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1. 发明专利

JPH04335323A PRODUCTION OF ELECTROOPTICAL DEVICE 失效
公开(公告)号：JPH04335323A
公开(公告)日：1992-11-24
申请号：JP10614491
申请日：1991-05-10
申请人： SEIKO INSTR INC , TOKUDA SEISAKUSHO
发明人： KURODA YOSHIKI , KURIYAMA NOBORU , IWAMI MUNENORI
IPC分类号： G02F1/136 , G02F1/1365 , H01L49/00
摘要： PURPOSE:To minimize the damages to films and to prevent the deterioration of the electrooptical device as well as to improve the mass productivity thereof by minimizing the flow of a high-frequency current to a substrate. CONSTITUTION:The thin films consisting of amorphous Si contg. substantially no hydrogen as a base are deposited on a substrate 12 by a double-surface passage type high-frequency sputtering device which insulates the substrate 12 from a vacuum chamber and sputtering electrodes and varies the phases of the high frequencies supplied to both-surface high-frequency sputtering electrodes by about 180 deg. from each other.

2. 发明专利

JPH04202776A LOADING DEVICE 失效
公开(公告)号：JPH04202776A
公开(公告)日：1992-07-23
申请号：JP33669190
申请日：1990-11-30
申请人： TOKUDA SEISAKUSHO , SONY CORP
发明人： KONOSHIMA EIJI , KATO NAOKI , KINOKIRI KYOJI , IKEDA JIRO
IPC分类号： C23C14/56 , B65H5/14 , B65H7/16 , C23C14/50 , H01L21/677 , H01L21/68
摘要： PURPOSE:To reduce the load on a driving mechanism and to smoothly rotate and reciprocate a loading device by winding a pipeline on a rotating shaft, then connecting the pipeline to an external device and absorbing the shock produced when a suction head is reversed. CONSTITUTION:The vacuum chucks 41 and 41' for a substrate 2 are provided on both sides of a suction head 42 in plural stages. The head is vertically moved by an air cylinder 442, and the substrate 2 is loaded into a film forming chamber 5 and simultaneously delivered to a substrate conveyor from the chamber 5. A couple of pipelines 45 and 45' are wound on a rotating shaft 43 and then connected to external devices 46 and 46', and the momentum of the rotating shaft 43 is absorbed by the circumferential direction of the pipelines 45 and 45' to reduce the load on a driving mechanism 44. A couple of shock absorbers 47 and 47' are integrated with the moving part of the air cylinder 442 with the shaft 43 in between to absorb the shock produced when the head 42 is reversed.

3. 发明专利

JPH04136159A VACUUM TREATING DEVICE 失效
公开(公告)号：JPH04136159A
公开(公告)日：1992-05-11
申请号：JP25834090
申请日：1990-09-27
申请人： TOKUDA SEISAKUSHO
发明人： JO HIDETAKA
IPC分类号： C23C14/22 , C23C14/00 , C23C14/56 , C23F4/00
摘要： PURPOSE:To prevent the tightness leakage, etc., between the respective chambers of the vacuum treating device arranged with preliminary chambers on both sides of a treating chamber disposed at a center by forming the treating chamber and the preliminary chambers by machining one metallic block. CONSTITUTION:The treating chamber 1 for a substrate 4 and right and left preliminary chambers 3, 2 of the vacuum treating device are integrally formed by machining one metallic block 6 of an Al material and the bulkheads 1a, 1b between the respective chambers are formed of the side walls common with each other. The treating chamber 1 and the preliminary chambers 2, 3 are covered with upper caps 1c, 2a, 3a and cylinders 11b, 12b for opening and closing isolation valves 11, 12 are provided between the respective chambers. Since there are no spaces communicating with the outdoor air between the treating chamber 1 and the respective preliminary chambers 2, 3 in this way and, the higher efficiency and higher vacuum of the treating operation are attained. Since the corner parts are rounded by the machining, washing is facilitated.

4. 发明专利

JPH04129916A CONVEYING DEVICE 失效
公开(公告)号：JPH04129916A
公开(公告)日：1992-04-30
申请号：JP25099390
申请日：1990-09-20
申请人： TOKUDA SEISAKUSHO
发明人： KONOSHIMA EIJI , KATO NAOKI , UTSUNOMIYA NOBUAKI
IPC分类号： B65G25/00 , B25J9/00 , B65G47/80 , B65G47/86 , C23C14/00 , C23C14/56 , G11B7/26 , H01L21/677 , H01L21/68
摘要： PURPOSE:To simplify structure and make it compact by providing a pair of rotary bodies disposed to oppose each other and make reciprocal rotary movements in the directions opposite to each other, and receiving trays fixed to respective rotary shafts of the rotary bodies at different heights. CONSTITUTION:If a drive source 52 causes rotation in the direction of the arrow X, a gear 51 is rotated in the direction of the arrow X, and rotary bodies 53, 53' engaging with the gear 51 together with receiving trays 54, 54' make rotary movements in directions opposite to each other. As a result, the receiving trays 54, 54' while being kept parallel to each other move to part from each other until there is no overlapping area. Since the gear 51 is reciprocated in the direction of the arrow X and in the opposite direction to cause the receiving trays 54, 54' make only arcuate rotary movement around the rotary shafts of the rotary bodies 53, 53', the reciprocal movement, locus due to the rotary movement becomes short, the area occupied by the movement is considerably reduced, and the device is made compact.

5. 发明专利

JPH04129915A CONVEYING DEVICE 失效
公开(公告)号：JPH04129915A
公开(公告)日：1992-04-30
申请号：JP25099190
申请日：1990-09-20
申请人： TOKUDA SEISAKUSHO
发明人： KONOSHIMA EIJI , KATO NAOKI , UTSUNOMIYA NOBUAKI
IPC分类号： B65G25/00 , B25J9/00 , B65G47/80 , B65G47/86 , C23C14/00 , C23C14/56 , G11B7/26 , H01L21/677 , H01L21/68
摘要： PURPOSE:To simplify structure and make it compact by providing a drive source for driving a support arm to drive a first and a second rotary bodies for rotation around a disk so that a receiving tray is reciprocated. CONSTITUTION:A support arm 55 is secured at its central part to a drive source 56 of a motor. When the arm 55 receives a rotary drive force, first rotary bodies 52, 52' in contact with the outer circumferential surface of a disk 51, and second rotary bodies 53, 53' respectively in contact with the outer circumferential surfaces of the first rotary bodies 52, 52' rotate in the directions of the arrows X, with each of the rotary bodies pivoted on the support arm. As a result, receiving trays 54, 54' respectively secured to the shafts 53a, 53a' make relative movement in the directions opposite to each other on both sides of the disk 51 to convey base boards 2. Since the receiving trays 54, 54' are attached to paired second rotary bodies 53, 53' at different heights, they can make relative opposing movements when the rotary direction of the drive source 56 is reversed in the next sequence without colliding with each other.

6. 发明专利

JPH0411625B2 失效
公开(公告)号：JPH0411625B2
公开(公告)日：1992-03-02
申请号：JP7155682
申请日：1982-04-30
申请人： TOSHIBA KK , TOKUDA SEISAKUSHO KK
发明人： NISHIKAWA REIJI , SATOYAMA SHOZO , ITO YOSHINORI , JO HIDETAKA
IPC分类号： C23C14/36 , C23C14/35 , H01J37/34

7. 发明专利

JPH0436468A PIPING DEVICE HAVING VALVE MECHANISM 失效
公开(公告)号：JPH0436468A
公开(公告)日：1992-02-06
申请号：JP14265090
申请日：1990-05-31
申请人： TOKUDA SEISAKUSHO , BATSUKUATSUPU KK
发明人： KINOKIRI KYOJI , UBUKATA HISASHI
IPC分类号： B01J3/02 , C23C14/00 , C23C14/56 , G11B7/26 , H01L21/677
摘要： PURPOSE:To make piping routes shorter and smaller by forming the valve disks of valve mechanisms in such a manner that the pipelines can directly be opened and closed by the outside wall surface of a vacuum chamber. CONSTITUTION:The pipelines 31c, 31d, 31e communicating with the inside and outside are formed in the wall of the vessel (upper cap 31) which forms a load lock chamber 31a of a sputtering device. The pipelines opened on the outer side thereof are directly opened and closed by the valve disks 91a, 91b of the valve mechanisms 91, 92. The wall surface 31f on the pipeline opening side of the upper cap 31 constitutes the inside wall surface to constitute the maniholds of the respective valve mechanisms 91, 92, thereby constituting the compact valve mechanisms 91, 92. Since the valve mechanisms 91, 92 are so formed as to be built together with the wall of a transporting chamber 3, the pipeline system is shortened.

8. 发明专利

JPH0343343B2 失效
公开(公告)号：JPH0343343B2
公开(公告)日：1991-07-02
申请号：JP20855887
申请日：1987-08-22
申请人： TOKUDA SEISAKUSHO
发明人： KURYAMA NOBORU
IPC分类号： C23C14/54

9. 发明专利

JPH03127850A SEMICONDUCTOR DEVICE 失效
公开(公告)号：JPH03127850A
公开(公告)日：1991-05-30
申请号：JP26526689
申请日：1989-10-13
申请人： TOSHIBA CORP , TOKUDA SEISAKUSHO
发明人： BABA YOSHIAKI , ETSUNO YUTAKA , OSAWA AKIHIKO , YAMAWAKI KENJI
IPC分类号： H01L21/76 , H01L21/762 , H01L21/763
摘要： PURPOSE:To obtain isolation breakdown strength corresponding to the thickness of a side wall oxide film, by forming a cavity (air) part at the bottom part of a trench, and burying a polysilicon film only in the upper part of the trench. CONSTITUTION:A cavity part 26 is formed at the bottom part of a trench 24, and a film 27 composed of a second material (polysilicon) is buried only in the upper part of the trench. As a result, the film 27 composed of the second material is not stuck along the undercut shape at the trench bottom part caused by, e.g. rounding treatment. Hence, as compared with the case where the trench 24 is filled with the film 27 composed of the second material, the electric field concentration at the trench bottom part and the corner part thereof can be restrained. Thereby sufficient isolation breakdown strength corresponding to the thickness of a side wall oxide film 25 in the trench can be obtained.

10. 发明专利

JPH0335844B2 失效
公开(公告)号：JPH0335844B2
公开(公告)日：1991-05-29
申请号：JP13165185
申请日：1985-06-19
申请人： TOKUDA SEISAKUSHO
发明人： KURYAMA NOBORU
IPC分类号： H05B6/66 , H03B9/10 , H05B6/68

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