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    • 80. 发明专利
    • LAMINATED ACTUATOR AND MANUFACTURE THEREOF
    • JPS62211975A
    • 1987-09-17
    • JP5596186
    • 1986-03-12
    • MURATA MANUFACTURING CO
    • OGAWA TOSHIO
    • H01L41/09H01L41/083
    • PURPOSE:To contrive to cut down the cost of a laminated actuator by a method wherein lead or thin or a low-melting point metal which is an alloy of these metals is used as the material for forming the internal electrodes and the low- melting point metal in a fused state is injected in the cavity provided in a previously sintered ceramics. CONSTITUTION:Pastes consisting of a material capable of forming cavity layers on the surfaces of ceramic green sheets by sintering the ceramic green sheets at a temperature at which ceramics are sintered are each coated on the ceramic green sheets 23-25, the cavity layers are formed by sintering and by injecting lead or tin or a low-melting point metal which is an alloy of these metals in these cavity layers, internal electrodes 28-30 are formed. Moreover, for electrically connecting the prescribed internal electrodes, conductive paths are formed by injecting lead or tin or a low-melting point metal which is an alloy of these metals in a fused state in the interiors of through holes 33 and 34 formed in the ceramics.