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81. 发明专利

JP2008047597A Vapor growth device 审中-公开
标题翻译：蒸气生长装置
公开(公告)号：JP2008047597A
公开(公告)日：2008-02-28
申请号：JP2006219383
申请日：2006-08-11
申请人： Nuflare Technology Inc , 株式会社ニューフレアテクノロジー
发明人： SUZUKI KUNIHIKO , MORIYAMA YOSHIKAZU
IPC分类号： H01L21/205 , C23C16/44
摘要： PROBLEM TO BE SOLVED: To provide a new vapor growth device with significantly improved safety.
SOLUTION: The vapor growth device is provided with: a first channel which supplies gas required for film-formation so as to form a film on a wafer stored in a chamber 103 by a vapor growth method; a second channel which supplies cleaning gas into the chamber in order to clean inside the chamber; and a third channel for exhausting the gas in the chamber. A fourth channel is provided in parallel with the third channel. A gas storage having almost the same atmosphere as that in the chamber is connected to the fourth channel. An exhaust pump is connected to one side of the gas storage. A gas measuring device for measuring a gas atmosphere in the gas storage is connected to the other side of the gas storage.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有显着提高的安全性的新型蒸汽增长装置。气相生长装置设置有：第一通道，其提供成膜所需的气体，以便通过气相生长法在存储在室103中的晶片上形成膜; 第二通道，其将净化气体供应到所述室中以在所述室内部进行清洁; 以及用于排出腔室中的气体的第三通道。第四通道与第三通道并联设置。具有与室中几乎相同气氛的气体储存器连接到第四通道。排气泵连接到气体储存器的一侧。用于测量气体存储器中的气体气氛的气体测量装置连接到气体存储器的另一侧。版权所有（C）2008，JPO＆INPIT

82. 发明专利

JP2008021829A Cleaning method of exhausting portion in vapor-phase growth apparatus 审中-公开
标题翻译：蒸汽相生长装置中排气部分的清洗方法
公开(公告)号：JP2008021829A
公开(公告)日：2008-01-31
申请号：JP2006192459
申请日：2006-07-13
申请人： Nuflare Technology Inc , 株式会社ニューフレアテクノロジー
发明人： SUZUKI KUNIHIKO , ITO HIDEKI
IPC分类号： H01L21/205 , C23C16/44
摘要： PROBLEM TO BE SOLVED: To provide a cleaning method of an exhausting portion (the vicinity of the pressure control valve of the valve of a vapor-phase growth apparatus), in the vapor-phase growth apparatus wherein the automatic control of its pressure control valve can be performed by the pressure of its chamber.
SOLUTION: In the vapor-phase growth apparatus, the control of the cleaning of reactive byproducts 110 stuck to the vicinity of the pressure control valve of a valve 105 is so determined by the angle of the pressure control valve which is caused by the change of the quantity of the reactive byproducts 110 as to complete the cleaning, when the angle of the pressure control valve becomes nearly equal to the angle of it having before a film formation.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提供在气相生长装置中的排气部分（气相生长装置的阀的压力控制阀附近）的清洁方法，其中对其进行自动控制压力控制阀可以通过其室的压力进行。解决方案：在气相生长装置中，粘附在阀105的压力控制阀附近的反应性副产物110的清洁的控制是由压力控制阀的角度决定的，压力控制阀由当压力控制阀的角度几乎等于其在成膜之前的角度时，反应性副产物110的量的改变以完成清洁。版权所有（C）2008，JPO＆INPIT

83. 发明专利

JP2010225731A DEPOSITION DEVICE 审中-公开
公开(公告)号：JP2010225731A
公开(公告)日：2010-10-07
申请号：JP2009069602
申请日：2009-03-23
申请人： NUFLARE TECHNOLOGY INC
发明人： SUZUKI KUNIHIKO , YAJIMA MASAMI , IKETANI NAOHISA
IPC分类号： H01L21/205 , C23C16/458
摘要： PROBLEM TO BE SOLVED: To reliably inhibit entry of reaction gas of a rotating mechanism 7 in a deposition device that supplies a deposition chamber 1, containing a susceptor for placing a substrate with the reaction gas, and forms a film on a surface of the substrate, to whose upper end a supporting member for a susceptor is connected, and has a rotary shaft 6 extending downward through a through-hole 1c opened at the bottom wall 1a of the deposition chamber, and a rotating mechanism for the rotary shaft arranged below the deposition chamber. SOLUTION: The rotating mechanism 7 has a bearing 9 arranged with a cylinder-shaped pressing member 8 installed between the bottom surface of bottom wall 1a of the deposition chamber 1 and itself, and a drive source 10 arranged down below the bearing 9. While there are formed on the pressing member 8 an annular distribution chamber 13 and an inlet 14 for introducing a purging gas into the distribution chamber 13 from one place around its periphery, there are formed two or more nozzle holes 15 for spouting the purge gas from the distribution chamber 13 to a clearance gap between the pressing member 8 and the rotary shaft 6 by having an clearance in a circumferential direction. COPYRIGHT: (C)2011,JPO&INPIT

84. 发明专利

JP2004312871A Motor and its manufacturing method 有权
公开(公告)号：JP2004312871A
公开(公告)日：2004-11-04
申请号：JP2003102721
申请日：2003-04-07
申请人： Denso Corp , 株式会社デンソー
发明人： SUZUKI KUNIHIKO , KATO TOSHIO , NAKANISHI YOSHITOSHI , SAKAI HIROMI
IPC分类号： F04D5/00 , H02K1/17 , H02K7/14 , H02K15/03
摘要： PROBLEM TO BE SOLVED: To provide a motor, which can hold a permanent magnet easily, and its manufacturing method.
SOLUTION: An elastic member 100 is formed into the shape of a tube which shrinks in diameter from both sides in axial direction to the center in axial direction. Four protrusions 102 extending axially are made in the circumference of the elastic member 100. The protrusions 102 are made in positions which correspond to the gaps made by four magnetic base materials 110 installed circumferentially. Pressing an upper mold 230 with a pressing mold 240 will compress the elastic member 100 axially with the upper mold 230 and allow the recessed axial center of the elastic member 100 to expand outward in diametrical direction. The periphery 104 of the elastic member 100 positioned between the protrusions 102 contact equally without space with the internal perimeter 112 of the magnetic base material 110. Resin is charged between a housing 22 and the elastic member 100 through the gate 232 of the upper mold 230 from the gate 244 of the pressing mold 240, and then the magnetic base material 110 is magnetized to form a permanent magnet.
COPYRIGHT: (C)2005,JPO&NCIPI

85. 发明专利

JP2004030367A Control device for liquid level position 有权
公开(公告)号：JP2004030367A
公开(公告)日：2004-01-29
申请号：JP2002187299
申请日：2002-06-27
申请人： Denso Corp , 株式会社デンソー
发明人： SUZUKI KUNIHIKO , SAKAI HIROMI
IPC分类号： G05D9/02
摘要： PROBLEM TO BE SOLVED: To provide a control device for liquid level position which requires no motive power to adjust the liquid level of test fluid and prevents the test liquid from being volatilized resulting from heating, an environment from becoming worse owing to volatilization, and the test fluid from being oxidized by coming into contact with oxygen.
SOLUTION: A port 43 is opened at a predetermined position which is installed as the liquid level of the test fluid in a storage part 20. When the liquid level of the test fluid becomes higher than the port 43, the port 43 is closed to stop supplying nitrogen from the storage part 20 to a liquid tank 30, so the pressure in the storage part 20 rises and the test fluid reflows to the liquid tank 30. When the liquid level position of the test fluid becomes lower than the port 43, on the other hand, the port 43 is opened to supply nitrogen from the storage part 20 to the liquid tank 30, so the pressure in the liquid tank 30 rises to supply the test fluid to the storage part 20. Consequently, the liquid level position of the test fluid can be adjusted to the constant position by pressure balance of nitrogen without any motive power.
COPYRIGHT: (C)2004,JPO

86. 发明专利

JP2004019547A Method and device for inspecting fuel pump 有权
公开(公告)号：JP2004019547A
公开(公告)日：2004-01-22
申请号：JP2002175496
申请日：2002-06-17
申请人： Denso Corp , 株式会社デンソー
发明人： SAKAI HIROMI , SUZUKI KUNIHIKO
IPC分类号： F02M37/08 , F02M65/00
摘要： PROBLEM TO BE SOLVED: To provide a device and a method for inspecting a fuel pump for enhancing the safety, reducing consumption of inert gas, improving a working environment, and simplifying the device.
SOLUTION: A fuel outlet 72 side of a fuel pump 2 is covered by a tank cover 20. A space between the fuel pump 2 and the tank cover 20 is sealed by a seal member 21 and a seal member 22, and a part in a vicinity of a terminal part 73 is isolated from the outside. After being covered by the tank cover 20, a space inside the tank cover 20 is evacuated. Nitrogen is filled in the evacuated space inside the tank cover 20. When the inspection is carried out by operating the fuel pump 2, an oxygen deficient atmosphere is formed in a vicinity of an abutting part of an energization member 25 on the terminal part 73. Therefore, the safety is enhanced when inspecting the fuel pump 2. Nitrogen is only fed inside the tank cover 20, the consumption is reduced, and the peripheral working environment is improved.
COPYRIGHT: (C)2004,JPO

87. 发明专利

JP2004011452A FLOW RATE INSPECTION METHOD AND ITS DEVICE 审中-公开
公开(公告)号：JP2004011452A
公开(公告)日：2004-01-15
申请号：JP2002162584
申请日：2002-06-04
申请人： DENSO CORP
发明人： SAKAI HIROMI , SUZUKI KUNIHIKO
IPC分类号： F02M37/08 , F02M65/00 , F04B51/00 , F04D15/00
摘要： PROBLEM TO BE SOLVED: To provide a flow inspection method requiring no air purging process and a shorter period for inspection and allowing highly accurate measurement of a flow rate, and its device. SOLUTION: A fuel pump 2 is depressurized prior to the measurement of the flow rate of a test fluid discharged from the fuel pump 2, as an inspected object. A complicated-shape fluid flow path formed in the fuel pump 2 is therefore depressurized and the test fluid stored in a tank 41 at the atmospheric pressure is filled in the depressurized fluid flow path. As a result, the residence of air in the form of air bubbles in the fluid flow path is avoided and no air purging process is required, permitting the measurement of the discharge flow rate to be started together with the energization of the fuel pump 2. Since the residence of air in the fluid flow path is avoided, the degradation of the measurement accuracy of the flow rate due to the generation of the air bubbles is prevented. Furthermore, the test fluid is supplied from the tank 41 to the fuel pump 2 with a pressure difference, and so no motive power is required. COPYRIGHT: (C)2004,JPO

88. 发明专利

JPH09201625A MULTISTAGE CORD TAKING-OUT DEVICE FOR PIPE 失效
公开(公告)号：JPH09201625A
公开(公告)日：1997-08-05
申请号：JP867396
申请日：1996-01-22
申请人： DENSO CORP , DENSOO KIKO KK
发明人： SUZUKI KUNIHIKO , SAKAKIBARA MAKOTO , TERAHARA SATOSHI , SUZUKI SHOGO , TAKEUCHI TATSU , HIRANO TOSHIYUKI , NOMURA TAKAO , KATO TAKESHI
IPC分类号： B21D22/16 , B21D15/06 , B21D51/16
摘要： PROBLEM TO BE SOLVED: To respectively make the outside diameters of plural cord parts coincide with required outside diameters with simple constitution. SOLUTION: Plural grooves 3a, 3b having shapes corresponding to the outline shapes of cord parts to be formed on a pipe 1 are formed on the inner peripheral surface of a die. A punch 2 is arranged in the inside of the pipe 1 and has a rotary shaft 2c which is arranged in parallel to the center line O1 of the pipe 1 and plural projections 2a, 2b which are provided opposing to the respective grooves 3a, 3b. With a punch driving device 300, the punch 2 is revolved along the inner peripheral surface 1c of the pipe 1 as making the projections 2a, 2b of the punch 2 press-contact with the inner peripheral surface 1c of the pipe 1. The respective projections 2a, 2b has circular-arc parts by which press-contact with the inner peripheral part 1c of the pipe 1 is enabled oh their outer peripheral surfaces and plural circular-arc parts are formed imparting phase difference to each other so as to be alternately in a press- contact state to the inner peripheral surface 1c of the pipe 1 between the plural projections 2a, 2b at the time of working.

89. 发明专利

JP2000321093A ROTATION DETECTING APPARATUS 失效
公开(公告)号：JP2000321093A
公开(公告)日：2000-11-24
申请号：JP12863999
申请日：1999-05-10
申请人： DENSO CORP
发明人： WATANABE YUSUKE , SEKO MAKOTO , SUZUKI KUNIHIKO , YASUDA TOSHIYA
IPC分类号： G01P1/02 , G01B7/00 , G01B7/30 , G01D5/14 , G01D5/245 , G01P3/488
摘要： PROBLEM TO BE SOLVED: To enhance the cost property, the mass productivity and the reliability of a rotation detecting apparatus. SOLUTION: A circuit board 17 is installed inside a sensor housing 11. Circuit components such as a capacitor 18, a resistance 19 and the like are mounted on the circuit board 17. A flexible printed interconnection 21 is connected by an anisotropic conductive film 22 to the tip part of the circuit board 17. In addition, a Hall IC 23 is connected by an anisotropic conductive film 24 to the tip part of the flexible printed interconnection 21. The Hall IC 23 is arranged on the front side of a bias magnet 20. By this constitution, since the Hall IC 23, the flexible printed interconnection 21 and the circuit board 17 are connected by the anisotropic conductive films 24 and 22, their connecting operation can be performed by a heating and compression bonding method which is excellent in mass productivity, and the productivity of this rotation detecting apparatus can be enhanced. In addition, since a mold molding operation is not required, it is possible to solve a problem that the soldered part of the circuit components is melted and disconnected due to heat in the mold molding operation.

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