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    • 73. 发明专利
    • AMORPHOUS THIN FILM SOLAR CELL
    • JPH0312973A
    • 1991-01-21
    • JP14803489
    • 1989-06-09
    • MITSUBISHI HEAVY IND LTD
    • MORITA SHOJIMURAKAMI YUICHIRO
    • H01L31/04
    • PURPOSE:To arrest the reduction of a transparent electrode and obtain a high electric characteristic by interposing a metal or metallic silicide layer between said transparent electrode and a p-layer and mixing microcrystals in said p- layer. CONSTITUTION:The present invention comprises glass substrate 1, a transparent electrode 2, a p-layer 4, an i-layer 5, an n-layer 6, and metal electrodes 7. A metal or metallic silicide layer 3 is interposed between the transparent electrode 2 and the p-layer 4 and microcrystals are mixed in the p-layer 4. The thin metal layer 3 is thus formed on the transparent electrode 2 and then p-, i-, and n-layers 4-6 are thus formed in that order, therefore, the transparent electrode 2 does not come into direct contact with hydrogen plasma. Therefore, fewer metallic impurities diffuse and mix in an amorphous layer. The high- conductivity amorphous p-layer 4 containing microcrystals reduces the series resistance. Thereby the reduction of the transparent electrode is arrested and a high electric characteristic is obtained.
    • 74. 发明专利
    • MANUFACTURE OF COMPOUND SEMICONDUCTOR THIN FILM
    • JPH02116121A
    • 1990-04-27
    • JP26816788
    • 1988-10-26
    • MITSUBISHI HEAVY IND LTD
    • MURAKAMI YUICHIROMORITA SHOJIYONEKURA YOSHIMICHI
    • C23C14/24H01L21/208
    • PURPOSE:To enable even a thin film of multi-component compound semiconductor to be produced relatively simply and different kinds of compound semiconductor thin films to be produced easily by supplying a compound semiconductor fine powder to a heated crucible intermittently in a specified state. CONSTITUTION:A material fine powder is put into fine powder retaining holes 2 and 3 which are provided at a rotary disc 1 and the disc 1 is rotated to allow fine power to be dropped from a lower port 5 to a tray 6 when the hole 2 agrees with a disc retaining plate 4. The tray 6 is vibrated pulsively through a vibration mechanism connection part 9 and a tray supporting bar 8 and is dropped to a crystal pipe funnel 12 through a slit mechanism 7 of the tray 6, thus being supplied to a crucible 13. Fine powder rapidly heated by the crucible 13 evaporates instantaneously, is heated by a substrate heating mechanism 17, and is deposited to a glass substrate 16 which is heated by a substrate heating mechanism 17 and is maintained at a constant temperature. After fine power is completely evaporated in the crucible 13, the disc 1 is rotated and fine powder of the next hole 3 is supplied to the crucible 13.
    • 76. 发明专利
    • FORMATION OF AMORPHOUS THIN-FILM
    • JPS63313872A
    • 1988-12-21
    • JP14922187
    • 1987-06-17
    • MITSUBISHI HEAVY IND LTD
    • MORITA SHOJIMURAKAMI YUICHIRO
    • H01L21/205H01L31/04
    • PURPOSE:To inhibit optical deterioration by forming the interface of P-layer/I- layer by using a plasma ion bombardment relaxing means. CONSTITUTION:A P layer 3 is shaped, the inside of a reaction vessel 16 is exhausted, a raw material gas (silane) for an I layer 4 is introduced, and the I layer 4 is formed for a fixed time through the same method as the P layer 3. A DC bias (a direct current bias) is loaded between a susceptor 14 and a specified position in a gas introducing port 18 so that the susceptor 14 is brought to positive charges by a DC power 22 at the same time as discharge starting at that time. The time loading the DC bias depends upon the conditions of film formation, but approximately 5-10% of the film formation time of the I layer at the initial stage of the formation of the I layer is proper. Consequently, when the interface of P-layer/I-layer is shaped, a means in which bombardment to a film forming surface by the ions of H , SiH , etc., existing in plasma is relaxed is adopted. thus decreasing defects near the interface, then improving the characteristics of the interface of P-layer/I-layer. Accordingly, the optical deterioration of an element is inhibited.