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    • 75. 发明专利
    • Grinding and cleaning material, its manufacturing method, and method of polishing using the material
    • 研磨和清洁材料,其制造方法和使用材料的抛光方法
    • JP2009000766A
    • 2009-01-08
    • JP2007162846
    • 2007-06-20
    • Fuji Kihan:Kk株式会社不二機販
    • MIYASAKA YOSHIO
    • B24C11/00
    • B24C11/005B24C1/083B24C1/086B24C11/00
    • PROBLEM TO BE SOLVED: To provide a grinding and cleaning material usable for finish polishing a surface of an object to be treated into a mirror-finished surface or the like, with the generation of little static electricity, little adhesion of smears to the object and reduced fracture ratio, and having reduced environmental burden in disposal.
      SOLUTION: The grinding and cleaning material is made of: an elastic material which mainly contains soluble nitrogen yielded from a rhizome of amorphophallus konjac and mainly containing mannan and has a moisture content of 10-30%; and abrasive grains of #220 or less blended in the elastic material with a ratio of 1-30% in weight percent, carried by the surface of the elastic material and/or buried in the elastic material, and has a particle diameter of 88-1,190 μm as a whole.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了提供可用于将待处理物体的表面精加工成镜面抛光表面等的研磨和清洁材料,由于产生很少的静电,涂层的附着力小 对象和断裂率降低,处理环境负担减轻。 解决方案:研磨清洗材料由主要含有魔芋根茎的主要含有可溶性氮的弹性材料制成,主要含有甘露聚糖,含水量为10-30%; 在弹性材料中共混有#220以下的磨粒,比例为弹性材料表面承载的/或埋入弹性材料中的重量百分比为1-30%,粒径为88〜 整体为1,190μm。 版权所有(C)2009,JPO&INPIT
    • 79. 发明专利
    • Equipment and method for slurry cleaning etching chamber
    • 浆液清洗室的设备和方法
    • JP2007173785A
    • 2007-07-05
    • JP2006307392
    • 2006-11-14
    • Boc Group Inc:Theザ・ビーオーシー・グループ・インコーポレーテッドThe Boc Group Incorporated
    • DAVIS IAN MARTINLAUBE DAVID P
    • H01L21/304
    • B24C5/04B24C3/325B24C7/0038B24C11/005H01L21/67051
    • PROBLEM TO BE SOLVED: To provide cleaning equipment and a method for removing debrisments effectively from a surface of semiconductor etching chamber.
      SOLUTION: The equipment has an atomization head 22 which includes an entrance port 4 of atomized flow object, an entrance port 6 of abrasive slurry, and an exit port 8 of atomized abrasive slurry. However, in an aspect 200, an internal flow-passage includes a convergence-emission nozzles 24, 28 and a throat portion 26 profiled in more streamline. The throat portion 26 in this aspect includes an inlet hole or opening 16 for the abrasive slurry. The abrasive slurry is introduced in the throat portion 26 by a negative pressure generated by a flow of flowing fluid. The abrasive slurry can be pulled out from one or more abrasive slurry containers 20, and the head 22 can be equipped with one or more fluid connections to one or more flowing fluid supply sources 18.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供从半导体蚀刻室的表面有效地去除碎屑的清洁设备和方法。 解决方案:设备具有雾化头22,雾化头22包括雾化流动物体的入口4,磨料浆料的入口6和雾化磨料浆料的出口8。 然而,在一方面200中,内部流动通道包括会聚发射喷嘴24,28和更流线形成的喉部26。 在该方面,喉部26包括用于磨料浆料的入口孔或开口16。 研磨浆料由流动的流体流产生的负压引入到喉部26中。 研磨浆料可以从一个或多个磨料浆料容器20中拉出,并且头部22可配备有一个或多个流体连接到一个或多个流动的流体供应源18.版权所有(C)2007,JPO&INPIT
    • 80. 发明专利
    • Liquid honing machine and liquid honing method
    • 液体珩磨机和液体嗅觉方法
    • JP2006150585A
    • 2006-06-15
    • JP2005317840
    • 2005-11-01
    • Showa Denko Kk昭和電工株式会社
    • HISADA NOBUHIKO
    • B24C9/00B08B1/04B08B3/02B08B3/04B08B5/00B08B9/02B24C3/00B24C3/10B24C3/18
    • B24C11/005
    • PROBLEM TO BE SOLVED: To prevent pollution of a cleaning zone in a liquid honing machine having a honing zone for performing liquid honing of a work and a cleaning zone for cleaning the work subjected to liquid honing adjacent to each other in a housing isolated from the outer air. SOLUTION: Between a honing zone 5 and a cleaning zone 6 in a housing 4 of a liquid honing machine 1, there is provided a partition wall 7 for preventing atmospheric gas in the honing zone 5 from flowing into the cleaning zone 6. Furthermore, in the housing 4 is disposed an in-liquid conveyance device 10 for conveying the work 2 that has been subjected to liquid honing in the honing zone 5 from the honing zone 5 to the cleaning zone 6, where the work 2 is conveyed while being immersed in a liquid 72 in a conveyance tank 11. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了防止在具有用于对工件进行液体珩磨的珩磨区域的液体珩磨机中的清洁区域的污染和用于清洁在壳体中彼此相邻的液体珩磨的工件的清洁区域 与外界隔绝。 解决方案:在珩磨区域5和液体珩磨机1的壳体4中的清洁区域6之间设置有用于防止珩磨区域5中的大气气体流入清洁区域6的分隔壁7。 此外,在壳体4中设置有液体输送装置10,用于将在珩磨区域5中进行了珩磨处理5的液体珩磨的工件2从珩磨区域5输送到清洁区域6, 浸没在输送槽11中的液体72中。版权所有(C)2006,JPO&NCIPI