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    • 3. 发明专利
    • Method for manufacturing thin-film magnetic head
    • 制造薄膜磁头的方法
    • JP2006260653A
    • 2006-09-28
    • JP2005075242
    • 2005-03-16
    • Fujitsu Ltd富士通株式会社
    • KANEDA WATARUKOJIMA TAKASHIFUJITA MUTSUMIFUJIEDA HIROSHIOZAKI TOKUICHIIKEGAWA YUKINORI
    • G11B5/39G03F7/075G03F7/20
    • PROBLEM TO BE SOLVED: To manufacture a thin-film magnetic head higher in accuracy by accurately forming a lift-off pattern used when the read element of the thin-film magnetic head is formed and suppressing a manufacturing variance of the thin-film magnetic head.
      SOLUTION: This method includes: a step of stacking a reflection preventive film 20 made of a film material not dipped in a developer for developing a resist film 30 stacked on a magnetoresistive effect film 12, and the resist film 30 made of a resist material bear with the treatment of ashing the reflection preventing film on the magnetoresistive effect film 12; a step of forming a resist pattern 30a by exposing and developing the resist film 30; a step of ashing the reflection preventive film 20 and constituting a peaked lift-off pattern 22 of the ashed reflection preventive film 20a and the resist pattern 30a; and a step of using the lift-off pattern 22 to execute ion milling and forming an insulating film.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了通过精确地形成当形成薄膜磁头的读取元件时使用的剥离图案来制造精度更高的薄膜磁头,并且抑制薄膜磁头的制造方差, 胶片磁头。 解决方案:该方法包括:将由未浸渍在显影剂中的膜材料制成的防反射膜20堆叠在叠层在磁阻效应膜12上的抗蚀剂膜30的步骤,以及抗蚀剂膜30 抗蚀剂材料承受着对磁阻效应膜12上的防反射膜灰化的处理; 通过曝光和显影抗蚀剂膜30形成抗蚀剂图案30a的步骤; 灰化反射防止膜20并构成灰化反射防止膜20a和抗蚀剂图案30a的峰值剥离图案22的步骤; 以及使用剥离图案22执行离子研磨和形成绝缘膜的步骤。 版权所有(C)2006,JPO&NCIPI
    • 4. 发明专利
    • Printed wiring board
    • 印刷线路板
    • JP2010034199A
    • 2010-02-12
    • JP2008193394
    • 2008-07-28
    • Fujitsu Ltd富士通株式会社
    • YOSHIMURA HIDEAKIOZAKI TOKUICHIIIDA KENJIABE TOMOYUKI
    • H05K3/46
    • H05K3/4673H05K1/0366H05K3/426H05K3/4608H05K3/4614H05K2201/0195H05K2201/0323H05K2201/0394H05K2201/09563H05K2201/096H05K2201/09809H05K2201/10378H05K2203/061
    • PROBLEM TO BE SOLVED: To provide a printed wiring board capable of preventing the generation of a stress. SOLUTION: The printed wiring board 11 includes a core substrate 12 containing carbon fiber and having rigidity for maintaining its shape with a single unit. A buildup layer 26 or 27 is formed on the core substrate 12. The buildup layer 26 or 27 has insulation layers 28 and conductive wiring layers 29 which are sequentially laminated and in which rigidity for maintaining the shape with a single unit depends on the core substrate 12. The insulation layer 28 is formed of a fiber 37 and a resin material impregnated into the fiber 37. In the buildup layer 26 or 27, a thermal expansion coefficient is suppressed low based on the fiber 37. In the core substrate 12, the thermal expansion coefficient is also suppressed low based on the carbon fiber. Accordingly, the thermal expansion coefficient of the buildup layer 26 or 27 is adjusted to match the thermal expansion coefficient of the core substrate 12. The generation of stress is prevented in the printed wiring board 11. The generation of cracks in the buildup layer 26 or 27 can be prevented. The disconnection of a conductive wiring layer 29 can be prevented. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供能够防止产生应力的印刷线路板。 解决方案:印刷电路板11包括含有碳纤维的芯基板12,并且具有用于以单一单元保持其形状的刚性。 堆积层26或27形成在芯基板12上。积层层26或27具有依次层叠的绝缘层28和导电布线层29,其中用单个单元保持形状的刚性取决于芯基板 绝缘层28由纤维37和浸渍在纤维37中的树脂材料形成。在堆积层26或27中,基于纤维37将热膨胀系数抑制得较低。在芯基板12中, 基于碳纤维,热膨胀系数也被抑制得较低。 因此,调整堆积层26或27的热膨胀系数以匹配芯基板12的热膨胀系数。在印刷线路板11中防止产生应力。在积聚层26中产生裂纹或 27可以防止。 可以防止导电布线层29断开。 版权所有(C)2010,JPO&INPIT
    • 8. 发明专利
    • Buildup board
    • 建筑板块
    • JP2010034197A
    • 2010-02-12
    • JP2008193386
    • 2008-07-28
    • Fujitsu Ltd富士通株式会社
    • YOSHIMURA HIDEAKIOZAKI TOKUICHIIIDA KENJIABE TOMOYUKI
    • H05K3/46
    • H05K1/036H05K1/0366H05K3/06H05K3/107H05K3/108H05K3/421H05K3/426H05K3/4644H05K2201/0195H05K2201/0355H05K2201/0376H05K2201/0394H05K2201/09563H05K2201/096H05K2203/0278H05K2203/1476Y10T29/49126Y10T29/51
    • PROBLEM TO BE SOLVED: To provide a buildup board capable of ensuring rigidity while maintaining a low thermal expansion coefficient. SOLUTION: Fibers 23 are buried in a first insulation layer 21. The fibers 23 work to keep the low thermal expansion coefficients of first and second insulation layers 21, 22. The thermal expansion coefficients of the first and second insulation layers 21, 22 are adjusted to match the thermal expansion coefficient of a conductive land 15. The occurrence of a stress is reduced in the buildup board 11. In addition, the rigidity of the buildup board 11 is improved by the function of the fibers 23. The second insulation layer 22 stacking on the surface of the first insulation layer 21 is made of a resin material. The fibers 23 can be unfailingly prevented from being exposed on the surface of the second insulation layer 22. Even if a plating liquid permeates the inside of the first insulation layer 21 along the interface between the resin material and the fibers 23 in forming the via 16 and the conductive land 15, the plating liquid can be prevented from reaching the surface of the second insulation layer 22. The conduction between the via 16 and a conductive pattern which should not be originally connected to the via 16 can be unfailingly prevented. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供能够确保刚性同时保持低热膨胀系数的积木板。 纤维23被埋在第一绝缘层21中。纤维23用于保持第一和第二绝缘层21,22的低热膨胀系数。第一绝缘层21和第二绝缘层21的热膨胀系数, 22调节以匹配导电平台15的热膨胀系数。在积层板11中应力的发生减少。此外,通过纤维23的功能,增强板11的刚度得到改善。第二 在第一绝缘层21的表面上堆叠的绝缘层22由树脂材料制成。 纤维23能够牢固地防止暴露在第二绝缘层22的表面上。即使电镀液体沿着形成通孔16的树脂材料和纤维23之间的界面渗透到第一绝缘层21的内部 并且能够防止电镀液到达第二绝缘层22的表面。导通板15与导电图案之间的导通不能最初连接到通孔16,导电图案可以得到有效的防止。 版权所有(C)2010,JPO&INPIT