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1. 发明专利

JPH06295855A SIGNAL PERIOD DETECTION METHOD AND PROJECTION ALIGNER EMPLOYING IT 失效
公开(公告)号：JPH06295855A
公开(公告)日：1994-10-21
申请号：JP8176893
申请日：1993-04-08
申请人： HITACHI LTD
发明人： WATANABE MASAHIRO , OSHIDA YOSHITADA , FUJII KEN , INAGAKI AKIRA , NINOMIYA HIROSHI
IPC分类号： G01B11/00 , G01B11/26 , G01B11/30 , G03F7/20 , G03F9/00 , H01L21/027 , H01L21/30
摘要： PURPOSE:To allow accurately controlled exposure on the surface of a wafer or the like within the focal point margin of a projection lens by detecting the period of a periodically variable signal using a specific method thereby detecting the average height and/or the inclination of an exposure region highly accurately and then controlling the posture of a table based on the information thereof. CONSTITUTION:Periodically variable signals are subjected to discrete Fourier transform and a peak position is determined for an approximation curve determined by a sample point providing a maximum value at the sample points in the vicinity of a spectrum corresponding to the period of the signal and at least two points on the opposite sides of the sample point. The peak value is employed as a true peak position in the detection of the period of signal. A coherent light is split into two, for example, and one of them is projected obliquely onto the surface of an object 4. Reflected light from the object 4 interfers with the other coherent light to produce interference pattern information which is employed in the detection of the height and/or the inclination of the object 4.

2. 发明专利

JPH01136582A SPEED CONTROLLER 失效
公开(公告)号：JPH01136582A
公开(公告)日：1989-05-29
申请号：JP29409287
申请日：1987-11-24
申请人： HITACHI LTD
发明人： SAITOU TSUTOMU , FUJII KEN
IPC分类号： G05D13/62 , H02P25/098 , H02P29/00
摘要： PURPOSE:To perform vibration suppressing control economically over a wide range, by feeding a difference between a signal obtained by integrating output from a load acceleration detector and an output from a drive speed detector back to an input of a servo amplifier. CONSTITUTION:A motor 2 for driving a moving table 4 through a coupling and a feed screw 3 is driven through a speed control system comprising a servo amplifier 1, a motor 2 and a tacho-generator 5 with a speed following up a speed command VC. A difference (VL$-VD) between a load speed VL and a drive speed VD is applied through an amplifier 7 and a filter 8 to a control input terminal. Consequently, vibration of the moving table 4 is suppressed, resulting in smooth driving.

3. 发明专利

JPS6286319A AUTOMATIC FOCUS ADJUSTING DEVICE 失效
公开(公告)号：JPS6286319A
公开(公告)日：1987-04-20
申请号：JP22678085
申请日：1985-10-14
申请人： HITACHI LTD
发明人： FUJII KEN , SAITOU TSUTOMU
IPC分类号： G02B7/09 , G02B7/28 , G03F7/20 , H01L21/30
摘要： PURPOSE:To prevent a reference focus position from partial increase of frictional force and to attain stably high positioning accuracy over a long period by executing the self-cleaning operation of a sample table more than a normal operating range. CONSTITUTION:An upper limit switch 25, a reciprocating running control circuit 26 and a C terminal of an analog switch 27 are added. The upper limit switch 25 is attached so as to be contacted with a nut 16 and driven from close to open when the sample table 12 reaches the upper limit of the movable range. The control circuit 26 can reciprocate the sample table 12 between two upper and lower limit positions when the analog switch 27 is selected to the C side by using the contact outputs of the upper limit switch 25 and a lower limit switch 24.

4. 发明专利

JPS61260309A POSITIONING CONTROLLER 失效
公开(公告)号：JPS61260309A
公开(公告)日：1986-11-18
申请号：JP10199685
申请日：1985-05-14
申请人： HITACHI LTD
发明人： MASAKI RYOZO , OMAE TSUTOMU , FUJII KEN , SAITOU TSUTOMU
IPC分类号： G05D3/12 , G05D3/14
摘要： PURPOSE:To perform positioning operation while suppressing vibration at any time by inputting the output of a positioning circuit to a limiter so that a value close to the drive input limit value of a motor is a limit value and determining an input to be supplied to the motor by using the output of the limiter and the output of a speed vibration suppressing circuit. CONSTITUTION:A driving shaft 2 is rotated by driving the motor 1 to position an XY stage 3, whose position thetaS and speed omegaS are detected by a stage detector 4. Further, the position thetaM and speed omegaM of the motor are detected by a motor detector 5 and those values thetaS and omegaS, and thetaM and omegaM detected by those detectors 4 and 5 are fed back to a positioning control circuit 6. The positioning control circuit 6 uses the position command thetaS supplied from a position command circuit 7 and the detected values thetaS and omegaS, and thetaM and omegaM which are fed back to perform positioning control arithmetic, thereby determining electric power ia to be inputted to the motor 1. Namely, the motor current ia is regarded as a manipulated variable.

5. 发明专利

JPS61220327A REDUCTION PROJECTION EXPOSURE EQUIPMENT 失效
公开(公告)号：JPS61220327A
公开(公告)日：1986-09-30
申请号：JP6167185
申请日：1985-03-26
申请人： HITACHI LTD
发明人： SHIROKIBARA MANABU , FUJII KEN , TSUYUKI HISAMASA , SAITOU TSUTOMU
IPC分类号： G03F7/20 , G03F9/00 , G05D3/12 , H01L21/027 , H01L21/30
摘要： PURPOSE:To increase the alignment accuracy of the stage without dependence on the friction force, by amplifying the deviation between the present position and the desired position, driving the servo-motor, setting the position of stage to the desired position, operating the correction values to be added according to the contents of the memory, and adding them to the designation values. CONSTITUTION:The stage 1 is driven by the DC servo-motor 2 and the ball screw 3. The position of the stage is laser interferometer. The electronic computer 5 sends out the desired position designation signal 6, and indicates the desired position of the stage 1. The deviation between the designation signal and the present position signal 7 as the output of the measuring machine 4 applying the laser interferometer is digitally operated by the operating circuit 8, and the position deviation signal 9 is delivered to the DC servo-motor 2 through the adder 10, the D-A converter 11, the operational amplifier 12 and the servo-amplifier 13. When the position deviation signal 9 is inputted, the electronic computer 5 sends the command signal 16 to store the alignment error data to the microprocessor 15, which stores them in the memory 17. When the command signal 18 to make correction is outputted, the microprocessor 15 reads out the previous alignment error data, and calculates the correction values, which are outputted to the adder 10.

6. 发明专利

JPS59214283A Gas laser device 失效
标题翻译：气体激光器件
公开(公告)号：JPS59214283A
公开(公告)日：1984-12-04
申请号：JP8771983
申请日：1983-05-20
申请人： Hitachi Ltd
发明人： FUJII KEN , KURAMOCHI YOSHINORI , KIHANA HIROMITSU , KUGAYA TAKASHI
IPC分类号： H01S3/097 , H01S3/104 , H01S3/10 , H01S3/223
CPC分类号： H01S3/097
摘要： PURPOSE:To lower the power loss at the starting of discharge by mounting an auxiliary anode between an anode and a cathode and generating seed discharge between the auxiliary anode and the cathode. CONSTITUTION:An anode 4 and a cathode 5 are mounted into a laser tube 1, and connected to a constant-current high-voltage pulse source 11 through a ballast resistor 10. An auxiliary anode 21 is set up between the anode 4 and the cathode 5, and a capacitor C and a resistor R are connected in series between the auxiliary anode and the anode 4. When pulses are transmitted from a pulse generator 12, output voltage from the constant-current light-voltage pulse power supply 11 begins to rise. The potential of the anode 4 and auxiliary anode 21 rises at the same value, seed discharge is formed between the auxiliary anode 21 and the cathode 5 first, and main discharge is generated between the anode 4 and the cathode 5 when output voltage from the power supply 11 further rises. Beakdown voltage can be lowered by mounting the auxiliary anode 21.
摘要翻译：目的：通过在阳极和阴极之间安装辅助阳极并在辅助阳极和阴极之间产生种子放电来降低放电开始时的功率损耗。构成：将阳极4和阴极5安装到激光管1中，并通过镇流电阻器10连接到恒流高压脉冲源11.辅助阳极21设置在阳极4和阴极之间 5，电容器C和电阻R串联在辅助阳极和阳极4之间。当脉冲从脉冲发生器12传输时，来自恒流电压脉冲电源11的输出电压开始上升。阳极4和辅助阳极21的电位上升到相同的值，首先在辅助阳极21和阴极5之间形成种子放电，并且当来自电源的输出电压时阳极4和阴极5之间产生主放电供应11个进一步上涨。可以通过安装辅助阳极21来降低击穿电压。

7. 发明专利

JPS5937942A Multi-joint reflective mirror type manipulator 失效
标题翻译：多重反射镜式操纵器
公开(公告)号：JPS5937942A
公开(公告)日：1984-03-01
申请号：JP14617182
申请日：1982-08-25
申请人： Hitachi Ltd
发明人： FUJII KEN , KUGAYA TAKASHI , SHIMADA TAMOTSU
IPC分类号： A61B18/20

8. 发明专利

JPH06244081A SURFACE CONFIGURATION DETECTION METHOD AND PROJECTION EXPOSURE DEVICE 失效
公开(公告)号：JPH06244081A
公开(公告)日：1994-09-02
申请号：JP2806493
申请日：1993-02-17
申请人： HITACHI LTD
发明人： NAKAYAMA YASUHIKO , WATANABE MASAHIRO , OSHIDA YOSHITADA , YOSHIDA MINORU , FUJII KEN
IPC分类号： G03F7/207 , G03F9/00 , H01L21/027 , H01L21/30
摘要： PURPOSE:To improve detection accuracy of tilt, height, etc., of a sample surface by imaging reflection light from a sample surface at a position of conjugate with a sample surface and by detecting tilt, height, etc., of a sample surface by casting the imaged light on the sample surface again to guide its reflection light to a photodetector and by detecting tilt, height, etc., of the sample surface based on information of interference fringes on the photodetector. CONSTITUTION:A reticle 9 is illuminated by an exposure illumination system 81 and its circuit pattern is imaged on a surface of a wafer (detection object) 4 on a stage 7 by a reduction lens 8. A surface detection system 2 detects and processes surface configuration information of a wafer. Object light 16 is cast on the wafer 4 at an incidence angle of 88 deg. and its reflection light and reference beam 17 are reflected by a mirror 19, reflected again by a mirror 22 through lenses 20, 21 to make them move reversely in the original optical path and reflected by a beam splitter 14 in a direction of prisms 23, 23'. The prisms 23, 23' enlarge a beam interval and provide a specified angle simultaneously to inject beam to a lens 24. Two beams projected from the lens 24 cross each other at a position A which is conjugate with a reflection surface of the wafer 4 and interfere there.

9. 发明专利

JPH06163360A DETECTION METHOD OF INCLINATION AND HEIGHT AND PROJECTION EXPOSURE DEVICE USING THEREOF 失效
公开(公告)号：JPH06163360A
公开(公告)日：1994-06-10
申请号：JP30912392
申请日：1992-11-19
申请人： HITACHI LTD
发明人： OSHIDA YOSHITADA , FUJII KEN , WATANABE MASAHIRO , NAKAYAMA YASUHIKO , INAGAKI AKIRA , FUNATSU RYUICHI
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027 , H01L21/30
摘要： PURPOSE:To remove data of a part which provides peculiar error and to reduce error of inclination and height of a wafer by calculating inclination and height of a detection object by using only a detection value of inclination and height of a wafer whose detection value of inclination and height is within a predetermined allowable range. CONSTITUTION:When a thickness of a photoresist on a wafer surface 41 changes slightly, a phase of reflection light changes and looks like projections A1 to A3. Here, a longitudinal axis DELTAZ is a height of a wafer surface obtained by a phase of interference fringe and the projections A1, A2 show the case of different positions and the projection A3 shows the case of different heights. If interference information of the projections A1 to A3 is included, inclination of the wafer 4 is calculated like lines a1a1', a2a2', a3a3'. Meanwhile, if the projections A1 to A3 are removed, inclination is hh'. Since hh' is a correct position of the wafer surface 41, it is understood that large error is caused by the existence of the projections A1 to A3. Therefore, calculation is carried by removing the projections A1 to A3. Thereby, detection accuracy of inclination and height can be improved.

10. 发明专利

JPH0697042A BEAM SPLITTER 失效
公开(公告)号：JPH0697042A
公开(公告)日：1994-04-08
申请号：JP24760492
申请日：1992-09-17
申请人： HITACHI LTD
发明人： ASAI SUUYOU , FUNATSU RYUICHI , FUJII KEN , NAKAYAMA YASUHIKO
IPC分类号： G01B11/02 , G01B11/26 , G01J9/02 , H01L21/027 , H01L21/30
摘要： PURPOSE:To increase the accuracy of angle of beams without any high-precision assembly work, by sticking a parallel plate of glass to the outgoing surface of a beam splitting prism form two splitted beams are output. CONSTITUTION:When torsion is present in two output surface of a triangular prism 2 and rhombus prism 1, angular errors are brought about in the two beams. Therefore, the triangular prism 2 and the rhombus prism 1 are bonded to each other, and besides, a parallel plate of glass 27 is bonded to the output surface with a bonding agent 28 of the same refractive index as that of glass. Then the torsion of the output surface is eliminated, so that the angular errors of beams caused thereby are reduced. Thereby, the accuracy of angle for parallelism, orthogonality and the like of the beams of a measuring optical system in which a beam is splitted into plural beams for use can be increased.

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