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    • 2. 发明专利
    • Adhesive tape for processing radiation curable semiconductor
    • 用于加工辐射可固化半导体的胶带
    • JP2012212731A
    • 2012-11-01
    • JP2011076686
    • 2011-03-30
    • Furukawa Electric Co Ltd:The古河電気工業株式会社
    • YOSHITANI TSUTOMUTAKEUCHI TAKESHIYANO SHOZO
    • H01L21/301C09J4/00C09J4/02C09J7/02
    • PROBLEM TO BE SOLVED: To provide an adhesive tape for processing a radiation curable semiconductor which exhibits good antistatic properties in semiconductor processing, and hardly allows an adhesive to remain on an adherend in pickup.SOLUTION: In an adhesive tape for processing a radiation curable semiconductor in which an adhesive layer is formed on a base material resin film, the base material resin film is a resin composition having 90 to 70 wt.% of ethylene-vinyl acetate copolymer (a1) and 10 to 30 wt.% of a resin (a2) in which a carboxyl group of a copolymer containing at least of ethylene composition and (meta) acrylic acid composition as a component, is crosslinked by way of potassium ions, and the adhesive layer containing polymer (B) in which a radiation curable carbon-carbon double bond-containing group for a repeating unit of a principal chain is bonded, is formed on the base material resin film having a volume resistivity of equal to or less than 1×10Ω cm.
    • 要解决的问题:提供一种用于加工在半导体加工中具有良好抗静电性能的可辐射固化半导体的胶带,并且几乎不允许粘合剂保留在拾取中的被粘物上。 解决方案:在基材树脂膜上形成粘合剂层的可辐射固化半导体的加工用胶带中,基材树脂膜是具有90〜70重量%的乙烯 - 乙酸乙烯酯的树脂组合物 共聚物(a1)和10〜30重量%的含有至少乙烯组合物的共聚物的羧基和(甲基)丙烯酸组合物作为组分的树脂的树脂(a2)通过钾离子交联, 并且在具有等于或小于等于或等于体积电阻率的基体树脂膜上形成含有用于连接主链的重复单元的可辐射固化碳 - 碳双键基团的含聚合物(B)的粘合剂层 比1×10 13 Ωcm。 版权所有(C)2013,JPO&INPIT
    • 4. 发明专利
    • Antistatic adhesive tape for semiconductor processing
    • 用于半导体加工的防静电胶带
    • JP2011210944A
    • 2011-10-20
    • JP2010077022
    • 2010-03-30
    • Furukawa Electric Co Ltd:The古河電気工業株式会社
    • YOSHITANI TSUTOMUYANO SHOZOTAKEUCHI TAKESHIUCHIYAMA TOMORO
    • H01L21/304C09J7/02H01L21/301
    • PROBLEM TO BE SOLVED: To provide an antistatic adhesive tape for semiconductor processing, which causes little contamination on an adherend and little aging of an adhesive property as well as little influence to a surface of the adherend during dicing or back grinding treatment of a semiconductor component, and which can exhibit antistatic properties after ultraviolet curing even if an adhesive layer is thick.SOLUTION: The antistatic adhesive tape for semiconductor processing constituted by a base film and a photocuring adhesive layer includes: an antistatic layer containing a conductive polymer at least on one surface of the base film; and an adhesive layer containing a photocuring unsaturated carbon bond in a molecule of a base polymer on the antistatic layer, wherein a surface resistivity on the adhesive layer side before and after the ultraviolet curing is 1×10to 5×10Ω/square, a thickness of the adhesive layer is 20-250 μm, and a 90-degree peeling adhesive power of the adhesive layer after the ultraviolet curing when the adhesive tape adheres to a silicon mirror wafer is 0.15-0.25 N/25 mm.
    • 要解决的问题:为了提供一种用于半导体加工的抗静电胶带,其对被粘物几乎没有污染,并且对半导体部件的切割或后磨削处理期间对粘合性能的影响小,对被粘物的表面几乎没有影响 并且即使粘合剂层厚,也可以在紫外线固化后表现出抗静电性。溶胶:由基膜和光固化粘合剂层构成的半导体加工用抗静电胶带包括:至少含有导电性聚合物的抗静电层 基膜表面; 以及在抗静电层的基体聚合物分子中含有光固化不饱和碳键的粘合层,其中紫外线固化前后的粘合剂层侧的表面电阻率为1×10〜5×10Ω/□, 粘合剂层为20-250μm,当胶带粘附到硅镜晶片时紫外线固化后粘合剂层的90度剥离粘合力为0.15-0.25N / 25mm。
    • 6. 发明专利
    • Ultraviolet light curable adhesive tape for processing semiconductor device
    • 用于加工半导体器件的超紫外线光固化胶带
    • JP2013209559A
    • 2013-10-10
    • JP2012081737
    • 2012-03-30
    • Furukawa Electric Co Ltd:The古河電気工業株式会社
    • OTA GOSHIYOSHITANI TSUTOMUTAMAGAWA ARIMICHI
    • C09J7/02C09J11/06C09J133/00H01L21/301H01L21/304
    • PROBLEM TO BE SOLVED: To provide an adhesive tape for processing a semiconductor device, exhibiting an excellent static prevention effect in a processing step for the semiconductor device and exhibiting a stable ultraviolet light curability capable of inhibiting curing reaction by ultraviolet light even on being exposed to fluorescent light during storage.SOLUTION: An ultraviolet light curable adhesive tape for processing a semiconductor device obtained by forming an adhesive layer on ultraviolet light transmitting substrate resin film is characterized by including at least (A) an acrylic copolymer having a carbon-carbon double bond-containing group in its molecule, (B) an ionic liquid consisting of an organic cationic component and anionic component and (C) a photopolymerization initiation accelerator, in the adhesive layer, and containing 0.5 to 2 pts.mass of component (C) based on 100 pts.mass of component (A).
    • 要解决的问题:提供一种用于半导体器件加工的胶带,在半导体器件的加工步骤中具有优异的防静电效果,并且即使暴露于半导体器件也能够通过紫外线显示出能够抑制紫外线固化反应的稳定的紫外光固化性 存储期间的荧光灯。解决方案:用于处理通过在紫外线透射基板树脂膜上形成粘合剂层而获得的半导体器件的紫外光固化胶带的特征在于至少包括(A)具有碳 - 碳双键的丙烯酸共聚物 (B)由有机阳离子成分和阴离子成分构成的离子液体和(C)光聚合引发促进剂,在粘合剂层中含有0.5〜2质量份的(C)成分 在100份组分(A)上。
    • 8. 发明专利
    • Adhesive tape for processing radiation curable semiconductor
    • 用于加工辐射可固化半导体的胶带
    • JP2012212732A
    • 2012-11-01
    • JP2011076687
    • 2011-03-30
    • Furukawa Electric Co Ltd:The古河電気工業株式会社
    • YOSHITANI TSUTOMUTAKEUCHI TAKESHIYANO SHOZO
    • H01L21/301B32B27/00B32B27/28C09J7/02C09J133/08
    • PROBLEM TO BE SOLVED: To provide an adhesive tape for processing a radiation curable semiconductor which exhibits good antistatic properties in semiconductor processing, can significantly reduce generation of fibrous cut waste in a dicing process, allows little slack of the tape by irradiation and hardly allows an adhesive to remain on an adherend in pickup.SOLUTION: In an adhesive tape for processing a radiation curable semiconductor in which a particular adhesive layer is formed on a base material resin film, the base material resin film consists of at least of two layers, a layer contacting with the adhesive layer of the base material resin film is a resin composition having ethylene-vinyl acetate copolymer (a1) and a resin (a2) in which carboxyl group of a copolymer containing at least of ethylene composition and (meta) acrylic acid composition as a component, is crosslinked by way of potassium ions, and a layer other than the layer contacting with the adhesive layer is a resin composition containing high density polyethylene or polypropylene.
    • 要解决的问题:为了提供一种用于加工在半导体加工中具有良好抗静电性能的可辐射固化半导体的胶带,可以显着减少切割工艺中的纤维切割废料的产生,通过照射允许胶带几乎不松弛, 几乎不允许粘合剂保留在拾取中的被粘物上。 解决方案:在基材树脂膜上形成特定粘合剂层的可辐射固化半导体处理用胶带中,基材树脂膜至少由两层构成,与粘合层接触的层 的基材树脂膜是具有乙烯 - 乙酸乙烯酯共聚物(a1)和至少含有乙烯组分和(甲基)丙烯酸组合物的共聚物的羧基作为组分的树脂(a2))的树脂组合物是 通过钾离子交联,除了与粘合剂层接触的层以外的层是含有高密度聚乙烯或聚丙烯的树脂组合物。 版权所有(C)2013,JPO&INPIT
    • 9. 发明专利
    • Adhesive tape for semiconductor device dicing and manufacturing method of semiconductor device chip
    • 用于半导体器件芯片的半导体器件引脚和制造方法的粘合带
    • JP2012119395A
    • 2012-06-21
    • JP2010265688
    • 2010-11-29
    • Furukawa Electric Co Ltd:The古河電気工業株式会社
    • TAKEUCHI TAKESHIYOSHITANI TSUTOMUYANO SHOZO
    • H01L21/301C09J7/02
    • PROBLEM TO BE SOLVED: To provide an adhesive tape for semiconductor device dicing in which attachment of fibrous cut wastes during a dicing process is reduced and adherence of an adhesive is also reduced in a part around a semiconductor device laser mark, and a manufacturing method of a semiconductor device chip using the adhesive tape.SOLUTION: The present invention relates to an adhesive tape 100 for semiconductor device dicing in which an adhesive layer 20 is formed on a base material resin film 10. Resin composition constituting the base material resin film 10 contacting the adhesive layer 20 has a base resin component of an ethylene vinyl acetate copolymer which has melt flow rate of 1 to 20 as well as weight average molecular weight of 150000 to 600000.
    • 解决的问题:提供一种用于半导体器件切割的粘合带,其中在切割工艺期间纤维切割废料的附着减少,并且在半导体器件激光标记周围的部分中粘合剂的粘附也降低,并且 使用该胶带的半导体器件芯片的制造方法。 解决方案本发明涉及一种用于半导体器件切割的粘合带100,其中在基材树脂膜10上形成粘合剂层20.构成与粘合层20接触的基材树脂膜10的树脂组合物具有 乙烯 - 乙酸乙烯酯共聚物的基础树脂组分,其熔体流动速率为1-20,重均分子量为150000至600000.版权所有(C)2012,JPO&INPIT
    • 10. 发明专利
    • Antistatic adhesive tape for semiconductor processing
    • 用于半导体加工的防静电胶带
    • JP2011210989A
    • 2011-10-20
    • JP2010077862
    • 2010-03-30
    • Furukawa Electric Co Ltd:The古河電気工業株式会社
    • YOSHITANI TSUTOMUYANO SHOZOTAKEUCHI TAKESHI
    • H01L21/301C09J7/02
    • PROBLEM TO BE SOLVED: To provide an antistatic adhesive tape for semiconductor processing, which exhibits an excellent antistatic performance in semiconductor processing, allows little slack of the tape by irradiation, and hardly allows an adhesive to remain on an adherend in pickup.SOLUTION: The antistatic adhesive tape for semiconductor processing includes: an antistatic layer consisting of a resin composition containing 10-45 pts.mass of an antistatic resin containing polyether based on 100 pts.mass of a base resin at least containing 40-90 wt.% polypropylene and 60-10 wt.% styrene elastomer resin; and an adhesive layer containing a base polymer having a radiation-curable unsaturated carbon bond in a molecule.
    • 要解决的问题:为了提供在半导体加工中表现出优异的抗静电性能的半导体加工用抗静电胶带,通过照射使胶带几乎不松弛,并且几乎不能使粘合剂保留在拾取器中的被粘物上。解决方案: 用于半导体加工的抗静电胶带包括:抗静电层,其由含有10-45重量份含聚醚的树脂组合物组成,所述抗静电树脂基于100重量份至少包含40-90重量%聚丙烯的基础树脂, 60-10重量%苯乙烯弹性体树脂; 以及在分子中含有具有可辐射固化的不饱和碳键的基础聚合物的粘合剂层。