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1. 发明专利

JPS61125131A Washing and/or ashing method for ic substrate 失效
标题翻译：用于IC衬底的洗涤和/或刮除方法
公开(公告)号：JPS61125131A
公开(公告)日：1986-06-12
申请号：JP24633184
申请日：1984-11-22
申请人： Chlorine Eng Corp Ltd , Sen Tokushu Kogen Kk
发明人： TOMIYA KAZUO , KIKUCHI KIYOSHI
IPC分类号： G03F7/30 , H01L21/027 , H01L21/30
CPC分类号： H01L21/30
摘要： PURPOSE:To enable a number of IC substrates to be washed in a short time and to perform mass-production of the IC substrates by making more highly concentrated ozone generate at the time when ultraviolet rays (UV) are projected to highly concentrated oxygen. CONSTITUTION:When an IC substrate is washed using a device where a washing chamber which houses UV lamp and the IC substrate is connected with highly concentrated oxygen source, a sheathed tube of the UV lamp made of synthesized quartz is employed. While the UV lamp is cooled, UV, which permeates highly concentrated oxygen supplied to the washing chamber through the synthesized quartz is projected and a part thereof IC converted to ozone. The surface of the IC substrate is washed by the UV and the ozone.
摘要翻译：目的：为了使许多IC基板在短时间内被洗涤，并通过在将紫外线（UV）投射到高度浓缩的氧气时产生更高浓度的臭氧来进行IC基板的批量生产。构成：使用容纳紫外灯的清洗室和IC基板与高浓度氧源连接的装置对IC基板进行清洗时，使用由合成石英制成的紫外灯的护套管。当UV灯被冷却时，透过通过合成石英供应到洗涤室的高度浓缩的氧气的UV被投射并且其一部分IC转化为臭氧。通过UV和臭氧洗涤IC基片的表面。

2. 发明专利

JPS62282680A AQUATIC-LIFE ADHESION PREVENTIVE DEVICE IN SEAWATERS UTILIZING APPARATUS 失效
公开(公告)号：JPS62282680A
公开(公告)日：1987-12-08
申请号：JP12599186
申请日：1986-05-30
申请人： HITACHI MACH & ENG LTD , SEN TOKUSHU KOGEN KK
发明人： KANEKO TOSHIHIKO , SASAKI TAKUYA , KON HIDEKI , ISHIGURO SHOZO
IPC分类号： B08B17/00 , A61L2/10 , B08B9/02 , F21S2/00 , F28F19/00 , F28F19/01

3. 发明专利

JPH0517882A METHOD FOR MODIFYING METALLIC SURFACE 失效
公开(公告)号：JPH0517882A
公开(公告)日：1993-01-26
申请号：JP10704891
申请日：1991-05-13
申请人： AGENCY IND SCIENCE TECHN , RAN TECHNICAL SERVICE KK , SEN TOKUSHU KOGEN KK
发明人： KATO KOICHIRO , MATSUMOTO YOSHIIE , KIKUCHI KIYOSHI
IPC分类号： B05D3/06 , C09J5/02 , C23C26/00 , C23G5/00 , H05K3/38 , H05K3/44
摘要： PURPOSE:To provide a method for modifying the surface of aluminum, aluminum alloys, stainless, galvanized steel sheets, tin plates or the like to make better the adhesion of a coating material, the adhesion of an adhesive or the like. CONSTITUTION:The surface of aluminum, aluminum alloys, stainless, galvanized steel sheets, tin plates or the like is irradiated with ultraviolet rays contg. beams with 253.7nm wave length or ultraviolet rays contg. beam with 184.9nm wave length and beams with 253.7nm wave length. After that, coating, adhesion or the like are executed. In this way, the modifying effect can easily be maintained for a long time without the need of post treatment, and even in the case the metallic surface is subjected to fine working, adverse influence is not produced on the working shape.

4. 发明专利

JPS62282681A AQUATIC-LIFE ADHESION PREVENTIVE DEVICE IN SEAWATERS UTILIZING APPARATUS 失效
公开(公告)号：JPS62282681A
公开(公告)日：1987-12-08
申请号：JP12599286
申请日：1986-05-30
申请人： HITACHI MACH & ENG LTD , SEN TOKUSHU KOGEN KK
发明人： SASAKI TAKUYA , KON HIDEKI , NAKAHACHI TAKASHI , ISHIGURO SHOZO
IPC分类号： B08B17/00 , A61L2/10 , B08B9/02 , F21S2/00 , F28F19/00 , F28F19/01

5. 发明专利

JPS62282679A AQUATIC-LIFE ADHESION PREVENTIVE DEVICE IN SEAWATERS UTILIZING APPARATUS 失效
公开(公告)号：JPS62282679A
公开(公告)日：1987-12-08
申请号：JP12599086
申请日：1986-05-30
申请人： HITACHI MACH & ENG LTD , SEN TOKUSHU KOGEN KK
发明人： SASAKI TAKUYA , KON HIDEKI , IIDA YASUNARU , ISHIGURO SHOZO
IPC分类号： B08B17/00 , A61L2/10 , B08B9/02 , F21S2/00 , F28F19/00 , F28F19/01

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