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1. 发明专利

JP2011166065A Reticle pod 有权
标题翻译： RETICLE POD
公开(公告)号：JP2011166065A
公开(公告)日：2011-08-25
申请号：JP2010030093
申请日：2010-02-15
申请人： Gugeng Precision Industrial Co Ltd , 家登精密工業股▲ふん▼有限公司
发明人： LU PAO-YI , WANG SHENG HUNG
IPC分类号： H01L21/673
摘要： PROBLEM TO BE SOLVED: To provide a reticle pod in which a plurality of support members having elasticity are disposed at contact locations with a reticle. SOLUTION: The reticle pod comprises an upper lid body, a lower lid bode, and a plurality of support components arranged on the four corners of the lower lid body. The support component comprises a seat body which is made by integral and mutual coupling by a vertical method and which has a fastening fixture on both ends thereof; a pair of elastic members each arranged on the seat body, and extending one step part in the vertical direction of the seat body and thereafter further extending another step part along the inward lateral direction of the seat body; a pair of guiding members each coupled with the lateral-direction extending step part of the elastic member, further extending a protrusion part in the vertical direction and forming a first inclined surface and a second inclined surface on the side surface of the protrusion part inside the seat body; and a support bottom plate whose first end and second end are coupled with the second inclined surface of the guiding member and on whose third end position a support post is arranged. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种掩模版荚，其中具有弹性的多个支撑构件设置在与掩模版的接触位置处。解决方案：光罩盒包括上盖体，下盖波纹管和布置在下盖体的四个角上的多个支撑部件。所述支撑部件包括座体，所述座体通过垂直方式通过整体和相互联接而制成，并且其两端具有紧固固定件; 一对弹性构件，每个弹性构件布置在所述座椅主体上，并且在所述座椅主体的垂直方向上延伸一个台阶部分，然后沿着所述座椅主体的向内侧方向进一步延伸另一台阶部分; 一对引导构件，每个引导构件与弹性构件的横向延伸台阶部分相配合，在竖直方向上进一步延伸突出部分，并且在突出部分的侧表面内形成第一倾斜表面和第二倾斜表面座椅身体以及支撑底板，其第一端和第二端与引导构件的第二倾斜表面联接，并且其第三端位置被布置成支撑柱。版权所有（C）2011，JPO＆INPIT

2. 发明专利

JP2010263185A Wafer carrier 有权
标题翻译：散热器
公开(公告)号：JP2010263185A
公开(公告)日：2010-11-18
申请号：JP2010025418
申请日：2010-02-08
申请人： Gugeng Precision Industrial Co Ltd , 家登精密工業股▲ふん▼有限公司
发明人： CHIU MING-CHIEN , LU PAO-YI , LIN CHIH-MING , HUNG KUO-CHUN
IPC分类号： H01L21/673 , B65D85/86
CPC分类号： H01L21/67369 , H01L21/67373 , Y10S206/818
摘要： PROBLEM TO BE SOLVED: To provide a wafer carrier having excellent airtight effect. SOLUTION: The wafer carrier includes a container which has one side face forming an opening and in the inside of which a plurality of slots capable of storing a plurality of wafers are provided, and a door is used and joined to the opening of the container to protect the wafers in the container. The container is characterized in that a magnetic member is formed at the inner edge of the opening and a magnet is disposed at the inner surface of the door facing the magnetic member, and the magnet is disposed in a magnetic yoke with recessed cross section. Accordingly, the magnet on the door attracts the magnetic member at the opening of the container and the door is lock-fastened to the container for integration. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供具有优异气密效应的晶片载体。解决方案：晶片载体包括容器，其具有形成开口的一个侧面，并且在其内部设置有能够存储多个晶片的多个槽，并且使用门并将其接合到用于保护容器中的晶片的容器。容器的特征在于，在开口的内边缘处形成有磁性部件，并且磁体设置在面对磁性部件的门的内表面处，并且磁体设置在具有凹入横截面的磁轭中。因此，门上的磁体在容器的开口处吸引磁性构件，并且门被锁定固定到容器上用于集成。版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2010056500A Thin substrate pitch measurement equipment, and wafer pitch measurement equipment 审中-公开
标题翻译：薄基板倾斜测量设备和波峰测量设备
公开(公告)号：JP2010056500A
公开(公告)日：2010-03-11
申请号：JP2008250638
申请日：2008-09-29
申请人： Gugeng Precision Industrial Co Ltd , 家登精密工業股▲ふん▼有限公司
发明人： LU PAO-YI
IPC分类号： H01L21/68 , H01L21/67
CPC分类号： H01L21/67265
摘要： PROBLEM TO BE SOLVED: To provide thin substrate pitch measurement equipment for measuring vertical pitches between a plurality of thin substrates placed in a pod. SOLUTION: The equipment mainly includes: a photoelectric element which transmits a luminous flux to a thin substrate in the pod and receives a luminous flux reflected from the thin substrate; a scanning device which moves the photoelectric element along a vertical direction of the thin substrate to measure the vertical pitches between the plurality of thin substrates in the pod; and a rotation base which has the pod placed thereon and rotates the pod at a plurality of angles to measure the vertical pitches between these thin substrates. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供用于测量放置在荚中的多个薄基板之间的垂直间距的薄基板间距测量设备。解决方案：设备主要包括：光电元件，其将光通量传输到容器中的薄衬底并接收从薄衬底反射的光束; 扫描装置，其沿着所述薄基板的垂直方向移动所述光电元件，以测量所述多个薄基板在所述盒中的垂直间距; 以及旋转底座，其具有荚放置在其上并以多个角度旋转荚，以测量这些薄基底之间的垂直间距。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2010041018A Carrier case for reticle pod 有权
标题翻译：手提箱的携带箱
公开(公告)号：JP2010041018A
公开(公告)日：2010-02-18
申请号：JP2008236553
申请日：2008-09-16
申请人： Gugeng Precision Industrial Co Ltd , 家登精密工業股▲ふん▼有限公司
发明人： LU PAO-YI
IPC分类号： H01L21/673 , B65D25/26 , B65D77/04 , B65D81/02
CPC分类号： H01L21/67359 , H01L21/67005 , H01L21/67369
摘要： PROBLEM TO BE SOLVED: To provide a carrier case for a reticle pod having superior vibration suppression and protection performances. SOLUTION: A top cover is formed to substantially correspond with a bottom cover to define an accommodation space therebetween. The bottom cover has a plurality of pairs of guide rails, provided on two facing the inner surfaces of the bottom cover. A partition plate is fitted within the bottom cover by the guide rails. The partition plate is used, to divide the accommodation space into a plurality of accommodation spaces and to place a reticle pod therein. Fixing members, having holding and abutting parts, are provided on the uppermost inner surface of the top cover. When the top cover is placed on the bottom cover to cover the bottom cover, the respective fixing members of the top cover all the corresponding respective reticle pods placed inside a carrier case. The holding parts of the fixing members can hold the reticle pods therebetween. The abutting parts of the fixing members hold down the associated reticle pods. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有优异的振动抑制和保护性能的光罩盒的载体壳体。解决方案：顶盖形成为基本对应于底盖以在其间限定容纳空间。底盖具有多对导轨，设置在面对底盖的内表面的两个导轨上。分隔板通过导轨安装在底盖内。分隔板用于将容纳空间分成多个容纳空间，并在其中放置标线舱。具有保持和邻接部分的固定构件设置在顶盖的最上面的内表面上。当顶盖放置在底盖上以覆盖底盖时，顶盖的相应固定构件将放置在载体壳体内的所有对应的相应的标线舱架放置。固定构件的保持部分可以在其间保持标线舱。固定构件的邻接部分压住相关联的标线舱。版权所有（C）2010，JPO＆INPIT

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