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1. 发明专利

JP2011090973A Charged particle beam apparatus, and display method of three dimensional information in charged particle beam apparatus 有权
标题翻译：充电颗粒光束装置和充电颗粒光束装置中三维信息的显示方法
公开(公告)号：JP2011090973A
公开(公告)日：2011-05-06
申请号：JP2009245029
申请日：2009-10-26
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YAGUCHI NORIE , NAGAKUBO KOHEI , AZUMA JUNZO , WATABE AKIRA
IPC分类号： H01J37/20 , H01J37/24
CPC分类号： H01J37/26 , G01N23/2204 , G01N23/2251 , H01J37/18 , H01J37/20 , H01J2237/006 , H01J2237/2003 , H01J2237/24578 , H01J2237/2608 , H01J2237/2611
摘要： PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus capable of capturing in three dimensions changes of a sample due to gas atmosphere, light irradiation and heating or the like without exposing to the atmosphere.
SOLUTION: The apparatus includes a sample table rotatable with a rotating axis perpendicular to an irradiation direction of electron beams as a center, and a sample holder which can form an airtight chamber around the sample table. The sample can be chemically-reacted in an arbitrary atmosphere to enable to perform a three-dimensional analysis on this reaction. Further, the three-dimensional analysis can be performed on a sample likely to be changed in the atmosphere without exposing the sample to the atmosphere.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够三维捕获由于气体气氛，光照射和加热等而导致的样品的变化而不暴露于大气的带电粒子束装置。解决方案：该装置包括可以垂直于作为中心的电子束的照射方向的旋转轴旋转的样品台，以及可以在样品台周围形成气密室的样品保持器。样品可以在任意气氛中进行化学反应，以便对该反应进行三维分析。此外，可以对在大气中可能变化的样品进行三维分析，而不将样品暴露在大气中。版权所有（C）2011，JPO＆INPIT

2. 发明专利

JP2003279321A Standard specimen for small dimension calibration 审中-公开
标题翻译：用于小尺寸校准的标准样本
公开(公告)号：JP2003279321A
公开(公告)日：2003-10-02
申请号：JP2002079917
申请日：2002-03-22
申请人： Hitachi High-Technologies Corp , Hitachi Sci Syst Ltd , 株式会社日立サイエンスシステムズ , 株式会社日立ハイテクノロジーズ
发明人： MATSUDA KOICHI , YAMADA MITSUHIKO , KUROSAWA KOICHI , NAGAKUBO KOHEI
IPC分类号： G01B11/02
摘要： PROBLEM TO BE SOLVED: To easily confirm forming method of pattern pitch with small uncertainty, a means for giving a standard value and secureness of traceability of specific pattern pitch.
SOLUTION: A square pattern is formed by using lithography method, a standard value is given with a length measurement SEM of which the pattern pitch is calibrated with a standard value and uncertainty is added. For confirming the chain of traceability of a specific pattern, discrimination mark or number was given to all pattern pitches, chips and wafers.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：为了容易地确认具有小的不确定性的图案间距的形成方法，提供了具体图案间距的标准值和可追溯性的确保性的装置。解决方案：通过使用平版印刷法形成方形图案，标准值用长度测量SEM给出，其中图案间距用标准值校准，并且添加不确定性。为了确认特定图案的可追溯性链，对所有图案间距，芯片和晶片给出了辨别标记或数字。版权所有（C）2004，JPO

3. 发明专利

JP2008288161A Sample board for heating microsample 有权
标题翻译：加热微波炉样品板
公开(公告)号：JP2008288161A
公开(公告)日：2008-11-27
申请号：JP2007134507
申请日：2007-05-21
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： NAGAKUBO KOHEI , TANIGAKI TOSHIAKI , ITO KATSUJI , KANEMURA TAKASHI , ASAKAWA TAKAYUKI
IPC分类号： H01J37/20
CPC分类号： H01J37/26 , H01J37/20 , H01J2237/2001 , H01J2237/31745
摘要： PROBLEM TO BE SOLVED: To realize a sample board for heating a microsample capable of efficiently heating the microsample and correctly observing it.
SOLUTION: A microsample mounting part 1 is a coil-shaped heating part, and both the end parts are fixed to a sample board base 2 for heating the microsample. The base 2 is separable at a part of a base notched line 3 into two members 2a, 2b, and one end part of the mounting part 1 is fixed to the member 2a, and the other end part to the member 2b. A sample which is micro-sampled is mounted on the mounting part 1. The sample board for heating the microsample is removed from the tip part of a holder 4 and is placed on a stage for the sample board.Current is supplied to the microsample-mounting part 1 via the members 2a, 2b, and the micro sample 6 is observed, while heating it.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：实现用于加热能够有效加热微型样品并正确观察微量样品的微型样品的样品板。解决方案：微型样品安装部件1是线圈状加热部件，并且两个端部部件固定到样品板基座2上，用于加热微型样品。基部2在基部切口线3的一部分处分离为两个部件2a，2b，并且安装部1的一个端部固定到部件2a，另一个端部固定到部件2b。将微采样品安装在安装部分1上。用于加热微型样品的样品板从保持器4的末端部分移除，并放置在样品板的台上。在加热的同时观察安装部件1经由构件2a，2b和微型样品6。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2007328038A Dimension calibration sample for microscope 审中-公开
标题翻译： MICROSCOPE的尺寸校准样品
公开(公告)号：JP2007328038A
公开(公告)日：2007-12-20
申请号：JP2006157523
申请日：2006-06-06
申请人： Hitachi High-Tech Science Systems Corp , Hitachi High-Technologies Corp , 株式会社日立ハイテクサイエンスシステムズ , 株式会社日立ハイテクノロジーズ
发明人： NAGAKUBO KOHEI , AKUTSU SAORI
IPC分类号： G02B21/34 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a dimension calibration sample for a microscope which can be used in common to microscopes to mainly perform measurement of several μm to hundreds μm.
SOLUTION: The dimension calibration sample for the microscope is equipped with: a transparent substrate; a transparent or translucent first conductive film formed on the transparent substrate; and an opaque or translucent second conductive film formed on the first conductive film. A dimension calibration pattern is formed of the second conductive film, and the first conductive film is exposed at a part where the dimension calibration pattern does not exist.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提供显微镜的尺寸校准样品，其可以与显微镜共同使用以主要进行几μm至数百μm的测量。
解决方案：显微镜的尺寸校准样品配备有：透明基板; 形成在透明基板上的透明或半透明的第一导电膜; 以及形成在第一导电膜上的不透明或半透明的第二导电膜。尺寸校准图案由第二导电膜形成，并且第一导电膜在不存在尺寸校准图案的部分处露出。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2004177149A Micro-dimensional standard sample and its manufacturing method 有权
公开(公告)号：JP2004177149A
公开(公告)日：2004-06-24
申请号：JP2002340468
申请日：2002-11-25
申请人： Hitachi High-Technologies Corp , Hitachi Sci Syst Ltd , 株式会社日立サイエンスシステムズ , 株式会社日立ハイテクノロジーズ
发明人： NAGAKUBO KOHEI , YAMADA MITSUHIKO , KUROSAWA KOICHI
IPC分类号： G01B15/00 , B23K26/00 , G01D18/00 , G01N1/28 , G01Q40/02 , H01J37/20 , H01J37/28 , H01J49/00
CPC分类号： H01J37/28 , H01J2237/2816 , H01J2237/2826
摘要： PROBLEM TO BE SOLVED: To stick an index for indicating the direction of a diffraction grating pattern to a chip itself to judge the pattern direction accurately. SOLUTION: A shape of the chip is made anisotropic, or a ruled line and a mark are formed on the chip, so as to decide the direction of the diffraction grating pattern direction by an appearance of the chip. Calibration work is executed accurately and surely because the direction of the diffraction grating pattern is able to be surely determined to attach the chip onto a sample table. COPYRIGHT: (C)2004,JPO

6. 发明专利

JP2013152831A Sample holder for electron microscope 有权
标题翻译：电子显微镜样品座
公开(公告)号：JP2013152831A
公开(公告)日：2013-08-08
申请号：JP2012012610
申请日：2012-01-25
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： TERADA SHOHEI , TANIGUCHI YOSHIFUMI , NAGAKUBO KOHEI
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J37/26 , H01J37/28 , H01J2237/2007 , H01J2237/201 , H01J2237/20214 , H01J2237/2802
摘要： PROBLEM TO BE SOLVED: To provide a sample holder for electron microscope that has a plurality of sample tables at least one of which is movable and enables a plurality of samples for transmission type electron microscope to be manufactured by a converged ion beam device.SOLUTION: A sample holder 1 is provided with a holder tip opening part 9 at a tip part. Further, the sample holder 1 has a knob 5, a rotating mechanism 6, a rough moving mechanism 7, and a connector 8 at a rear end part. With the knob 5 pressed, the rotating mechanism 6 is released from being fixed and the rear end part and the tip part of the sample holder rotate from the rotating mechanism 6. The rotating mechanism can rotate an arrangement of samples when an observation is made through the transmission type electron microscope and when the samples for transmission type electron microscope are manufactured by the converged ion beam device. Further, sample tables can be moved by the rough moving mechanism 7 and a fine moving mechanism 119.
摘要翻译：要解决的问题：提供一种用于电子显微镜的样品架，其具有多个样品台，其中至少一个是可移动的，并且能够通过会聚离子束装置制造用于透射型电子显微镜的多个样品。解决方案：样品保持器1在尖端部设置有保持器顶端开口部9。此外，样品保持器1在后端部具有旋钮5，旋转机构6，粗略移动机构7和连接器8。在按下旋钮5的同时，旋转机构6被固定，并且样品保持器的后端部分和末端部分从旋转机构6旋转。当通过观察进行观察时，旋转机构可以旋转样品的布置透射型电子显微镜和透射型电子显微镜的样品由会聚离子束装置制造时。此外，样品台可以通过粗移动机构7和细移动机构119移动。

7. 发明专利

JP2010003617A Sample stand, sample rotating holder, construction method of sample stand, and sample stand construction method, and test piece analyzing method 有权
标题翻译：样品台，样品旋转支架，样品台的构造方法和样品架构造方法及测试分析方法
公开(公告)号：JP2010003617A
公开(公告)日：2010-01-07
申请号：JP2008163141
申请日：2008-06-23
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YAGUCHI NORIE , UENO TAKEO , NAGAKUBO KOHEI
IPC分类号： H01J37/20 , G01N1/28 , H01J37/22 , H01J37/26 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To mount easily a test piece to a rotating shaft of a sample stand and carry out observation and analysis precisely in all rotation angles in a tomography method.
SOLUTION: This sample rotating holder has a sample stand used also for an electron microscope and has a globe at the tip of test piece mounting side on the axial center of the sample stand, and a powder test piece is installed efficiently on the center of an rotating shaft. Thereby, the positioning of an image obtained at the time of three-dimension reconstitution can be performed precisely at rotating angles of the sample rotating holder and the sample stand, and the three-dimensional reconstitution image can be obtained in high precision.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：将测试片容易地安装到样品台的旋转轴上，并且在断层摄影方法中以所有旋转角度精确地进行观察和分析。解决方案：该样品旋转支架具有用于电子显微镜的样品台，并且在试样台的轴心处的试片安装侧的前端具有球状体，并且将粉末试验片有效地安装在旋转轴的中心。由此，可以在样品旋转保持架和样品台的旋转角度精确地进行三维重构时获得的图像的定位，并且可以高精度地获得三维重构图像。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2011175809A Electron microscope, and sample holder 有权
标题翻译：电子显微镜和样品座
公开(公告)号：JP2011175809A
公开(公告)日：2011-09-08
申请号：JP2010038105
申请日：2010-02-24
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YAGUCHI NORIE , NAGAKUBO KOHEI , WATABE AKIRA
IPC分类号： H01J37/20 , H01J37/18
CPC分类号： H01J37/26 , H01J37/20 , H01J2237/006 , H01J2237/2003 , H01J2237/206 , H01J2237/2065
摘要： PROBLEM TO BE SOLVED: To provide a sample holding device for an electron beam device capable of observing reaction between a sample and a gas. SOLUTION: The sample holder for an electron beam device includes a cell that has diaphragms disposed above and below the sample, and isolates a gas atmosphere from a vacuum atmosphere within a sample chamber and hermetically seals an atmosphere around the sample, a gas supply device for supplying a gas into the cell, and an exhauster for exhausting the gas therefrom. The gas exhauster includes an openable exhaust hole which is provided to the sidewall of the sample holder to pass through the gas exhaust pipe provided within the cell and the cell. The material of the diaphragm is an amorphous film constituted of a light element such as carbon film, oxide film, and nitride film through which an electron beam can pass through. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够观察样品和气体之间的反应的电子束装置的样品保持装置。解决方案：用于电子束装置的样品架包括在样品上方和下方设有隔膜的隔膜，并将气体气氛从样品室内的真空气氛中分离出来并气密地密封样品周围的气氛，气体用于将气体供应到电池中的供应装置，以及用于从其中排出气体的排气器。气体排出器包括可开放的排气孔，其设置在样品保持器的侧壁上，以通过设置在电池和电池内的排气管。隔膜的材料是由诸如碳膜，氧化膜和电子束可以通过的氮化物膜的光元件构成的非晶膜。版权所有（C）2011，JPO＆INPIT

9. 发明专利

JP2010277721A Rotation center search method and rotation center search system of sample holder for charged particle beam device 有权
标题翻译：旋转中心搜索方法和旋转中心搜索系统用于充电粒子束装置的样品夹
公开(公告)号：JP2010277721A
公开(公告)日：2010-12-09
申请号：JP2009126715
申请日：2009-05-26
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SATO TAKAHIRO , KONNO MITSURU , NAGAKUBO KOHEI
IPC分类号： H01J37/317 , H01J37/20
摘要： PROBLEM TO BE SOLVED: To provide a rotation center searching method and a rotation center searching system for specifying a rotation center position of a sample pedestal. SOLUTION: A preset observation point 10 is provided on a plane part 42 of the sample pedestal 41 having the plane part 42 for fixing a sample 7 as an object for observation. While the sample pedestal 41 is rotated in a direction along the plane part 42, a coordinate at each angle of the observation point 10 is memorized. A Fig.11 is drawn based on the memorized coordinates. A rotation center in the plane part 42 of the sample pedestal 41 is specified from points inside the drawn Fig.11. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于指定样品台的旋转中心位置的旋转中心搜索方法和旋转中心搜索系统。解决方案：在具有用于固定作为观察对象的样品7的平面部42的样品台41的平面部42上设置预设观察点10。当样本基座41沿着平面部分42的方向旋转时，存储观察点10的每个角度的坐标。 A图11基于存储的坐标绘制。样品基座41的平面部42中的旋转中心由绘制的图11内的点指定。版权所有（C）2011，JPO＆INPIT

10. 发明专利

JP2014203594A 電子顕微鏡有权
标题翻译：电子显微镜
公开(公告)号：JP2014203594A
公开(公告)日：2014-10-27
申请号：JP2013077175
申请日：2013-04-02
申请人：株式会社日立ハイテクノロジーズ , Hitachi High-Technologies Corp
发明人： NAGAOKI ISAO , OYAGI TOSHIYUKI , MATSUMOTO HIROAKI , NAKANO YASUTAKA , SATO TAKASHI , NAGAKUBO KOHEI
IPC分类号： H01J37/16 , H01J37/18 , H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/06 , H01J37/18 , H01J37/28 , H01J37/285 , H01J37/295 , H01J2237/006 , H01J2237/182 , H01J2237/24475 , H01J2237/2448 , H01J2237/2802
摘要：【課題】電圧の印加が必要な検出器を利用してガス雰囲気におかれた試料の顕微鏡像が得られる電子顕微鏡を提供すること。【解決手段】電子銃1からの電子線が試料70に照射されることで発生する電子を検出する2次電子検出器51と、その検出器の出力に基づいて試料の2次電子東を表示するモニタ39と、試料にガスを放出するためのガス導入装置60と、ガス導入装置によるガス放出時に、2次電子検出器が設置された中間室74内の真空度が設定値P1未満に保持されるようにガス導入装置によるガス放出量を制御するガス制御装置81とを備える。【選択図】図3
摘要翻译：要解决的问题：提供一种电子显微镜，其中通过利用需要电压印迹的检测器获得放置在气体气氛中的样品的显微镜图像。解决方案：电子显微镜包括：二次电子检测器51，其检测通过从电子枪1向电子束照射样品70产生的电子; 显示器39，其基于检测器的输出显示样本的二次电子图像; 用于向样品发射气体的气体引入装置60; 以及气体控制装置81，其通过气体导入装置控制气体排出量，使得在其中安装二次电子检测器的中间室74中的真空度在气体排放时保持小于设定值P1 由气体引入装置。

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