the mode is made to agree with a logarithmic neutron flux signal as the output of the logarithmic computing unit 12 via a switch 10. Thereby, the control operation of the reactor is performed smoothly in the mode.

8. 发明专利

JPH104044A METHOD FOR DETECTING PATTERN, METHOD FOR DETECTING ALIGNMENT MARK AND OPTICAL APPARATUS USING THE METHODS 失效
公开(公告)号：JPH104044A
公开(公告)日：1998-01-06
申请号：JP15272396
申请日：1996-06-13
申请人： HITACHI LTD
发明人： KOMORIYA SUSUMU , NAGATSUKA TOSHIHARU , MIYAMOTO YOSHIYUKI , IWATA HISAFUMI , SUGA OSAMU , KUNIYOSHI SHINJI , IRIKITA NOBUYUKI , KATO TAKESHI
IPC分类号： G03F9/00 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To detect an alignment mark at high speed and with high reliability. SOLUTION: Seven areas A0 -A6 are defined so that an alignment mark 17 can be specified. A detecting image including on alignment mark 17 is obtained. The detecting image is scanned with keeping the position relation of the areas A0 -A6 and the correlation coefficient of the image signal is obtained at each scanning point. The scanning point on which the total of the correlation coefficients is maximum becomes the position of the alignment mark 17.

9. 发明专利

JPH0749265A VIBRATION MONITOR 失效
公开(公告)号：JPH0749265A
公开(公告)日：1995-02-21
申请号：JP19580893
申请日：1993-08-06
申请人： HITACHI LTD
发明人： MIYAMOTO YOSHIYUKI
IPC分类号： G01H11/08 , G01H13/00
摘要： PURPOSE:To enable the evaluation of vibration monitor loop soundness at the time of collecting vibration data. CONSTITUTION:A signal caught by a vibration detecting sensor is amplified by a preamplifier and inputted to a vibration monitoring gauge 1. The dominant frequency of the vibration signal is detected by a dominant output frequency detecting storage circuit 8 and compared with the theoretical value, computed by a dominant output frequency computing circuit 9, by a comparing circuit 10. The resonant frequency of the compared vibration data is detected by a dominant vibration output analyzing circuit 11, and a filter 6 for the appropriateness of this frequency and the removal of resonant frequency is set.

10. 发明专利

JPH06181244A METHOD AND APPARATUS FOR INSPECTION OF SEMICONDUCTOR DEVICE 失效
公开(公告)号：JPH06181244A
公开(公告)日：1994-06-28
申请号：JP35306992
申请日：1992-12-11
申请人： HITACHI LTD
发明人： SHIGYO YOSHIHARU , MIYAMOTO YOSHIYUKI , OSHIMA TAKAYUKI
IPC分类号： H01L21/66 , H01L21/82
摘要： PURPOSE:To reduce time for inspection by converting a position information based on a logic adress arrangement of the first and last failure cells regarding a failure cell group into a position information formed by a substantial adress arrangement based on a simple layout information. CONSTITUTION:A means 21 for compressing defective cell position information compresses a position information on a failure cell group in which at least 2 continue on the same line and the same row into only position information on the first and last defective cells. Meanwhile, a simple layout information generating device 5 generates simple layout information according to the information on the origin of arrangement, the information on the position of cells from the origin, and the information on the direction of arrangement of cells out of the layout information on a semiconductor device. In a defective cell position information converting means 7, the position information based on logic adress arrangement of the first and last defective cells is converted into position information based substantial adress arrangement based on the simple layout information. Next, a defective cell automatic arrangement means 12 arranges the first and last defective cells within a visual field of a detective cell observing device 13 automatically.

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