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1. 发明专利

JP2001040437A ELECTRIC CONTACT MEMBER, CIRCUIT TESTING DEVICE AND PRODUCTION OF CONTACT 失效
公开(公告)号：JP2001040437A
公开(公告)日：2001-02-13
申请号：JP21727499
申请日：1999-07-30
申请人： ADVANTEST CORP
发明人： TABUSE KAZUHIKO , WATANABE MASAO , WADA KOICHI
IPC分类号： H01R13/03 , C22C5/04 , G01R1/067 , H01R43/00 , H01R43/16
摘要： PROBLEM TO BE SOLVED: To obtain an electric contact member free from the increase of contact resistance even in the case contact is repeated. SOLUTION: By a 1st metal Pd in which holes are present on a (d) electron orbit and a 2nd metal Au in which conduction electrons are present, an AuPd alloy in which the holes of the (d) electron orbit are filled with the conduction electrons is formed on the surface. Since Pd naturally generates organic contamination, it suppresses the generation of inorganic contamination largely increasing contact resistance. Since organic contamination is also slight in the case the holes are filled with the conduction electrons, the increase of the contact resistance caused by remarkable organic contamination does not occur.

2. 发明专利

JPH11295232A DEVICE AND METHOD FOR INSPECTING SURFACE, AND DEVICE AND METHOD FOR GENERATING DATA 失效
公开(公告)号：JPH11295232A
公开(公告)日：1999-10-29
申请号：JP9450598
申请日：1998-04-07
申请人： ADVANTEST CORP
发明人： WATANABE MASAO
IPC分类号： G01N21/88 , G01N21/21 , G01N21/956
摘要： PROBLEM TO BE SOLVED: To quickly judge the material of the surface of a sample such as a semiconductor circuit by a simple device. SOLUTION: A laser beam enters the surface of a sample 2 at a specific angle, and reflection intensity Ros and Rop between s and p polarization constituents is surveyed. The actually measured ratio Ros/Rop and an actually measured product value Ros×Rop are calculated for successively comparing with a theoretical ratio Rs/Rp and a sample product value Rs×Rp being set to a database means in advance, a plurality of candidates that approximate the actually measured ratio are selected from a plurality of the theoretical ratios, and one value that approximates the actually measured product value is selected from the sample product values of a plurality of candidates. One selected material is judged as the material of the sample 2, thus judging the material of the surface of the sample 2 according to the ratio and product value of the reflection intensity of s/p polarization.

3. 发明专利

JPH11287642A SURFACE INSPECTING DEVICE AND METHOD 失效
公开(公告)号：JPH11287642A
公开(公告)日：1999-10-19
申请号：JP9148998
申请日：1998-04-03
申请人： ADVANTEST CORP
发明人： WATANABE MASAO
IPC分类号： G01B11/30 , G01N21/21
摘要： PROBLEM TO BE SOLVED: To perform an inspection without requiring serious time and cost by converging and irradiating a laser beam to a held sample surface, detecting the intensity of one of the s-polarized component and p-polarized component of the reflected laser beam, dividing it by the reflecting intensity on a smooth surface of the corresponding polarized component to calculate the reflecting intensity. SOLUTION: A laser irradiating device 5 and a polarization detecting device 6 are opposed to one point on the surface of a sample 2 held by a sample holding stage 3 at a prescribed angle, and a stereomicroscope 20 is opposed thereto from just above. A polarizing plate 10 is supported in such a manner as to be rotatable around the optical axial direction to independently extract the s-polarized component and p- polarized component from the laser beam reflected by the surface of the sample 2. An optical detector 13 detects the reflecting intensity of the extracted s/p polarized component. The square of the ratio of the multiplication result of the reflecting intensities of the s-polarized component and p-polarized component detected by the polarization detecting device 6 to the multiplication result of the reflecting intensity on a smooth surface of the s/p polarized component is divided by a prescribed device constant to calculate the reflecting intensity on a rough surface.

4. 发明专利

JPH10255597A MERCURY SWITCH 失效
公开(公告)号：JPH10255597A
公开(公告)日：1998-09-25
申请号：JP5920397
申请日：1997-03-13
申请人： ADVANTEST CORP
发明人： KATADA FUMIO , WATANABE MASAO , HARA TOSHITO
IPC分类号： H01H29/04 , H01H1/08
摘要： PROBLEM TO BE SOLVED: To provide a mercury switch having a longer life by preventing imperfect bonding of a fixed contact with a movable piece when the switch is opened. SOLUTION: A fixed contact 2 and a movable piece 3 are inserted via respective lead pieces 5, 6 into a closed container 1 in which mercury 4 is sealed. The mercury 4 is constantly supplied to the end of the movable piece 3, and the movable piece 3 and the fixed contact 2 make contact via the mercury 4. A film 7 of chromium oxide is formed at the end of the upper lead piece 5. The film 7 of chromium oxide is partly removed at the top of the fixed contact 2 to form an exposed part 2a. The area of the exposed part 2a is set so that the adhesive strength between the fixed contact 2 and the mercury 4 when the entire surface of the fixed contact 2 is wetted with the mercury 4 becomes smaller than the force to separate the movable piece 3.

5. 发明专利

JPH10221268A METHOD AND DEVICE FOR DETECTING SURFACE STATE OF WAFER 失效
公开(公告)号：JPH10221268A
公开(公告)日：1998-08-21
申请号：JP2258497
申请日：1997-02-05
申请人： ADVANTEST CORP
发明人： WATANABE MASAO
IPC分类号： G01B11/30 , G01N21/47 , G01N21/88 , G01N21/94 , G01N21/95 , G01N21/956 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To quickly inspect a surface state such as fine grain pollution by radiating the measuring light transmitting a wafer from the back face of the wafer to satisfy the total reflection condition on the surface, and observing the scattered light by the generated near field leakage light. SOLUTION: A wafer to be measured 403 is mounted on an X-Y stage 401 on a wafer production line, and a laser light source 413 generating a laser beam 402 having the wavelength of about 1.2μm is fixed so that the incidence angle to the back face of the wafer 403 becomes the total reflection angle, for example. The stage 401 is moved at a high speed so that the laser beam 402 scans an observation surface. When a fine grain 404 exists at a total reflection point, the generated near field leakage light is scattered, and it is observed by an image pickup device 408 such as a CCD camera as an image on a screen 405. The obtained image signal is processed by a control device 407, and the nature of the fine grain 404 is analyzed. When p-polarization and s-polarization are applied to the incident laser beam, whether the fine grain 404 is a metal and its category can be judged.

6. 发明专利

JPH0817500A SOCKET FOR BGAIC AND SPRING PIN FOR USE IN THE SAME 失效
公开(公告)号：JPH0817500A
公开(公告)日：1996-01-19
申请号：JP14924094
申请日：1994-06-30
申请人： ADVANTEST CORP
发明人： WATANABE MASAO , MATSUMURA SHIGERU
IPC分类号： G01R31/26 , G01R1/04 , G01R1/067 , G01R1/073 , H01L23/12 , H01L23/32 , H01R13/04 , H01R33/76
摘要： PURPOSE:To provide a high reliable, long-life, and low-cost spring pin for a socket for use with a high density ball head. CONSTITUTION:A body 11 is formed from a phosphor bronze pipe, and its foremost part is widened as tapered on the inner surface so that a contacting part 12 is formed, wherein the angle theta1 of the tapered inner surface to the body axis is made approx. 30 deg. In the contacting part, four slots 13 stretching axially are provided from the foremost, and the resilience of the split linear part generates resilient contacting with a ball head 15. Even though a spring pin is intruded, the contacting place 21 with the contacting part 12 of the ball head 15 remains constant substantially.

7. 发明专利

JPH07244073A MICROSCOPIC CONTACT FOR ELECTRIC CONTACT AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH07244073A
公开(公告)日：1995-09-19
申请号：JP3670294
申请日：1994-03-08
申请人： ADVANTEST CORP
发明人： WATANABE MASAO
IPC分类号： G01R1/06 , G01R1/073
摘要： PURPOSE:To obtain a microscopic contact for electric contact which enables a contact array with a thickness of 50mum and a pitch of 100mum to be realized. CONSTITUTION:A through hole 22 is arranged and formed in an insulating holder 21, the internal surface of the through hole 22 is plated with a gold film 23 and an NiTi shape memory alloy wire is bent to house contacts 24 twisted without contacting mutually in the through hole 22. The folded part is larger in width than the diameter of the through hole 22 with the shape thereof in the shape memory state. In the shape undefined state, the folded part is inserted into the through hole 22 and with the restoration of the shape in memory, the folded part is deformed elastically to come into contact with the internal surface of the through hole 22 to be firmly fixed.

8. 发明专利

JP2002309035A METHOD AND APPARATUS FOR TREATING CIRCUIT MEMBER 失效
公开(公告)号：JP2002309035A
公开(公告)日：2002-10-23
申请号：JP2001114810
申请日：2001-04-13
申请人： ADVANTEST CORP
发明人： OTANI YOKO , WATANABE MASAO
IPC分类号： C08J11/14 , B01J3/00 , C07B37/06 , C07B61/00 , C07C1/32 , C07C9/04
摘要： PROBLEM TO BE SOLVED: To provide a method for treating circuit members generating no toxic gas including dioxins. SOLUTION: This method for treating circuit members comprises reaction of multiplayer substrates 9 having a polymeric material with supercritical water made by bridging water 3 to 450 deg.C and a pressure of 30 MPa. Since this method also includes the polymer decomposition step of decomposing the polymeric material by the supercritical water to generate H2 or CH4 , no toxic gas such as dioxins generates owning to decompositing the polymeric material.

9. 发明专利

JP2002222408A NEURAL NANO-MEDIUM COMPUTER 失效
公开(公告)号：JP2002222408A
公开(公告)日：2002-08-09
申请号：JP2001017096
申请日：2001-01-25
申请人： ADVANTEST CORP
发明人： YAMAZAKI YOSHITAKE , WATANABE MASAO , HARA TOSHITO
IPC分类号： G11C11/54 , G06N3/06 , H01L49/00
摘要： PROBLEM TO BE SOLVED: To provide a neural nano-medium computer using a storage element, an arithmetic circuit, and an intelligence element using as unit elements complete ly new atoms and molecules different from storage elements used for a conven tional Neumann type computer so far. SOLUTION: This computer has a ring-shaped pipe torus 10 where a neural nano-medium flows in a fluid state, an environment control part 14 which excites a system of nano-clusters that the neural nano-medium constitutes into an organized unbalanced state, an information input part 16 which injects energy varying the potential of a multi-valley potential structure formed in the system of the nano-clusters in the organized unbalanced state, and an information output part 18 which outputs information stored in the system of the nano- clusters.

10. 发明专利

JP2002096194A FLUX FOR RB-FREE SN ALLOY SOLDER 失效
公开(公告)号：JP2002096194A
公开(公告)日：2002-04-02
申请号：JP2000286829
申请日：2000-09-21
申请人： ADVANTEST CORP
发明人： SAIDA KEIKO , WATANABE MASAO
IPC分类号： B23K35/363 , B23K35/26 , B23K35/36 , H05K3/34
摘要： PROBLEM TO BE SOLVED: To provide new flux which does not cause degradation of a material or trouble in durability, can resist use at high melting temperature, and has sufficient cleaning action when it is used for Pb-free solder such as Sn-Ag or Sn-Ag-Bi series. SOLUTION: A slid oxide wherein abietic acid, the main ingredient of rosin is the main base ingredient, and a halide ion is not an ingredient as an inorganic ingredient which has flux activate enhancing action adding and dispersing in the rosin base ingredient is used for the flux for solder.

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