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    • 89. 发明专利
    • Positive-type radiation-sensitive resin composition
    • JP4062713B2
    • 2008-03-19
    • JP4981198
    • 1998-03-02
    • Jsr株式会社
    • 英一 小林伸一郎 岩永健一 横山勇 王
    • G03F7/004H01L21/027G03F7/039
    • PROBLEM TO BE SOLVED: To provide a positive radiation-sensitive resin composition having a high transmission factor and a small sublimation property against KRF light, stable under the existence of trace base, having high resolution and high sensitivity, and capable of controlling line width with good accuracy by containing a specific radiation-sensitive acid forming agent and an alkali-insoluble or alkali- slightly soluble resin having an acid dissociation protective group and becoming alkali-soluble when the acid dissociation protective group is dissociated. SOLUTION: This positive radiation-sensitive resin composition contains a radiation-sensitive acid forming agent expressed by a formula I and an alkali- insoluble or alkali-slightly soluble resin having an acid dissociation protective group and becoming alkali-soluble when the acid dissociation protective group is dissociated. In the formula I, R and R are a monovalent organic group, and one of them has ester bond (-COO-) or an alcoholic hydroxyl group. This resin contains a repeating unit expressed by a formula II or III, where R -R indicate a hydrogen atom or a methyl group, R indicates a straight chain or branch alkyl group having carbon atoms of 1-4, and R indicates a straight chain or branch alkyl group having carbon atoms of 1-6 or a cyclic alkyl group having carbon atoms of 5-8.