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71. 发明专利

JPH07240037A DEVICE FOR CENTERING GLASS MASTER DISK 失效
公开(公告)号：JPH07240037A
公开(公告)日：1995-09-12
申请号：JP5277294
申请日：1994-02-25
申请人： SONY CORP
发明人： AKI YUICHI
IPC分类号： G11B7/26 , G11B17/022 , G11B19/20
摘要： PURPOSE:To rapidly and accurately center with simple and inexpensive constitution by constituting SO that respective guide pieces are abutted on the outer periphery of the glass master disk on a turntable by the rocking of respective link arms around pivot shafts. CONSTITUTION:The link arms 22-24 are provided with the pivot shafts 22a-24b respectively arranged on equal distances from the pivot shafts 21a-21c. Respective guide pieces 27-29 are arranged on the positions of the equal distances from the pivot shafts 21a-21c respectively. In such a manner, respective link arms 22-24 rock in the same direction and only at the same angle each other, and the guide pieces 27-29 attached to respective link arms 22-24 are guided so as to be in the equal distance for the center of the rotation of the turntable 16. Thus, by the rocking of respective link arms 22-24 interlocking each other, respective guide pieces 27-29 are held to the uniform positions for the center of the rotation of the turntable 16.

72. 发明专利

JP2003242923A ELECTRON BEAM IRRADIATION DEVICE AND ELECTRON BEAM IRRADIATION METHOD 审中-公开
公开(公告)号：JP2003242923A
公开(公告)日：2003-08-29
申请号：JP2002035873
申请日：2002-02-13
申请人： SONY CORP
发明人： AKI YUICHI , YAMAMOTO MASANOBU
IPC分类号： H01J37/18 , G11B7/26 , H01J37/301 , H01J37/305
摘要： PROBLEM TO BE SOLVED: To provide an electron beam irradiation device, having a structure that a static pressure floating pad 19 is connected to a vacuum chamber 15 in which, an electron beam column 12 is housed, and that the electron beam is irradiated to an object to be irradiated 1 in a state that the static pressure floating pad 19 is stuck to the object to be irradiated 1 in noncontact, capable of stopping down the beam spot radius of focus much smaller. SOLUTION: The distance between an object lens 30 and the object to be irradiated 1 is made closer by separating the object lens 30 at the top end of the electron beam column 12, and integrating the object lens with the static pressure floating pad 19. COPYRIGHT: (C)2003,JPO

73. 发明专利

JP2001035022A METHOD AND DEVICE FOR MANUFACTURING OPTICAL INFORMATION RECORDING MEDIUM 失效
公开(公告)号：JP2001035022A
公开(公告)日：2001-02-09
申请号：JP20555899
申请日：1999-07-21
申请人： SONY CORP
发明人： MASUHARA SHIN , AKI YUICHI
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To enable manufacturing using a light source in far ultraviolet rays area, even for a type to which an exposure system of the two-beam method is applied, by circulating liquid held at a specific temperature and controlling the temperature of the peripheral members of a heat source at the specific level. SOLUTION: A movable base 47 constitutes a device for supporting an optical system that emits an exposure beam to an object to be exposed. Then, the entirety is formed roughly in a box shape using the same material as that of the base to reduce expansion and contraction due to change in temperature. In addition, this movable base 47 is structured such that a pipe for circulating water is arranged in the bottom, circulating water is made to circulate with the temperature controlled by a temperature regulator 51. This regulator 51 controls the temperature of the circulating water so that the temperature of the circulating water is in agreement precisely with the ambient temperature of the exposure system. As a result, the movable base 47 is designed to fully suppress temperature rising by a heat source such as a focusing optical system.

74. 发明专利

JPH11288532A EXPOSURE DEVICE, EXPOSURE METHOD AND RECORDING MEDIUM 失效
公开(公告)号：JPH11288532A
公开(公告)日：1999-10-19
申请号：JP8736998
申请日：1998-03-31
申请人： SONY CORP
发明人： YAMATSU HISAYUKI , AKI YUICHI , YAJIMA TAKASHI
IPC分类号： G11B7/26 , G03F7/20 , G11B7/24
摘要： PROBLEM TO BE SOLVED: To hold information in the direction except a track direction and to heighten recording density by controlling an advance direction of an electron beam, transmitting the electron beam through opening parts of a mask having the opening parts of plural different shapes arranged in the path of the electron beam controlled with a deflection means and controlling the advance direction of the electron beam according to a pit pattern. SOLUTION: The electron beam EB passes through an aperture 24, and is converged by a middle lens 25, and its advance direction is controlled by a first deflection electrode 26, and the advance direction is controlled according to a modulation signal supplied from a modulation signal output circuit. Further, when the pattern answering to a second pit is exposed by the electron beam EB emitted from an electron beam head, a voltage is applied to respective electrodes constituting the first deflection electrode 26, and the advance direction of the electron beam EB is bent by an electric field occurring on them, and the electron beam EB is made to pass through the opening part 27b.

75. 发明专利

JPH1141964A ROTATING DEVICE 失效
公开(公告)号：JPH1141964A
公开(公告)日：1999-02-12
申请号：JP19219897
申请日：1997-07-17
申请人： SONY CORP
发明人： OHIRA TAKAYUKI , AKI YUICHI
IPC分类号： G11B7/26 , G05D13/62 , H02P29/00 , H02P5/00
摘要： PROBLEM TO BE SOLVED: To improve the accuracy of rotation control in a rotating device. SOLUTION: In a rotating device, a record reproducing means, which records and reproduces a reference clock in a second track 14B of a rotary encoder 14 provided in a concentric state with a first track 14A of the rotary encoder, is provided. At the time of calibration, a torque output source is controlled so that the rotary encoder 14 can be rotated at a constant speed sufficiently higher than the frequency band, at which the driving state of a torque output source can be controlled. Under this state, the reference clock is recorded in a second clock of the rotary encoder through the record reproducing means. In the meantime, the drive state of the torque output source is controlled so that the rotary encoder is rotated in the specified state, based on the reference clock recorded in the second track 14B of the rotary encoder 14 at the time of the rotation mode in continuation of the calibration mode.

76. 发明专利

JPH09212923A MANUFACTURE OF OPTICAL-DISK MASTER DISK 失效
公开(公告)号：JPH09212923A
公开(公告)日：1997-08-15
申请号：JP3903196
申请日：1996-01-31
申请人： SONY CORP
发明人： TANAKA HIROAKI , AKI YUICHI
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To manufacture an optical-disk master disk easily by a method wherein a high-hardness carbon film layer is formed on one face of a substrate, it is irradiated with a laser beam while the laser beam is being turned on and off according to a recording signal and an opening part or a recessed part is foremd in a required part. SOLUTION: A plated layer 11 is formed on one face 10A of a substrate 10, and the side of the face 10A of the substrate 10 is finished to be smooth. Then, a thin-film layer 12 which is composed of DLC(diamondlike carbon) is foremd on the face 10A of the substrate 10. Then, the DLC thin film layer 12 is irradiated with a laser beam according to a recording signal. Thereby, a disk master 13 which comprises an uneven pattern according to the recording signal is formed on one face. In succession, a metal layer 14 is formed on one face of the disk master 13, the metal layer 14 is then stripped from the substrate 10, and a center hole is formed. Thereby, it is possible to obtain a stamper which comprises the uneven pattern according to the recording signal on one face 15A.

77. 发明专利

JPH08118057A LASER BEAM MACHINE 失效
公开(公告)号：JPH08118057A
公开(公告)日：1996-05-14
申请号：JP26596394
申请日：1994-10-31
申请人： SONY CORP
发明人： AKI YUICHI
IPC分类号： B23K26/00 , B23K26/06 , H01S3/00 , H01S3/10
摘要： PURPOSE: To easily obtain the irradiation conditions of a laser beam which are most suitable for the material and machining characteristics of an object to be worked. CONSTITUTION: A continuously generated ultraviolet laser beam, which is emitted from the UV laser light source mounted on the upper base 3 of a machine frame 2, is modulated to an intensity suitable for the machining of an object 9 by means of a light intensity modulating optical system 4; after that, with its focus adjusted by a focal adjustment optical system, the ultraviolet laser beam is put through an objective lens 6; and the surface of the object 9, which is placed and fixed on the X-Y table 8 on the lower base 7, is irradiated with the laser beam as a beam spot.

78. 发明专利

JPH0751977A ROTATION DIRECT-ACTING CONVERSION MECHANISM 失效
公开(公告)号：JPH0751977A
公开(公告)日：1995-02-28
申请号：JP21521493
申请日：1993-08-06
申请人： SONY CORP
发明人： AKI YUICHI
IPC分类号： B23Q5/40 , B23Q5/58
摘要： PURPOSE:To prevent breakage of a feed nut when a driven part erroneously exceeds a movable range, in a rotation direct-acting conversion mechanism having a feed screw connected to a rotation drive means and a driven part wherein a feed nut is fitted in a feed screw and the course thereof is guided by a guide member to effect direct-acting. CONSTITUTION:A contact member 15 rotated following a feed screw 7 is arranged to the end part of a moving range. Whereupon, when a driven part 10 is erroneously moved to the end part of the moving range, it is brought into contact with a contact plate 15 and friction torque is generated. Therefore, only a part of drive rotation torque of a rotation drive means 2 is consumed for rotation torque of a feed nut 10b. Thus, breakage of the feed but 10b is prevented from occurring.

79. 发明专利

JPH06341435A AIR STATIC PRESSURE BEARING DEVICE 失效
公开(公告)号：JPH06341435A
公开(公告)日：1994-12-13
申请号：JP15272493
申请日：1993-05-31
申请人： SONY CORP
发明人： AKI YUICHI
IPC分类号： F16C32/06
摘要： PURPOSE:To improve stability by respectively forming clearnces between plate- like members respectively provided on both ends of a rotary shaft and respective opposed faces of a housing, supplying high pressure air to the clearances, and relatively setting the pressure receiving areas of both plate-like members so as to equalize the difference of pressure received on both plate-like members to the gravity received on a rotational part and a rotational object. CONSTITUTION:The rotary shaft 3 of the rotor 12 of a vertical type air static pressure bearing device 10 is provided with a lower side thrust plate 11 and an upper side thrust plate 15, and a housing 2 is arranged so as to respectively form clearances 17A, 17B between the housing and both the thrust plates 11, 15. High pressure air is supplied to the respective clearances 17A, 17B through horizontal holes 2B, 2C and vertical holes 2D, 2E. The pressure receiving area of the upper side thrust plate 15 is set larger than the pressure receiving area of the lower side thrust plate 11, and the difference of pressure of the high pressure air received on both plates 11, 15 is equalized to the gravity received on the rotational part 16 and the rotational object 9.

80. 发明专利

JPH05322796A PAINT FILM INSPECTING DEVICE 失效
公开(公告)号：JPH05322796A
公开(公告)日：1993-12-07
申请号：JP15858592
申请日：1992-05-25
申请人： SONY CORP
发明人： NAKAJIMA TOSHIHIRO , AKI YUICHI , ISHII HIROYUKI , YAMASHITA SHIGETERU
IPC分类号： G01B11/30 , G01N21/88 , G01N21/95 , G11B7/26
摘要： PURPOSE:To miniaturize an inspecting device by incorporating a defect detecting device and a film thickness detecting device of a resist film formed on the surface of a glass original board for generating the master pattern of a photo- disk in a common unit. CONSTITUTION:An inspecting carriage 29 is movably provided near the work bench of a common unit. A defect detecting pickup 30 and a film thickness detecting device 37 are mounted respectively on the carriage 29, and the defect detection and film thickness measurement of a resist film are performed in parallel while the carriage 29 is moved in the radial direction of a glass original board 12.

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